US5121174A
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US
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Gate-to-ohmic metal contact scheme for III-V devices
Assignee: Microsemi Communications Inc
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Filing: 1990-11-28
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Granted: 1992-06-09
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Expires: 2010-11-28
Abstract
Abstract A direct shorting contact structure comprising a metal layer (18') makes ohmic contact with a source (10) and/or drain (12) region and with a gate electrode (22). The direct contact between source or drain and gate over the active region (16) reduces the area otherwise required for such contact and eliminates a second layer (24) of interconnection metallization otherwise required for such contact. The metal layer preferably comprises a first layer (18'a) of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium in ohmic contact with the source or drain region and with the gate electrode and a second layer (18'b) of a good electrically conductive, thermally stable, electromigration-resistant metal capable of providing good step coverage overlying the first layer. An example of the second layer is tungsten and its nitrides and silicides. Such a composite layer avoids step coverage and reliability problems which exist with other metallization schemes.
Inventors
- 👤 II C. David Forgerson
- 👤 David A. Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 00:58
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/258; H10D64/60; H10D64/62; H10D62/00; H10D62/80; H10D62/85; Y; Y10; Y10S; Y10S257/00; Y10S257/915
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
213 words
A reduced area contact for shorting at least one of a source or drain region to a Schottky metal gate electrode in III-V semiconductor devices having an active region therebetween, said contact comprising an ohmic metal, a portion of which makes contact to at least one of said source and drain regions and a portion of which directly contacts said gate electrode over said active region, said ohmic metal consisting essentially of a composite ohmic metal comprising (a) a first layer of a metal which makes ohmic contact to III-V semiconductor materials in contact with at least one of said source or said drain and with said gate electrode, said first layer consisting essentially of a metal selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel,molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å, and (b) a second layer of an electrically conductive, thermally stable, electromigration-resistant metal capable of providing good step coverage formed over said first layer, said second layer consisting essentially of a metal selected from the group consisting of platinum, palladium, and chromium, a refractory metal selected from the group consisting of tungsten, molybdenum, and titanium, and the nitrides and silicides thereof and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 2
Dependent Claim
213 words
A reduced area contact for shorting at least one of a source or drain region to a Schottky metal gate electrode in III-V semiconductor devices having an active region therebetween, said contact comprising an ohmic metal, a portion of which makes contact to at least one of said source and drain regions and a portion of which directly contacts said gate electrode over said active region, said ohmic metal consisting essentially of a composite ohmic metal comprising (a) a first layer of a metal which makes ohmic contact to III-V semiconductor materials in contact with at least one of said source or said drain and with said gate electrode, said first layer consisting essentially of a metal selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel,molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å, and (b) a second layer of an electrically conductive, thermally stable, electromigration-resistant metal capable of providing good step coverage formed over said first layer, said second layer consisting essentially of a metal selected from the group consisting of platinum, palladium, and chromium, a refractory metal selected from the group consisting of tungsten, molybdenum, and titanium, and the nitrides and silicides thereof and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 3
Dependent Claim
20 words
The contact of claim 1 wherein said second layer comprises WN x , where x ranges up to about 1.0.
Claim 4
Dependent Claim
20 words
The contact of claim 1 wherein said second layer comprises WSi x , where x ranges up to about 2.
Claim 5
Dependent Claim
172 words
A reduced area contact for shorting at least one of a source or drain region to a Schottky gate metal electrode in III-V semiconductor devices having an active region therebetween, said contact comprising an ohmic metal, a portion of which makes contact to at least one of said source and drain regions and a portion of which directly contacts said gate electrode over said active region, said contact consisting essentially of a composite ohmic metal consisting essentially of (a) a first layer of a metal which makes ohmic contact to III-V semiconductor materials in contact with at least one of said source or said drain and with said gate electrode, said first layer consisting essentially of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å, and (b) a second layer of tungsten or a nitride or silicide thereof formed over said first layer and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 6
Dependent Claim
172 words
A reduced area contact for shorting at least one of a source or drain region to a Schottky gate metal electrode in III-V semiconductor devices having an active region therebetween, said contact comprising an ohmic metal, a portion of which makes contact to at least one of said source and drain regions and a portion of which directly contacts said gate electrode over said active region, said contact consisting essentially of a composite ohmic metal consisting essentially of (a) a first layer of a metal which makes ohmic contact to III-V semiconductor materials in contact with at least one of said source or said drain and with said gate electrode, said first layer consisting essentially of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å, and (b) a second layer of tungsten or a nitride or silicide thereof formed over said first layer and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 7
Dependent Claim
191 words
A composite ohmic metal contact for use with III-V semiconductor devices including source and drain regions, a gate region contacted by a Schottky metal gate electrode, and an active region therebetween, said composite ohmic metal contact making direct contact between at least one of said source and drain regions and said Schottky metal gate electrode over said active region and consisting essentially of a first layer in contact with said source or drain region of semiconductor device comprising a metal which makes ohmic contact to III-V semiconductor materials, said first layer consisting essentially of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å and a second layer consisting essentially of an electrically conductive, thermally stable, electromigration-resistant metal capable of providing good step coverage formed thereover, said second layer consisting essentially of a metal selected from the group consisting of platinum, palladium, and chromium, a refractory metal selected from the group consisting of tungsten, molybdenum, and titanium, and the nitrides and silicides thereof and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 8
Dependent Claim
191 words
A composite ohmic metal contact for use with III-V semiconductor devices including source and drain regions, a gate region contacted by a Schottky metal gate electrode, and an active region therebetween, said composite ohmic metal contact making direct contact between at least one of said source and drain regions and said Schottky metal gate electrode over said active region and consisting essentially of a first layer in contact with said source or drain region of semiconductor device comprising a metal which makes ohmic contact to III-V semiconductor materials, said first layer consisting essentially of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å and a second layer consisting essentially of an electrically conductive, thermally stable, electromigration-resistant metal capable of providing good step coverage formed thereover, said second layer consisting essentially of a metal selected from the group consisting of platinum, palladium, and chromium, a refractory metal selected from the group consisting of tungsten, molybdenum, and titanium, and the nitrides and silicides thereof and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 9
Dependent Claim
21 words
The ohmic contact of claim 5 wherein said second layer comprises WN x , where x ranges up to about 1.0.
Claim 10
Dependent Claim
21 words
The ohmic contact of claim 5 wherein said second layer comprises WSi x , where x ranges up to about 2.
Claim 11
Dependent Claim
154 words
A composite ohmic metal contact for use with III-V semiconductor devices including source and drain regions, a gate region contacted by a Schottky metal gate electrode, and an active region therebetween, said composite ohmic metal contact making direct contact between at least one of said source and drain regions and said Schottky metal gate electrode over said active region and consisting essentially of a first layer in contact with said source or drain region of said semiconductor device consisting essentially of a metal which makes ohmic contact to III-V semiconductor materials, said first layer consisting essentially of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å, and a second layer consisting essentially of tungsten or a nitride or silicide thereof formed over said first layer and formed to a thickness ranging from about 500 to 1,700 Å.
Claim 12
Dependent Claim
154 words
A composite ohmic metal contact for use with III-V semiconductor devices including source and drain regions, a gate region contacted by a Schottky metal gate electrode, and an active region therebetween, said composite ohmic metal contact making direct contact between at least one of said source and drain regions and said Schottky metal gate electrode over said active region and consisting essentially of a first layer in contact with said source or drain region of said semiconductor device consisting essentially of a metal which makes ohmic contact to III-V semiconductor materials, said first layer consisting essentially of a material selected from the group consisting of gold-germanium, nickel-germanium, gold-germanium-nickel, molybdenum-germanium, and aluminum-germanium and formed to a thickness ranging from about 100 to 1,000 Å, and a second layer consisting essentially of tungsten or a nitride or silicide thereof formed over said first layer and formed to a thickness ranging from about 500 to 1,700 Å.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-06-09 | 1995-12-09 | 1996-06-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-09 | 1999-12-09 | 2000-06-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-09 | 2003-12-09 | 2004-06-09 | $7700.00 | Window Closed / Lapsed |