US5126574A
Expired / Lapsed
US
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Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication
Assignee: United States Department of Commerce
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Filing: 1991-01-14
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Granted: 1992-06-30
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Expires: 2011-01-14
Abstract
Abstract Fabrication of crystalline or molecular nanostructures with dimensions lesshan or equal to 1000 Å on a substrate surface is achieved by the indirect and/or direct action of a highly-localized field-emission current, which causes atoms of molecular gases introduced into a vacuum chamber to deposit or etch at surface atomic sites that are fixed by the emission-tip location. The tip is shaped to maintain control of the emitting region and is typically about 10 Å above the structure. The tip position is stepped in a programmed sequence, with each step taken on detecting the current increase induced by an atomic deposition below the tip. Gas sequences or mixtures can also be programmed, and microstructures of typically 10 2 -10 8 atoms are thereby formed with exact control of the positions and types of atomic constituents. The multi-tipped tool consists of a large array of field-emitting nanostructure probe tip extensions on the end of a metal probe. The probe is tapered to a long, narrow, flat end with typical dimensions of 1 cm×1 μm. The probe tip extensions typically extend approximately 100 Å beyond the probe surface and their ends are shaped to act as independent field-emission tips, each at an exact atomic location. The nanostructures are spaced in a prescribed, repeating pattern with typical spacings on the order of 400 Å. The probe voltage, current and position, as well as CVD or etching gas pressures, are sequentially adjusted to fabricate nanostructures on a nearby substrate, which is typically 10-30 Å below the termination points of the probe tip extensions.
Inventors
- 👤 Alan C. Gallagher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:09
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/45527; C23C16/45536; B; B82; B82B; B82B3/00; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; C23C16/04; C23C16/047; C23C16/45544; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/06; C30B29/10; C30B29/40; C30B29/42; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/073; H01J37/30; H01J37/317; H01J37/3174; H01J37/3177; H01J2237/00; H01J2237/06; H01J2237/063; H01J2237/06325; H01J2237/06341; H01J2237/0635; H01J2237/30; H01J2237/304; H01J2237/30405; H01J2237/30427; H01J2237/317; H01J2237/31735; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/773; Y10S977/775; Y10S977/776; Y10S977/84; Y10S977/842; Y10S977/848; Y10S977/849; Y10S977/86; Y10S977/874; Y10S977/888; Y10S977/89
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
29 words
A multi-tipped field emitting probe for fabrication of molecular nanostructures on a substrate surface comprising a series of probe tip extensions having a spacing in the range of 50-1000Å.
Claim 2
Dependent Claim
29 words
A multi-tipped field emitting probe for fabrication of molecular nanostructures on a substrate surface comprising a series of probe tip extensions having a spacing in the range of 50-1000Å.
Claim 3
Dependent Claim
24 words
A multi-tipped field emitting probe as claimed in claim 1, wherein each of said probe tip extensions is the end of an extended nanostructure.
Claim 4
Dependent Claim
22 words
A multi-tipped field emitting probe as claimed in claim 1, wherein each of said probe tip extensions taper to a termination point.
Claim 5
Dependent Claim
39 words
A multi-tipped field emitting probe as claimed in claim 3, wherein said molecular nanostructure comprises a crystalline material which tapers to a termination point that is a single crystal plane cell with a lower work-function atom at the center.
Claim 6
Dependent Claim
22 words
A multi-tipped field emitting probe as claimed in claim 1, wherein said probe tip extensions are spaced in a prescribed repeating pattern.
Claim 7
Dependent Claim
25 words
A multi-tipped field emitting probe as claimed in claim 1, wherein said pattern is square and the spacing of said repeating pattern is about 50Å×50Å.
Claim 8
Dependent Claim
20 words
A multi-tipped field emitting probe as claimed in claim 1, wherein said pattern is square and spacing is about 400Å×400Å.
Claim 9
Dependent Claim
21 words
A multi-tipped field emitting probe as claimed in claim 1, wherein said probe tip extensions have a length of about 50-1000Å.
Claim 10
Dependent Claim
21 words
A multi-tipped field emitting probe as claimed in claim 1, wherein said probe tip extensions have a diameter of about 25-200Å.
Claim 11
Dependent Claim
21 words
A multi-tipped field emitting probe as claimed in claim 9, wherein said probe tip extensions have a length of about 50-1000Å.
Claim 12
Dependent Claim
16 words
A multi-tipped field emitting probe as claimed in claim 10, wherein said spacing is about 400Å.
Claim 13
Dependent Claim
16 words
A multi-tipped field emitting probe as claimed in claim 10, wherein said spacing is about 500Å.
Claim 14
Dependent Claim
20 words
A multi-tipped field emitting probe as claimed in claim 1, wherein said probe contains at least 1,000 probe tip extensions.
Claim 15
Dependent Claim
24 words
A multi-tipped field emitting probe as claimed in claim 5, wherein a segment of each of said probe tip extensions comprises a resistive material.
Claim 16
Independent Claim
153 words
A method for the accurate positioning of a large array of nanostructures on a substrate using at least three probe tip extensions comprising the steps of: 1) forming said at least three probe tip extensions on the end of a crystal probe so as to form a rigid two-dimensional configuration, said probe tip extensions being fixed relative to one another; 2) simultaneously depositing at least three nanostructure markers on said substrate, one marker corresponding to each of said at least three probe tip extensions; 3) repositioning said probe using STM techniques so that one of said tip extensions is positioned over one of said markers; 4) after step 3, simultaneously depositing at least two additional nanostructure markers; 5) repeating steps 3 and 4 so as to form a marker array; and 6) depositing successive arrays of nanostructures on said substrate surface using said nanostructures markers of said marker array as positional reference points.
Claim 17
Independent Claim
153 words
A method for the accurate positioning of a large array of nanostructures on a substrate using at least three probe tip extensions comprising the steps of: 1) forming said at least three probe tip extensions on the end of a crystal probe so as to form a rigid two-dimensional configuration, said probe tip extensions being fixed relative to one another; 2) simultaneously depositing at least three nanostructure markers on said substrate, one marker corresponding to each of said at least three probe tip extensions; 3) repositioning said probe using STM techniques so that one of said tip extensions is positioned over one of said markers; 4) after step 3, simultaneously depositing at least two additional nanostructure markers; 5) repeating steps 3 and 4 so as to form a marker array; and 6) depositing successive arrays of nanostructures on said substrate surface using said nanostructures markers of said marker array as positional reference points.
Claim 18
Dependent Claim
26 words
The method as recited in claim 15 wherein step 4) includes automatically regulating said simultaneous depositing by means of resistive segments for said probe tip extensions.
Claim 19
Independent Claim
106 words
A method for positioning an array of nanostructures on a substrate or probe surface using a primary probe with an array of probe tip extensions comprising the steps of: 1) depositing nanostructure markers below said array of probe tip extensions on said surface; 2) moving the primary probe to an adjacent portion of the surface using an STM measurement to accurately locate the new position relative to the existing nanostructure markers; 3) repeating steps 1 and 2 until said surface is covered with a desired array of nanostructure markers; and 4) depositing arrays of nanostructures on said surface using said nanostructure markers as positional reference points.
Claim 20
Independent Claim
106 words
A method for positioning an array of nanostructures on a substrate or probe surface using a primary probe with an array of probe tip extensions comprising the steps of: 1) depositing nanostructure markers below said array of probe tip extensions on said surface; 2) moving the primary probe to an adjacent portion of the surface using an STM measurement to accurately locate the new position relative to the existing nanostructure markers; 3) repeating steps 1 and 2 until said surface is covered with a desired array of nanostructure markers; and 4) depositing arrays of nanostructures on said surface using said nanostructure markers as positional reference points.
Claim 21
Independent Claim
91 words
A method for positioning an array of nanostructure markers on a substrate or probe surface using a primary probe with an array of probe tip extensions comprising the steps of: 1) depositing nanostructure markers below said array of probe tip extensions on said surface; 2) moving the primary probe to an adjacent portion of the surface using an STM measurement to accurately locate the new position relative to the existing nanostructure markers; and 3) repeating steps 1 and 2 until said surface is covered with said desired array of nanostructure markers.
Claim 22
Independent Claim
91 words
A method for positioning an array of nanostructure markers on a substrate or probe surface using a primary probe with an array of probe tip extensions comprising the steps of: 1) depositing nanostructure markers below said array of probe tip extensions on said surface; 2) moving the primary probe to an adjacent portion of the surface using an STM measurement to accurately locate the new position relative to the existing nanostructure markers; and 3) repeating steps 1 and 2 until said surface is covered with said desired array of nanostructure markers.
Claim 23
Independent Claim
153 words
A method for the accurate positioning of a large array of nanostructures on a substrate using at least two probe tip extensions comprising the steps of: 1) forming said at least two probe tip extensions on the end of a crystal probe so as to form a rigid two-dimensional configuration, said probe tip extensions being fixed relative to one another; 2) simultaneously depositing at least two nanostructure markers on said substrate, one marker corresponding to each of said at least two probe tip extensions; 3) repositioning said probe using STM techniques so that one of said tip extensions is positioned over one of said markers; 4) after step 3, simultaneously depositing at least two additional nanostructure markers; 5) repeating steps 3 and 4 so as to form a marker array; and 6) depositing successive arrays of nanostructures on said substrate surface using said nanostructure markers of said marker array as positional reference points.
Claim 24
Independent Claim
153 words
A method for the accurate positioning of a large array of nanostructures on a substrate using at least two probe tip extensions comprising the steps of: 1) forming said at least two probe tip extensions on the end of a crystal probe so as to form a rigid two-dimensional configuration, said probe tip extensions being fixed relative to one another; 2) simultaneously depositing at least two nanostructure markers on said substrate, one marker corresponding to each of said at least two probe tip extensions; 3) repositioning said probe using STM techniques so that one of said tip extensions is positioned over one of said markers; 4) after step 3, simultaneously depositing at least two additional nanostructure markers; 5) repeating steps 3 and 4 so as to form a marker array; and 6) depositing successive arrays of nanostructures on said substrate surface using said nanostructure markers of said marker array as positional reference points.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-06-30 | 1995-12-30 | 1996-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-30 | 1999-12-30 | 2000-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-30 | 2003-12-30 | 2004-06-30 | $7700.00 | Window Closed / Lapsed |