Reflecting objective system including a negative optical power second mirror with increasing negative optical power off-axis

Claim 2

A reflecting objective system comprising, in the travelling order of the light incident from the object side, a first reflecting mirror having a positive optical power and a second reflecting mirror having a negative optical power arranged symmetrically with regard to an optical axis common thereto, both of said reflecting mirrors having aspherical surfaces symmetrical with regard to said optical axis, and said second reflecting mirror having such a shape as to progressively strengthen the negative optical power thereof from the optical axis toward the marginal portion thereof.

Claim 3

A reflecting objective system according to claim 1 wherein the following condition (6) is satisfied by ΣOPD obtained as a total sum of the differences in the optical path lengths for the axial marginal ray between the aspherical surfaces of said two reflecting mirrors and the reference spheres thereof normalized to the heights of the marginal ray on the respective aspherical surfaces: 0.5×10.sup.-5 ≦ΣOPD×(f/L.sub.01).sup.2 ≦1.5×10.sup.-4 ( 6) wherein the reference symbol f represents the focal length of said reflecting objective system and the reference symbol L 01 designates the distance as measured from the object point to the first reflecting mirror.

Claim 4

A reflecting objective system according to claim 1 satisfying the following condition (7): 1×10.sup.-5 ≦|ΔZ.sub.A1 /h.sub.A1 |≦5×10.sup.-3 ( 7) wherein the reference symbol h A1 designates the height of the axial marginal ray on the first reflecting mirror and the reference symbol ΔZ A1 denotes the departure from the reference sphere of the aspherical surface of said first reflecting mirror as measured along the optical axis at the height of h A1 .

Claim 5

A reflecting objective system according to claim 1 satisfying the following condition (8): 1×10.sup.-4 ≦|ΔZ.sub.A2 /h.sub.A2 |≦3×10.sup.-2 ( 8) wherein the reference symbol h A2 represents height of the axial marginal ray on the second reflecting mirror and the reference symbol ΔZ A2 designates the departure from the reference sphere of the aspherical surface of said second reflecting mirror as measured along the optical axis at the height of h A2 .

Claim 6

A reflecting objective system according to claim 1 wherein said aspherical surfaces are expressed by the formula given below, the aspherical surface of the first reflecting mirror satisfies the following condition (9) and the aspherical surface of the second reflecting mirror satisfies the following condition (10): ##EQU2## wherein the reference symbol z represents the distance as measured along the optical axis from the vertex of the aspherical surface of interest to a point on the aspherical surface, the reference symbol c designates the radius of curvature of the reference sphere of the aspherical surface of interest, the reference symbol h denotes the distance as measured in the direction perpendicular to the optical axis from the optical axis to a point on the aspherical surface, the reference symbol k represents the conical coefficient, and the reference symbols A, B, C and D designate the aspherical surface coefficients of the fourth, sixth, eighth and tenth orders respectively.

Claim 7

A reflecting objective system according to claim 1 wherein additional reflecting mirror for turning back the light are arranged in the optical path between said first reflecting mirror and said second reflecting mirror so that the light reflected on the first reflecting mirror is reflected by these additional reflecting mirrors and then incident on said second reflecting mirror.