US5114513A
Expired / Lapsed
US
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Optical device and manufacturing method thereof
Assignee: Omron Corp
•
Filing: 1989-10-25
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Granted: 1992-05-19
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Expires: 2009-10-25
Abstract
Abstract An optical device manufacturing method includes a step of accumulating an optical device inorganic material on a stamper by use of a vacuum thin-film growing method, and a step of removing the accumulated material from the stamper, thereby producing an optical device.
Inventors
- 👤 Hayami Hosokawa
- 👤 Tsukasa Yamashita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:12
CPC Classifications
G; G02; G02B; G02B3/00; G02B3/02; G02B3/08; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124; G02B6/1245; G02B6/24; G02B6/26; G02B6/28; G02B6/2804; G02B6/2848; G02B6/32; G02B6/2817; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4206; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
106 words
An optical device manufacturing method comprising the steps of: accumulating an inorganic material having optical transmissivity on a stamper having an optical device forming section by growing a vacuum thin-film; fixing a substrate on a surface of the accumulated optical device inorganic material by use of an adhesive agent interposed between said accumulated optical device and said substrate; solidifying the adhesive agent to integrate the accumulated optical device inorganic material on the substrate; and separating the substrate and the accumulated optical device inorganic material integrated with each other from the stamper to obtain an optical device comprising the substrate and the accumulated optical device inorganic material.
Claim 2
Dependent Claim
106 words
An optical device manufacturing method comprising the steps of: accumulating an inorganic material having optical transmissivity on a stamper having an optical device forming section by growing a vacuum thin-film; fixing a substrate on a surface of the accumulated optical device inorganic material by use of an adhesive agent interposed between said accumulated optical device and said substrate; solidifying the adhesive agent to integrate the accumulated optical device inorganic material on the substrate; and separating the substrate and the accumulated optical device inorganic material integrated with each other from the stamper to obtain an optical device comprising the substrate and the accumulated optical device inorganic material.
Claim 3
Dependent Claim
42 words
A method in accordance with claim 1, further comprising the steps of: using an ultraviolet setting resin as said adhesive agent; and irradiating with an ultraviolet ray onto said ultraviolet setting resin through said transparent substrate to solidify the ultraviolet setting resin.
Claim 4
Dependent Claim
45 words
A method in accordance with claim 1, further comprising the step of: forming a protective layer on another surface of the acccumulated optical device inorganic material with a material having a refractive index different from a refractive index of the accumulated optical device inorganic material.
Claim 5
Dependent Claim
24 words
A method in accordance with claim 3, further comprising the step of: using an ultraviolet setting resin as the material forming the protective layer.
Claim 6
Dependent Claim
56 words
A method in accordance with claim 1, further comprising the steps of: applying an ultraviolet setting resin on another surface of the accumulated optical device inorganic material so as to form a flat surface; and irradiating said ultraviolet setting resin with an ultraviolet ray to solidify the ultraviolet setting resin which serves as a protective layer.
Claim 7
Dependent Claim
20 words
A method in accordance with claim 5, further comprising the step of: adhering another transparent substrate onto the protective layer.
Claim 8
Dependent Claim
17 words
A method in accordance with claim 1, wherein growing said vacuum thin-film comprises a vacuum evaporation method.
Claim 9
Dependent Claim
16 words
A method in accordance with claim 1, wherein growing said vacuum thin-film comprises a sputtering method.
Claim 10
Dependent Claim
19 words
A method in accordance with claim 1, wherein growing said vacuum thin-film comprises a plasma chemical vapor deposition method.
Claim 11
Independent Claim
97 words
A method of manufacturing an optical circuit comprising the steps of: accumulating a waveguide material on a stamper having an optical device forming section by use of a vacuum thin-film growing method; fixing a substrate on a surface of the accumulated waveguide material by use of an adhesive agent interposed therebetween; solidifying the adhesive agent to integrate the accumulated waveguide material on the substrate; and separating the substrate and the accumulated waveguide material integrated with each other from the stamper to obtain an optical circuit in which an optical device is integrally formed on the waveguide material.
Claim 12
Independent Claim
97 words
A method of manufacturing an optical circuit comprising the steps of: accumulating a waveguide material on a stamper having an optical device forming section by use of a vacuum thin-film growing method; fixing a substrate on a surface of the accumulated waveguide material by use of an adhesive agent interposed therebetween; solidifying the adhesive agent to integrate the accumulated waveguide material on the substrate; and separating the substrate and the accumulated waveguide material integrated with each other from the stamper to obtain an optical circuit in which an optical device is integrally formed on the waveguide material.
Claim 13
Dependent Claim
37 words
A method in accordance with claim 10, further comprisng the steps of: forming a buffer layer on the accumulated waveguide material before fixing the substrate; and fixing the substrate on a surface of the formed buffer layer.
Claim 14
Dependent Claim
43 words
A method in accordance with claim 10, further comprising the steps of: using an ultraviolet setting resin serving as said adhesive agent; and irradiating with an ultraviolet ray onto said ultraviolet setting resin through said transparent substrate to solidify the ultraviolet setting resin.
Claim 15
Dependent Claim
18 words
A method in accordance with claim 10, wherein the vacuum thin-film growing method is a vacuum evaporation method.
Claim 16
Dependent Claim
17 words
A method in accordance with claim 10, wherein the vacuum thin-film growing method is a sputtering method.
Claim 17
Dependent Claim
20 words
A method in accordance with claim 10, wherein the vacuum thin-film growing method is a plasma chemical vapor deposition method.
Claim 18
Independent Claim
106 words
A method of manufacturing an optical circuit comprising the steps of: accumulating a waveguide material on a stamper having an optical device forming section by use of a vacuum thin-film growing method; forming a buffer layer on the accumulated waveguide material; fixing a substrate on a surface of the formed buffer layer by use of an adhesive agent interposed therebetween; solidifying the adhesive agent to integrate the accumulated waveguide material on the substrate; and separating the substrate and the accumulated waveguide material integrated with each other from the stamper to obtain an optical circuit in which an optical device is integrally formed on the waveguide material.
Claim 19
Independent Claim
106 words
A method of manufacturing an optical circuit comprising the steps of: accumulating a waveguide material on a stamper having an optical device forming section by use of a vacuum thin-film growing method; forming a buffer layer on the accumulated waveguide material; fixing a substrate on a surface of the formed buffer layer by use of an adhesive agent interposed therebetween; solidifying the adhesive agent to integrate the accumulated waveguide material on the substrate; and separating the substrate and the accumulated waveguide material integrated with each other from the stamper to obtain an optical circuit in which an optical device is integrally formed on the waveguide material.
Claim 20
Dependent Claim
41 words
A method in accordance with claim 16, further comprising the steps of: using an ultraviolet setting resin as said adhesive agent; and irradiating said ultraviolet setting resin with an ultraviolet ray through said transparent substrate to solidify the ultraviolet setting resin.
Claim 21
Dependent Claim
18 words
A method in accordance with claim 16, wherein the vacuum thin-film growing method is a vacuum evaporation method.
Claim 22
Dependent Claim
17 words
A method in accordance with claim 16, wherein the vacuum thin-film growing method is a sputtering method.
Claim 23
Dependent Claim
20 words
A method in accordance with claim 16, wherein the vacuum thin-film growing method is a plasma chemical vapor deposition method.
References Cited (Backward Citations)
US4911968A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-19 | 1995-11-18 | 1996-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-19 | 1999-11-18 | 2000-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-19 | 2003-11-18 | 2004-05-19 | $7700.00 | Window Closed / Lapsed |