X-ray exposure apparatus

Claim 2

An exposure apparatus for exposing a substrate with X-rays, said apparatus comprising: a radiation source for providing X-rays; and a convex mirror for reflecting the X-rays from said radiation source toward the substrate to expose a zone of the substrate with the X-rays; wherein said convex mirror and the substrate are so interrelated that a peak position of intensity distribution of the X-rays upon the zone continuously deviates from the center of the zone.

Claim 3

An apparatus according to claim 1, wherein said convex mirror and the substrate are so interrelated that approximately the same X-ray intensity is provided at an end portion of the zone, closest to said convex mirror, and another end portion of the zone at the opposite side thereof.

Claim 4

An apparatus according to claim 2, further comprising a scanner having an aperture movable along the substrate, between the end portions of the zone, so as to scanningly expose the zone, wherein the exposure of the zone is effected while moving the aperture to assure that, throughout the zone, the quantity of X-rays absorbed by a resist on the zone is made substantially uniform.

Claim 5

An X-ray exposure apparatus for exposing a zone of a wafer to a pattern of a mask with X-rays, said apparatus comprising: a radiation source for providing X-rays; and an illumination optical system for illuminating the mask and then the zone of the wafer with the X-rays, said illumination optical system including a convex mirror for reflecting the X-rays toward the mask and the wafer, wherein said convex mirror is disposed such that the X-rays irradiating the zone of the wafer provide an intensity distribution on the zone, in a predetermined direction, having a peak which is positioned at a distance from an end of the zone closer to said convex mirror, which distance provides irradiation of 20-45% of the area of the zone in the predetermined direction.

Claim 6

An X-ray exposure apparatus for exposing a zone of a wafer to a pattern of a mask with X-rays, said apparatus comprising: a radiation source for providing X-rays; and an illumination optical system for illuminating the mask and then the zone of the wafer with the X-rays, said illumination optical system including a convex mirror for reflecting the X-rays toward the mask and the wafer, wherein said convex mirror is disposed such that the X-rays irradiating the zone of the wafer provide an intensity distribution on the zone, in a predetermined direction, having a peak which is positioned at a distance from an end of the zone closer to said convex mirror, which distance provides irradiation of 20-45% of the area of the zone in the predetermined direction.

Claim 7

An x-ray exposure apparatus for exposing a zone of a wafer to a pattern of a mask with X-rays, said apparatus comprising: a synchrotron radiation source having a plane of horizontal orbit, for providing X-rays; and an illumination optical system for illuminating the mask and then the zone of the wafer with the X-rays, said illumination optical system including a convex mirror for reflecting the X-rays toward the mask and the wafer and being effective to expand a beam diameter of the X-rays with respect to a first direction which is perpendicular to the plane of horizontal orbit of said synchrotron radiation source, wherein said convex mirror is disposed such that the X-rays irradiating the zone of the wafer provide an intensity distribution on the zone having a peak which is positioned, with respect to a second direction corresponding on the zone to the first direction, at a distance from an end of the zone closer to said convex mirror, which distance provides irradiation of 20-45% of the area of the zone in the second direction.

Claim 8

An x-ray exposure apparatus for exposing a zone of a wafer to a pattern of a mask with X-rays, said apparatus comprising: a synchrotron radiation source having a plane of horizontal orbit, for providing X-rays; and an illumination optical system for illuminating the mask and then the zone of the wafer with the X-rays, said illumination optical system including a convex mirror for reflecting the X-rays toward the mask and the wafer and being effective to expand a beam diameter of the X-rays with respect to a first direction which is perpendicular to the plane of horizontal orbit of said synchrotron radiation source, wherein said convex mirror is disposed such that the X-rays irradiating the zone of the wafer provide an intensity distribution on the zone having a peak which is positioned, with respect to a second direction corresponding on the zone to the first direction, at a distance from an end of the zone closer to said convex mirror, which distance provides irradiation of 20-45% of the area of the zone in the second direction.

Claim 9

An x-ray exposure apparatus for exposing a zone of a wafer to a pattern of a mask with X-rays, said apparatus comprising: a synchrotron radiation source having a plane of horizontal orbit, for providing X-rays; and an illumination optical system for illuminating the mask and then the zone of the wafer with the X-rays, said illumination optical system including a convex mirror for reflecting the X-rays toward the mask and the wafer and being effective to expand a beam diameter of the X-rays with respect to a first direction which is perpendicular to the plane of horizontal orbit of said synchrotron radiation source, said illumination optical system further including a scanner for scanning the zone of the wafer with the diameter-expanded X-rays, said scanner having an opening of a predetermined shape and being movable in a second direction along the mask and corresponding on the zone of the wafer to the first direction; wherein said convex mirror is disposed such that the X-rays irradiating the zone of the wafer provide an intensity distribution on the zone having a peak which is positioned, with respect to the second direction, at a distance from an end of the zone closer to said convex mirror, which distance provides irradiation of 20-45% of the area of the zone in the second direction.

Claim 10

An x-ray exposure apparatus for exposing a zone of a wafer to a pattern of a mask with X-rays, said apparatus comprising: a synchrotron radiation source having a plane of horizontal orbit, for providing X-rays; and an illumination optical system for illuminating the mask and then the zone of the wafer with the X-rays, said illumination optical system including a convex mirror for reflecting the X-rays toward the mask and the wafer and being effective to expand a beam diameter of the X-rays with respect to a first direction which is perpendicular to the plane of horizontal orbit of said synchrotron radiation source, said illumination optical system further including a scanner for scanning the zone of the wafer with the diameter-expanded X-rays, said scanner having an opening of a predetermined shape and being movable in a second direction along the mask and corresponding on the zone of the wafer to the first direction; wherein said convex mirror is disposed such that the X-rays irradiating the zone of the wafer provide an intensity distribution on the zone having a peak which is positioned, with respect to the second direction, at a distance from an end of the zone closer to said convex mirror, which distance provides irradiation of 20-45% of the area of the zone in the second direction.