US5116785A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of depositing metal fluoride
Assignee: Qinetiq Ltd
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Filing: 1990-11-30
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Granted: 1992-05-26
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Expires: 2010-11-30
Abstract
Abstract A method for forming a layer of a Group II or III fluoride on a semiconductor substrate (e.g. as epitaxial insulating layer) comprising vaporizing a precursor (I), where M is Be, Ca, Sr, Ba or lanthanide, b and d are 0 or 1. A, B, C and D are independently (IIA) or (IIB), X being O, S, NR, PR where R is H, alkyl, perfluoroalkyl; Y is perfluoroalkyl, fluoroalkenyl, fluoroalkylamine or fluoroalkenylamine; Z is H, F, alkyl, perfluoroalkyl or perfluoroalkenyl; and then decomposing the precursor vapor to form M fluoride. A preferred precursor for calcium fluoride is calcium 1,1,1,5,5,5-hexafluor-2,4-pentanedione complex where b and d are 0.
Inventors
- 👤 Kevin J. Mackey
- 👤 Anthony W. Vere
- 👤 Donald C. Bradley
- 👤 Dario M. Frigo
- 👤 Marc M. Faktor, deceased
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:25
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
194 words
A method of forming a layer of a fluoride of a Group II or Group III metal on a semiconductor substrate, characterised by steps (1) and (2): (1) forming a vapour of one or more fluorinated precursor compounds of formula I: ##STR9## wherein M is an atom or an ion of a metal selected from Be, Ca, Sr Ba or a lanthanide, wherein each of b and d is independently 0 or 1, wherein each of A, B, C and D is independently selected from bidentate ligands of formula IIA or IIB: ##STR10## wherein X is independently selected from 0, S, NR or PR, R being H, C 1-10 alkyl or C 1-10 perfluoroalkyl; each Y being independently selected from C 1-10 alkyl, C 1-10 perfluoroalkyl, C 1-10 fluoroalkenyl, C 1-10 fluoroalkylamine and C 1-10 fluoroalkenylamine; Z being selected from H, F, C 1-10 alkyl. C 1-10 perfluoroalkyl and C 1-10 fluoroalkenyl provided at least one of Y or Z is or contains fluorine: and: (2) causing the vapour of the said precursor compound to decompose in the vicinity of the substrate surface to form a layer of a fluoride of the metal M.
Claim 2
Independent Claim
194 words
A method of forming a layer of a fluoride of a Group II or Group III metal on a semiconductor substrate, characterised by steps (1) and (2): (1) forming a vapour of one or more fluorinated precursor compounds of formula I: ##STR9## wherein M is an atom or an ion of a metal selected from Be, Ca, Sr Ba or a lanthanide, wherein each of b and d is independently 0 or 1, wherein each of A, B, C and D is independently selected from bidentate ligands of formula IIA or IIB: ##STR10## wherein X is independently selected from 0, S, NR or PR, R being H, C 1-10 alkyl or C 1-10 perfluoroalkyl; each Y being independently selected from C 1-10 alkyl, C 1-10 perfluoroalkyl, C 1-10 fluoroalkenyl, C 1-10 fluoroalkylamine and C 1-10 fluoroalkenylamine; Z being selected from H, F, C 1-10 alkyl. C 1-10 perfluoroalkyl and C 1-10 fluoroalkenyl provided at least one of Y or Z is or contains fluorine: and: (2) causing the vapour of the said precursor compound to decompose in the vicinity of the substrate surface to form a layer of a fluoride of the metal M.
Claim 3
Dependent Claim
18 words
A method according to claim 1 characterised in that the metal M is selected from calcium or lanthanum.
Claim 4
Dependent Claim
33 words
A method according to claim 2 characterised in that M is calcium and the compound of formula I has a formula III: ##STR11## X, Y and Z being as defined in claim 1.
Claim 5
Dependent Claim
32 words
A method according to claim 1 characterised in that X is oxygen, Y is C 1-10 alkyl or C 1-10 perfluoroalkyl and Z is H, F, or a C 1-10 perfluoroalkyl group.
Claim 6
Dependent Claim
32 words
A method according to claim 3 characterised in that X is oxygen Y is C 1-10 alkyl or C 1-10 perfluoroalkyl and Z is H, F or a C 1-10 perfluoroalkyl group.
Claim 7
Dependent Claim
18 words
A method according to claim 1 characterised in that all of the ligands coordinating M are the same.
Claim 8
Dependent Claim
26 words
A method according to claim 3 characterised in that the compound of formula III is the complex of calcium with 1,1,1,5,5,5-hexafluoro-2,4-pentane dione of formula IV: ##STR12##
Claim 9
Dependent Claim
24 words
A method according to claim 3 characterised in that the compound of formula III has a formula selected from V, VI and VII: ##STR13##
Claim 10
Dependent Claim
25 words
A method according to claim 1 characterised in that the compound of formula I is decomposed by heat or a combination of heat and radiation.
Claim 11
Dependent Claim
25 words
A method according to claim 6 characterised in that the compound of formula 1 is decomposed by heat or a combination of heat and radiation.
Claim 12
Independent Claim
28 words
A method according to any one of claims 1 to 5 or 7 or 8 characterised in that the compound of formula I is decomposed by ultraviolet light.
Claim 13
Dependent Claim
19 words
A method according to claim 6 characterised in that the compound of formula I is decomposed by ultraviolet light.
Claim 14
Dependent Claim
14 words
A method according to claim 1 characterised in that the semiconductor is gallium arsenide.
Claim 15
Dependent Claim
23 words
A method according to claim 1 characterised in that the layer of fluoride of the metal M is formed as an epitaxial layer.
Claim 16
Dependent Claim
22 words
A method according to claim 1 characterised in that two or more compounds of formula I are used, having different metals M.
Claim 17
Dependent Claim
32 words
A method according to claim 15 characterised in that a compound of formula I in which M is calcium and a compound of formula I in which M is strontium is used.
References Cited (Backward Citations)
US4718929A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-26 | 1995-11-25 | 1996-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-26 | 1999-11-25 | 2000-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-26 | 2003-11-25 | 2004-05-26 | $7700.00 | Window Closed / Lapsed |