US5130747A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Carrier apparatus
Assignee: Toshiba Corp
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Filing: 1991-09-18
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Granted: 1992-07-14
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Expires: 2011-09-18
Abstract
Abstract A carrier apparatus for carrying a plane member such as a semiconductor wafer, a mask for exposure, a optical disk substrate, a liquid crystal panel and so on. To hold such a flat member tightly, the carrier apparatus comprises an elastic member between a holding part and a carrier arm.
Inventors
- 👤 Nobutaka Kikuiri
- 👤 Norio Uchida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/20; G03F7/2002; H; H10; H10P; H10P72/00; H10P72/70; H10P72/78
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
46 words
A carrier apparatus, comprising: a holding means for alternately holding and releasing a plane member; a carrier means for carrying the holding means; a connecting means for connecting the holding means and the carrier means; and, at least one elastic member installed in the connecting means.
Claim 2
Dependent Claim
46 words
A carrier apparatus, comprising: a holding means for alternately holding and releasing a plane member; a carrier means for carrying the holding means; a connecting means for connecting the holding means and the carrier means; and, at least one elastic member installed in the connecting means.
Claim 3
Dependent Claim
29 words
A carrier apparatus according to claim 1, wherein; the connecting means includes a carrier arm; and, the elastic member is installed between the carrier arm and the holding means.
Claim 4
Dependent Claim
16 words
A carrier apparatus according to claim 2, wherein; the holding means including a ring-shaped flat member.
Claim 5
Dependent Claim
18 words
A carrier apparatus according to claim 3, wherein; two or more elastic members are arranged in radial formation.
Claim 6
Dependent Claim
21 words
A carrier apparatus according to claim 3, wherein; the holding means includes a holding part connected to the ring-shaped flat member.
Claim 7
Dependent Claim
49 words
An Exposure Apparatus Comprising; an exposure means; a holding means for alternately holding and releasing a plane member; a carrier means for carrying the holding means; a connecting means for connecting the holding means and the carrier means; and, at least one elastic member installed in the connecting means.
Claim 8
Dependent Claim
49 words
An Exposure Apparatus Comprising; an exposure means; a holding means for alternately holding and releasing a plane member; a carrier means for carrying the holding means; a connecting means for connecting the holding means and the carrier means; and, at least one elastic member installed in the connecting means.
Claim 9
Dependent Claim
29 words
An Exposure Apparatus according to claim 6, wherein; the connecting means includes a carrier arm; and, the elastic member is installed between the carrier arm and the holding means.
Claim 10
Dependent Claim
16 words
An Exposure Apparatus according to claim 7, wherein; the holding means including a ring-shaped flat member.
Claim 11
Dependent Claim
18 words
An Exposure Apparatus according to claim 8, wherein; two or more elastic members are arranged in radial formation.
Claim 12
Dependent Claim
21 words
An Exposure Apparatus according to claim 8, wherein; the holding means includes a holding part connected to the ring-shaped flat member.
References Cited (Backward Citations)
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US4522489A
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US4575231A
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Cited
US4788577A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-14 | 1996-01-13 | 1996-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-14 | 2000-01-13 | 2000-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-14 | 2004-01-13 | 2004-07-14 | $7700.00 | Window Closed / Lapsed |