US5138490A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Arrangement for changing the geometrical form of a light beam
Assignee: Carl Zeiss SMT GmbH
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Filing: 1990-04-05
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Granted: 1992-08-11
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Expires: 2010-04-05
Abstract
Abstract The invention is directed to a mirror for changing the geometric shape of a light beam. A two-dimensional intensity distribution substantially independent of the mode structure can be generated by mounting a grating in the optical beam path of the laser beam. The intensity distribution is constant in one direction and, in a direction perpendicular thereto, the intensity can have any preselectable intensity distribution.
Inventors
- 👤 Gerhard Hohberg
- 👤 Kurt Becker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:52
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/09; G02B27/0938; G02B27/0944; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/073; B23K26/0738; G02B27/0025; G02B27/0911; G02B27/0977; G02B27/0983; G02B5/00; G02B5/08; G02B5/10
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
185 words
An arrangement for changing the geometric form of a light beam, the arrangement comprising: beam source means for supplying a light beam defining a beam path; a mirror disposed in said beam path; said mirror having a plurality of strip-like mirrored segments disposed one next to the other and said segments defining a common symmetry axis; said segments having respective sizes selected so as to cause the light beam to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; said segments each being formed and aligned so as to cause each one of said zones to be reflected and directed to a strip-like region of an object with said zones being superposed on each other on said strip-like region; and, a diffraction grating disposed in a spaced relationship to said mirror and being arranged in said beam path for fanning said beam and to coact with said mirror to convert said laser beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
Claim 2
Dependent Claim
185 words
An arrangement for changing the geometric form of a light beam, the arrangement comprising: beam source means for supplying a light beam defining a beam path; a mirror disposed in said beam path; said mirror having a plurality of strip-like mirrored segments disposed one next to the other and said segments defining a common symmetry axis; said segments having respective sizes selected so as to cause the light beam to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; said segments each being formed and aligned so as to cause each one of said zones to be reflected and directed to a strip-like region of an object with said zones being superposed on each other on said strip-like region; and, a diffraction grating disposed in a spaced relationship to said mirror and being arranged in said beam path for fanning said beam and to coact with said mirror to convert said laser beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
Claim 3
Dependent Claim
12 words
The arrangement of claim 1, wherein said grating is a reflection grating.
Claim 4
Dependent Claim
12 words
The arrangement of claim 2, wherein said grating has a curved surface.
Claim 5
Dependent Claim
14 words
The arrangement of claim 1, wherein said grating is disposed downstream of said mirror.
Claim 6
Independent Claim
153 words
A method of processing the surface of a workpiece with a laser beam defining a beam path and a mirror having a plurality of strip-like mirrored segments defined by rotational bodies and being disposed one next to the other and the segments defining a common symmetry axis, the method comprising: directing a laser beam toward said mirror so as to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; forming and aligning all of said segments so as to cause said zones to be reflected and directed to one strip-like work area on the surface of the workpiece; and, placing a diffraction grating in the beam path for fanning the beam and for coacting with the mirror to convert the beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
Claim 7
Independent Claim
153 words
A method of processing the surface of a workpiece with a laser beam defining a beam path and a mirror having a plurality of strip-like mirrored segments defined by rotational bodies and being disposed one next to the other and the segments defining a common symmetry axis, the method comprising: directing a laser beam toward said mirror so as to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; forming and aligning all of said segments so as to cause said zones to be reflected and directed to one strip-like work area on the surface of the workpiece; and, placing a diffraction grating in the beam path for fanning the beam and for coacting with the mirror to convert the beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-11 | 1996-02-10 | 1996-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-11 | 2000-02-10 | 2000-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-11 | 2004-02-10 | 2004-08-11 | $7700.00 | Window Closed / Lapsed |