Flush-mounted pressure sensor

Claim 2

A sensor for measuring the pressure of a fluid in a container comprising: a. a first diaphragm in contact with the fluid at a first face and capable of converting the pressure of the fluid to a force at the center of the diaphragm directed in a first direction generally perpendicular to the diaphragm; b. a second diaphragm displaced along said first direction from said first diaphragm; c. a drive rod mechanically coupled at one end to the first diaphragm at a second face opposite said first face and at the other end to said second diaphragm, said coupling (i) having substantially no lost motion, (ii) being substantially rigid to resist elastic deformation along said first direction in response to said force, and (iii) extending freely between said first and second diaphragms; and d. means for converting the mechanical deformation of the second diaphragm into a change in capacitance, the magnitude of the change corresponding to the fluid pressure acting on said first diaphragm; said means for converting comprising an electrode acting in cooperation with said second diaphragm to form a variable capacitor, and said first diaphragm (i) having a diameter smaller than said second diaphragm, (ii) being formed of a material that is resistant to corrosion caused by said fluid and (iii) having a thickness less than that of said second diaphragm to provide a good responsiveness to the fluid pressure being measured.

Claim 3

The sensor of claim 1 further comprising means for sealing said first diaphragm to said container adjacent said fluid with one face of said first diaphragm acted upon by said fluid.

Claim 4

The sensor of claim 1 wherein said container is a conduit and said first diaphragm is mounted in the wall of said conduit so that there is substantially no dead volume.

Claim 5

A sensor for measuring the pressure of a fluid in a container comprising, a sensor head secured and sealed to said container at an opening in the container, an isolating diaphragm mounted in said sensor head and disposed adjacent to the fluid, said isolating diaphragm gathering the fluid pressure acting on it and producing a resultant force directed along a first direction perpendicular to the isolating diaphragm, a sensor body connected to said sensor head, a drive rod extending freely within the sensor head and the sensor body and rigidly mechanically coupled to the isolating diaphragm, said drive rod being substantially incompressible along its axis in response to said resultant force, means for converting the force applied to the drive rod means at said isolating diaphragm into a variable capacitance that corresponds to the fluid pressure acting on said isolating diaphragm, and second diaphragm means coupled to said drive rod for producing a counterforce acting on said isolating diaphragm in opposition to the force of said fluid pressure, said means for converting comprising an electrode acting in cooperation with said second diaphragm means to form a variable capacitor, said isolating diaphragm (i) having a diameter smaller than said second diaphragm means, (ii) being formed of a material that is resistant to corrosion caused by said fluid and (iii) having a thickness less than that of said second diaphragm diaphragm to provide good responsiveness to the fluid pressure being measured.

Claim 6

A sensor for measuring the pressure of a fluid in a container comprising, a sensor head secured and sealed to said container at an opening in the container, an isolating diaphragm mounted in said sensor head and disposed adjacent to the fluid, said isolating diaphragm gathering the fluid pressure acting on it and producing a resultant force directed along a first direction perpendicular to the isolating diaphragm, a sensor body connected to said sensor head, a drive rod extending freely within the sensor head and the sensor body and rigidly mechanically coupled to the isolating diaphragm, said drive rod being substantially incompressible along its axis in response to said resultant force, means for converting the force applied to the drive rod means at said isolating diaphragm into a variable capacitance that corresponds to the fluid pressure acting on said isolating diaphragm, and second diaphragm means coupled to said drive rod for producing a counterforce acting on said isolating diaphragm in opposition to the force of said fluid pressure, said means for converting comprising an electrode acting in cooperation with said second diaphragm means to form a variable capacitor, said isolating diaphragm (i) having a diameter smaller than said second diaphragm means, (ii) being formed of a material that is resistant to corrosion caused by said fluid and (iii) having a thickness less than that of said second diaphragm diaphragm to provide good responsiveness to the fluid pressure being measured.

Claim 7

The sensor of claim 4, wherein the sensor head includes means for replaceably mounting the sensor to the container.

Claim 8

The sensor of claim 5, wherein the mounting means includes a threaded fitting capable of mating to a corresponding threaded fitting secured on the outer surface of said conduit.

Claim 9

The sensor of claims 1 or 4, wherein said means for converting comprises a movable electrode mounted to said second diaphragm at its center with a fixed spacing at this center mount and electrically isolated from said second diaphragm to form a variable gap capacitor between the periphery of said electrode and said second diaphragm.

Claim 10

The sensor of claim 4 wherein said isolating diaphragm is edge mounted and supported against said force at its center by said drive rod and said second diaphragm and wherein said isolating diaphragm has an annular convolution formed in its body to reduce stress in the diaphragm at its edge and center when the diaphragm is deformed by the applied fluid pressure.

Claim 11

The sensor of claim 8 wherein said convolution is generally semi-circular in cross-section and concave adjacent the fluid.