Pressure regulation system for gas laser based on temperature of anode stem

Claim 2

A gas laser comprising: a housing for containing a lasing gas under pressure; a means for electrically exciting the gas including a cathode mounted at one end of the housing and an anode mounted at the other end thereof, said anode having a temperature; means for monitoring the temperature of said anode and generating a control signal indicative of said temperature; gas supply means coupled to said housing for varying the gas pressure in the housing; and regulation means for actuating said gas supply means in response to variations in the control signal to vary the gas pressure in said housing.

Claim 5

The system according to claim 2 further comprising means for normalizing the measured temperature to correspond to changes in gas pressure.

Claim 6

A gas laser comprising: a gas filled discharge tube including an anode having an operating temperature and a cathode; sensing means for sensing the operating temperature of the anode; and means for adding gas to the discharge tube when the sensed temperature exceeds a predetermined operating temperature.

Claim 7

A gas laser comprising: a gas filled discharge tube including an anode having an operating temperature and a cathode; sensing means for sensing the operating temperature of the anode; and means for adding gas to the discharge tube when the sensed temperature exceeds a predetermined operating temperature.

Claim 8

The gas laser according to claim 4 which is operated in an ambient environment having a temperature and wherein the sensed operating temperature is affected by ambient temperature so that the sensing means further comprises a first temperature sensor coupled to sense an operating temperature of the anode and a second temperature coupled to sense the ambient temperature.

Claim 9

The gas laser according to claim 5 further comprising a water cooling jacket which controls the ambient temperature of the anode.

Claim 10

The gas laser according to claim 6 wherein the predetermined operating temperature comprises a predetermined difference between the operating temperature and the ambient temperature to normalize the sensed temperature.

Claim 11

The gas laser according to claim 4 wherein the means for adding gas further comprises delay means to delay adding gas until the predetermined operating temperature remains unchanged for a predetermined duration.

Claim 12

The gas laser according to claim 8 further comprising means to disable the means for adding gas after gas is added for a sufficient time to allow the gas pressure within the tube to stabilize.

Claim 13

The gas laser according to claim 8 further comprising means to override the delay means when the first temperature exceeds an operating predetermined value.

Claim 14

The gas laser according to claim 10 further comprising means to de-energize the laser of the operating temperature exceeds a second predetermined value.

Claim 15

The gas laser according to claim 4 further comprising an anode stem and a water cooling jacket coupled to the anode so that the sensed temperature is affected by water temperature and wherein the sensing means further comprises a first temperature sensor coupled to sense an operating temperature of the anode and a second temperature coupled sense an operating temperature of the anode stem.

Claim 16

The gas laser according to claim 12 wherein the predetermined operating temperature comprises a predetermined difference between the operating temperatures of the anode and the anode stem to normalize the sensed temperature.

Claim 17

The gas laser according to claim 13 wherein the means for adding gas further comprises delay means to delay adding gas until the predetermined operating temperature remains for a predetermined duration.

Claim 18

The gas laser according to claim 14 further comprising means to disable the means for adding gas after gas is added for a sufficient time to allow the tube to stabilize.

Claim 19

The gas laser according to claim 14 further comprising means to override the delay means when if the operating temperatures of the anode or anode stem exceed a first predetermined value.

Claim 20

The gas laser according to claim 16 further comprising means to de-energize the laser when if the operating temperatures of the anode or the anode stem exceed a second predetermined value.

Claim 21

A gas laser comprising: a) a gas-confining tube having a central axis; b) a plurality of spaced apart discs within and generally perpendicular to the tube, each having a central aperture coaxially aligned with the axis of the tube to define a central discharge path; c) a plurality of thermal conducting members thermally coupled to the discs and to the tube to conduct heat generated in the discharge path to the tube; d) cooling means coupled to remove heat from the tube; e) a cathode coupled to a first end of the discharge path; f) an anode coupled to a second end of the discharge path; g) sensing means coupled to the anode for measuring the operating temperature of the anode and generating an electrical signal in response thereto; h) control means coupled to the sensing means for receiving said electrical signal; and i) means for adding gas to the tube activated by the control means after the anode exceeds a predetermined operating temperature.

Claim 22

A gas laser comprising: a) a gas-confining tube having a central axis; b) a plurality of spaced apart discs within and generally perpendicular to the tube, each having a central aperture coaxially aligned with the axis of the tube to define a central discharge path; c) a plurality of thermal conducting members thermally coupled to the discs and to the tube to conduct heat generated in the discharge path to the tube; d) cooling means coupled to remove heat from the tube; e) a cathode coupled to a first end of the discharge path; f) an anode coupled to a second end of the discharge path; g) sensing means coupled to the anode for measuring the operating temperature of the anode and generating an electrical signal in response thereto; h) control means coupled to the sensing means for receiving said electrical signal; and i) means for adding gas to the tube activated by the control means after the anode exceeds a predetermined operating temperature.

Claim 25

The method according to claim 19 wherein said step of adding gas to the tube is delayed for a predetermined period of time to ensure that the first predetermined temperature value has been stably reached.

Claim 26

The method according to claim 20 further comprising the step of overriding the step of delaying when temperature of the anode exceeds a second predetermined value.

Claim 27

The method according to claim 20 further comprising the step of de-energizing the gas laser when temperature of the anode exceeds a third predetermined value.

Claim 28

The method according to claim 19 wherein the anode includes an anode stem and wherein the step of sensing a temperature further comprises the steps of: a) sensing the anode temperature; b) sensing the anode stem temperature; and c) calculating a difference between the anode temperature and the anode stem temperature.