← Back to Patent Explorer
US5138490A Expired / Lapsed US ⏱️ 0.0 years remaining

Arrangement for changing the geometrical form of a light beam

Assignee: Carl Zeiss SMT GmbH
•
Filing: 1990-04-05
•
Granted: 1992-08-11
•
Expires: 2010-04-05
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract The invention is directed to a mirror for changing the geometric shape of a light beam. A two-dimensional intensity distribution substantially independent of the mode structure can be generated by mounting a grating in the optical beam path of the laser beam. The intensity distribution is constant in one direction and, in a direction perpendicular thereto, the intensity can have any preselectable intensity distribution.

Inventors

  • 👤 Gerhard Hohberg
  • 👤 Kurt Becker

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 21:52
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/09; G02B27/0938; G02B27/0944; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/073; B23K26/0738; G02B27/0025; G02B27/0911; G02B27/0977; G02B27/0983; G02B5/00; G02B5/08; G02B5/10

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 185 words
An arrangement for changing the geometric form of a light beam, the arrangement comprising: beam source means for supplying a light beam defining a beam path; a mirror disposed in said beam path; said mirror having a plurality of strip-like mirrored segments disposed one next to the other and said segments defining a common symmetry axis; said segments having respective sizes selected so as to cause the light beam to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; said segments each being formed and aligned so as to cause each one of said zones to be reflected and directed to a strip-like region of an object with said zones being superposed on each other on said strip-like region; and, a diffraction grating disposed in a spaced relationship to said mirror and being arranged in said beam path for fanning said beam and to coact with said mirror to convert said laser beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
Claim 2
Dependent Claim 185 words
An arrangement for changing the geometric form of a light beam, the arrangement comprising: beam source means for supplying a light beam defining a beam path; a mirror disposed in said beam path; said mirror having a plurality of strip-like mirrored segments disposed one next to the other and said segments defining a common symmetry axis; said segments having respective sizes selected so as to cause the light beam to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; said segments each being formed and aligned so as to cause each one of said zones to be reflected and directed to a strip-like region of an object with said zones being superposed on each other on said strip-like region; and, a diffraction grating disposed in a spaced relationship to said mirror and being arranged in said beam path for fanning said beam and to coact with said mirror to convert said laser beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
Claim 3
Dependent Claim 12 words
The arrangement of claim 1, wherein said grating is a reflection grating.
Claim 4
Dependent Claim 12 words
The arrangement of claim 2, wherein said grating has a curved surface.
Claim 5
Dependent Claim 14 words
The arrangement of claim 1, wherein said grating is disposed downstream of said mirror.
Claim 6
Independent Claim 153 words
A method of processing the surface of a workpiece with a laser beam defining a beam path and a mirror having a plurality of strip-like mirrored segments defined by rotational bodies and being disposed one next to the other and the segments defining a common symmetry axis, the method comprising: directing a laser beam toward said mirror so as to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; forming and aligning all of said segments so as to cause said zones to be reflected and directed to one strip-like work area on the surface of the workpiece; and, placing a diffraction grating in the beam path for fanning the beam and for coacting with the mirror to convert the beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.
Claim 7
Independent Claim 153 words
A method of processing the surface of a workpiece with a laser beam defining a beam path and a mirror having a plurality of strip-like mirrored segments defined by rotational bodies and being disposed one next to the other and the segments defining a common symmetry axis, the method comprising: directing a laser beam toward said mirror so as to impinge simultaneously upon several of said segments so as to reflect respective zones of said beam; forming and aligning all of said segments so as to cause said zones to be reflected and directed to one strip-like work area on the surface of the workpiece; and, placing a diffraction grating in the beam path for fanning the beam and for coacting with the mirror to convert the beam into a two-dimensional intensity distribution which is constant in one direction and has any preselectable intensity distribution in a direction perpendicular to said one direction.

References Cited (Backward Citations)

US3888589A Cited
US4302105A Cited
GB2062282A Cited
EP0080597A1 Cited
US4484334A Cited
US4553017A Cited
SU1171744A1 Cited
US4620230A Cited
US4692583A Cited
US4798446A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-08-11 1996-02-10 1996-08-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-08-11 2000-02-10 2000-08-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-08-11 2004-02-10 2004-08-11 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag