Method of controlling positions and vibrations and active vibration control apparatus therefor

Claim 3

The method as claimed in claim 1 wherein: the level control value is obtained by adding a feedforward control value for a vertical displacement obtained on the basis of predata of the vertical displacement to the feedback compensation value and the analog integrated value.

Claim 4

The method as claimed in claim 2, further comprising the steps of: sensing an acceleration of vibration of a vibration control base in vertical directions to output a vertical acceleration voltage, giving at least one of integration, differentiation and amplification to the vertical acceleration voltage or in addition thereto a phase compensation, so as to carry out a vertical vibration feedback compensation, and controlling an air pressure of the air springs in accordance with a level and vibration control value obtained by summing a vertical vibration control value obtained by the vertical vibration feedback compensation and the level control value.

Claim 5

The method as claimed in claim 3 wherein: the level and vibration control value is obtained by adding a feedforward control value for vertical vibrations obtained on the basis of the predata to a vertical vibration control value obtained by the vertical vibration feedback compensation.

Claim 6

The method as claimed in claim 1 further comprising the steps of: giving at least one of integration, differentiation and amplification to the vertical acceleration voltage or in addition thereto a phase compensation, so as to carry out a vertical vibration feedback compensation, and controlling an air pressure of the air springs in accordance with a level and vibration control value obtained by summing a vertical vibration control value obtained by the vertical vibration feedback compensation and the level control value.

Claim 7

The method as claimed in claim 5 wherein: the level and vibration control value is obtained by adding a feedforward control value for vertical vibrations obtained on the basis of predata to a vertical vibration control value obtained by the vertical vibration feedback compensation.

Claim 12

The method as claimed in claim 8 further comprising the step of: obtaining a feedforward control value for horizontal directions on the basis of predata for horizontal directions, wherein the lateral vibration control value is obtained by adding the feedforward control value to the feedback control value obtained by the feedback compensation in horizontal directions.

Claim 13

An active vibration control apparatus comnprising: a fixed base, a vibration control base disposed above the fixed base, vertical supporters interposed between the fixed base and the vibration control base to support the vibration control base and having flexibility in horizontal directions, a vertical acceleration sensor for sensing vertical vibration accelerations of said vibration control base, a level sensor for sensing the level of the vibration control base and outputting a level voltage, a lateral position sensor for detecting the displacement of said vibration control base from a standard lateral position, vertical direction vibration control means comprising air springs interposed between the fixed base and the vibration control base via vertical supporters, vertical direction control means for using outputs from said level sensor and from said vertical acceleration sensor to drive the vertical direction vibration control means for returning to and maintaining the level of the vibration control base at a standard level position and for controlling vertical vibrations of said vibration control base, horizontal direction vibration control means comprising air springs interposed between the fixed base and the vibration control base, and horizontal direction control means to drive the horizontal direction vibration control means for returning to and maintaining the lateral position of the vibration control base at a standard lateral position and for controlling horizontal vibrations of said vibration control base.

Claim 14

An active vibration control apparatus comnprising: a fixed base, a vibration control base disposed above the fixed base, vertical supporters interposed between the fixed base and the vibration control base to support the vibration control base and having flexibility in horizontal directions, a vertical acceleration sensor for sensing vertical vibration accelerations of said vibration control base, a level sensor for sensing the level of the vibration control base and outputting a level voltage, a lateral position sensor for detecting the displacement of said vibration control base from a standard lateral position, vertical direction vibration control means comprising air springs interposed between the fixed base and the vibration control base via vertical supporters, vertical direction control means for using outputs from said level sensor and from said vertical acceleration sensor to drive the vertical direction vibration control means for returning to and maintaining the level of the vibration control base at a standard level position and for controlling vertical vibrations of said vibration control base, horizontal direction vibration control means comprising air springs interposed between the fixed base and the vibration control base, and horizontal direction control means to drive the horizontal direction vibration control means for returning to and maintaining the lateral position of the vibration control base at a standard lateral position and for controlling horizontal vibrations of said vibration control base.

Claim 15

The apparatus as claimed in claim 10 further comprising; lateral supporters flexible in any direction except axial directions thereof, wherein the lateral vibration control means is disposed between the fixed base and the vibration control base via the lateral supporters.

Claim 16

The apparatus as claimed in claim 11 wherein: the vertical and lateral supporters comprise a plurality of rubber plates and metal plates which are laminated to one another.

Claim 17

The apparatus as claimed in claim 11 wherein: the lateral supporters comprise wires.

Claim 18

The apparatus as claimed in claim 10 wherein: the vertical direction control means comprises a level maintaining circuit, and a control valve for the air springs, said level maintaining circuit including a level difference amplifier for comparing the level voltage with the standard level voltage and outputting a difference therebetween, an analog integrating amplifier for integrating the level difference from the level difference amplifier or a feedback compensation circuit for accelerating levelling of the vibration control base in combination with the analog integrating amplifier, thereby controlling the control valve for the air springs for vertical directions in accordance with the output of the analog integration amplifier and/or the level control value obtained by summing the output of the analog integrating amplifier and the output of the feedback compensation circuit.

Claim 19

The apparatus as claimed in claim 14 further comprising; a feedforward control circuit for carrying out feedforward control on the basis of predata for a level displacement of the vibration control base, wherein the level control value is obtained by adding a feedforward control value obtained by the feedforward control circuit to the feedback compensation value of level displacement and the analog integrated value.

Claim 20

The apparatus as claimed in claim 10 further comprising: the vertical direction control means comprises a vertical vibration control feedback circuit, and a control valve for the air springs, said vertical vibration control feedback circuit including at least one of a vertical vibration integrating amplifier for integrating an output of the vertical acceleration sensor, a vertical vibration differentiating amplifier for differentiating the output of the vertical acceleration sensor, and a vertical vibration proportional amplifier for amplifying the output of the vertical acceleration sensor or a phase compensation circuit, so as to obtain a vertical vibration control value therefrom, wherein the control valve for the air springs is controlled in accordance with the sum of the vertical vibration control value and the level control value.

Claim 21

The apparatus as claimed in claim 16 further comprising; a feedforward control circuit for carrying out feedforward control on the basis of predata for vertical vibrations of the vibration control base, wherein the vertical vibration control value is obtained by adding the feedforward control value to the feedback compensation value, so as to control the control valve for the air springs in accordance with the sum of the vertical vibration control value and the level control value.

Claim 22

The apparatus as claimed in claim 10 wherein: the horizontal direction control means includes: lateral air springs for generating a horizontal standard load for loading substantially a constant lateral load onto the vibration control base or a connecting member connected thereto and for generating a control load for loading same onto the vibration control base or a connecting member connected thereto in an opposite direction to the horizontal standard load, an analog level position sensor for sensing a level displacement of the vibration control base from a standard level position thereof and outputting an analog level position voltage, a level difference amplifier for comparing the analog level position voltage with a standard level position voltage and for outputting a difference therebetween, an integrating amplifier for integrating the difference or the integrating amplifier and a feedback compensation circuit for accelerating levelling of the vibration control base, so as to obtain a lateral position control value, at least one of an analog horizontal acceleration sensor for sensing an acceleration of horizontal vibrations of the vibration control base, a horizontal vibration integrating amplifier for integrating an output of the analog horizontal acceleration sensor, a horizontal vibration differentiating amplifier for differentiating the output of the analog horizontal acceleration sensor, a horizontal vibration proportional amplifier for amplifying the output of the analog horizontal acceleration sensor or a vibration feedback compensation circuit for a phase compensation, so as to obtain a horizontal vibration control value, an adder for adding the horizontal vibration control value to the lateral position control value, and a control valve for controlling an air pressure of the lateral air springs in accordance with a value output from the adder.

Claim 23

The apparatus as claimed in claim 10 wherein the horizontal direction control means includes: lateral air springs for generating a horizontal force and for loading same onto the vibration control base or a connecting member connected thereto in an opposite direction to one another, an analog level position sensor for sensing a level displacement of the vibration control base from a standard level position thereof and outputting an analog level position voltage, a level difference amplifier for comparing the analog level position voltage with a standard level position voltage and for outputting a difference therebetween, an integrating amplifier for integrating the difference or the integration amplifier and a feedback compensation circuit for accelerating levelling of the vibration control base, so as to obtain a lateral position control value, at least one of an analog horizontal acceleration sensor for sensing an acceleration of horizontal vibrations of the vibration control base, a horizontal vibration integrating amplifier for integrating an output of the analog horizontal acceleration sensor, a horizontal vibration differentiating amplifier for differentiating the output of the analog horizontal acceleration sensor, a horizontal vibration proportion amplifier for amplifying the output of the analog horizontal acceleration sensor or a vibration feedback compensation circuit for a phase compensation, so as to obtain a horizontal vibration control value, an adder for adding the horizontal vibration control value to the lateral position control value, a control valve for controlling an air pressure of the lateral air springs in accordance with a value output from the adder, and a phase converting circuit for converting a phase of the value output from the adder at 180°, thereby the air pressure of the air springs is controlled in response to an output from the phase converting circuit.