Diffraction grating apparatus and method of forming a surface relief pattern in diffraction grating apparatus

Claim 2

A phase diffraction grating having a surface relief pattern formed therein such that, when a monochromatic plane wave of light is transmitted to said grating, light is transmitted from said surface relief pattern to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced where said surface relief pattern comprises two levels and has a set of transitions between said two levels, said set of transitions comprising a plurality of periods of length P, each period comprising a plurality of transitions between said two levels, such that when said plane wave of light is of wavelength λ, and said N spots are formed by passing said transmitted light through an objective lens of focal length f, the substantially equal spacing S of said N spots is given by ##EQU50##

Claim 3

A grating in accordance with claim 1 wherein said two levels are separated by a phase depth substantially equal to π.

Claim 4

A grating in accordance with claim 1 where said N spots are formed in a line and, with respect to a plurality of orders spaced apart by a spacing 1/2 S and comprising a central order and even and odd orders on each side of said central order, said N spots correspond to said odd orders.

Claim 5

A grating in accordance with claim 1 wherein said plurality of transitions comprises transitions in a first half of said each period, and transitions in a second half of said each period obtainable by a translation of said first half period transitions and having a phase offset substantially equal to π with respect to said first half period transitions.

Claim 6

A grating in accordance with claim 1 where said N spots are of substantially equal intensity.

Claim 7

A grating in accordance with claim 1 where said N spots are formed by transmitting said plane wave of light through said grating.

Claim 8

A grating in accordance with claim 1 where said N spots are formed by reflecting said plane wave of light from said grating.

Claim 9

A grating in accordance with claim 1 wherein said surface relief pattern has first and second dimensions such that when said monochromatic plane wave of light is transmitted to said grating, said light transmitted from said surface relief pattern forms a two-dimensional array of N×M spots comprising lines of N spots in said first dimension and lines of M spots in said second dimension, where M is also an even integer and said M spots are also substantially equally spaced.

Claim 10

A grating in accordance with claim 1 wherein said surface relief pattern is obtained using simulated annealing.

Claim 11

A phase diffraction grating having a surface relief pattern formed therein such that, when a monochromatic plane wave of light is transmitted to said grating, light is transmitted from said surface relief pattern to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced, where said surface relief pattern comprises L levels, L being a positive integer greater than two, said surface relief pattern having a set of transitions between ones of said L levels, said set of transitions comprising a plurality of periods of length P, each period comprising a plurality of transitions between ones of said L levels such that when said plane wave of light is of wavelength λ, and said N spots are formed by passing said transmitted light through an objective lens of focal length f, the substantially equal spacing S of said N spots is given by ##EQU51##

Claim 12

A phase diffraction grating having a surface relief pattern formed therein such that, when a monochromatic plane wave of light is transmitted to said grating, light is transmitted from said surface relief pattern to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced, where said surface relief pattern comprises L levels, L being a positive integer greater than two, said surface relief pattern having a set of transitions between ones of said L levels, said set of transitions comprising a plurality of periods of length P, each period comprising a plurality of transitions between ones of said L levels such that when said plane wave of light is of wavelength λ, and said N spots are formed by passing said transmitted light through an objective lens of focal length f, the substantially equal spacing S of said N spots is given by ##EQU51##

Claim 13

A grating in accordance with claim 10 wherein said L levels are separated by a phase depth substantially equal to ##EQU52##

Claim 14

A grating in accordance with claim 10 where said N spots are formed in a line and, with respect to a plurality of orders spaced apart by a spacing 1/2 S and comprising a central order and even and odd orders on each side of said central order, said N spots correspond to said odd orders.

Claim 15

A grating in accordance with claim 10 wherein said plurality of transitions comprises transitions in a first half of said each period, and transitions in a second half of said each period obtainable by a translation of said first half period transitions and having a phase offset substantially equal to π with respect to said first half period transitions.

Claim 16

A grating in accordance with claim 13 wherein said first half period transitions comprise transitions in a first quarter of said each period, and transitions in a second quarter of said each period obtainable by reflection of said first quarter period transitions about a midpoint of said first half period.

Claim 17

A grating in accordance with claim 10 where said N spots are of substantially equal intensity.

Claim 18

A grating in accordance with claim 10 where said N spots are formed by transmitting said plane wave of light through said grating.

Claim 19

A grating in accordance with claim 10 where said N spots are formed by reflecting said plane wave of light from said grating.

Claim 20

A grating in accordance with claim 10 wherein said surface relief pattern has first and second dimensions such that when said monochromatic plane wave of light is transmitted to said grating, said light transmitted from said surface relief pattern forms a two-dimensional array of N×M spots comprising lines of N spots in said first dimension and lines of M spots in said second dimension, where M is also an even integer and said M spots are also substantially equally spaced.

Claim 21

A grating in accordance with claim 10 wherein said surface relief pattern is obtained using simulated annealing.

Claim 22

A phase diffraction grating having a surface relief pattern formed therein such that, when a monochromatic plane wave of light is transmitted to said grating, light is transmitted from said surface relief pattern to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced where said surface relief pattern comprises a continuous surface comprising a plurality of periods of length P such that when said plane wave of light is of wavelength λ, and said N spots are formed by passing said transmitted light through an objective lens of focal length f, the substantially equal spacing S of said N spots is given by ##EQU53##

Claim 23

A phase diffraction grating having a surface relief pattern formed therein such that, when a monochromatic plane wave of light is transmitted to said grating, light is transmitted from said surface relief pattern to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced where said surface relief pattern comprises a continuous surface comprising a plurality of periods of length P such that when said plane wave of light is of wavelength λ, and said N spots are formed by passing said transmitted light through an objective lens of focal length f, the substantially equal spacing S of said N spots is given by ##EQU53##

Claim 24

A grating in accordance with claim 20 where said N spots are formed in a line and, with respect to a plurality of orders spaced apart by a spacing 1/2 S and comprising a central order and even and odd orders on each side of said central order, said N spots correspond to said odd orders.

Claim 25

A grating in accordance with claim 20 wherein each of said plurality of periods comprises a first half period, and a second half period obtainable by a translation of said first half period and having a phase offset substantially equal to π with respect to said first half period.

Claim 26

A grating in accordance with claim 22 wherein said first half period comprises a first quarter period, and a second quarter period obtainable by reflection of said first quarter period about a midpoint of said first half period.

Claim 27

A grating in accordance with claim 20 where said N spots are of substantially equal intensity.

Claim 28

A grating in accordance with claim 20 where said N spots are formed by transmitting said plane wave of light through said grating.

Claim 29

A grating in accordance with claim 20 where said N spots are formed by reflecting said plane wave of light from said grating.

Claim 30

A grating in accordance with claim 20 wherein said surface relief pattern has first and second dimensions such that when said monochromatic plane wave of light is transmitted to said grating, said light transmitted from said surface relief pattern forms a two-dimensional array of N×M spots comprising lines of N spots in said first dimension and lines of M spots in said second dimension, where M is also an even integer and said M spots are also substantially equally spaced.

Claim 31

A grating in accordance with claim 20 wherein said surface relief pattern is obtained using simulated annealing.

Claim 32

Optical spot-generating apparatus comprising means for generating a monochromatic plane wave of light of wavelength λ, an objective lens of focal length f, and a phase diffraction grating responsive to said plane wave of light and having a surface relief pattern comprising a plurality of periods of length P for transmitting light from said surface relief pattern through said lens to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced at a spacing S given by ##EQU54##

Claim 33

Optical spot-generating apparatus comprising means for generating a monochromatic plane wave of light of wavelength λ, an objective lens of focal length f, and a phase diffraction grating responsive to said plane wave of light and having a surface relief pattern comprising a plurality of periods of length P for transmitting light from said surface relief pattern through said lens to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced at a spacing S given by ##EQU54##

Claim 34

Apparatus comprising an objective lens of focal length f, and a phase diffraction grating responsive to a monochromatic plane wave of light of wavelength λ, said grating having a surface relief pattern comprising a plurality of periods of length P for transmitting light from said surface relief pattern through said lens to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced at a spacing S given by ##EQU55##

Claim 35

Apparatus comprising an objective lens of focal length f, and a phase diffraction grating responsive to a monochromatic plane wave of light of wavelength λ, said grating having a surface relief pattern comprising a plurality of periods of length P for transmitting light from said surface relief pattern through said lens to form an array of N spots, where N is an even integer and said N spots are substantially equally spaced at a spacing S given by ##EQU55##

Claim 38

A method in accordance with claim 31 wherein said surface relief pattern comprises two levels and has a set of transitions between said two levels, each of said plurality of periods comprising a plurality of transitions between said two levels, said forming said first half periods comprising forming transitions in said first half periods, and said forming said second half periods comprising forming transitions in said second half periods, said transitions in said second half periods obtained by a translation of said first half period transitions and having a phase offset substantially equal to π with respect to said first half period transitions.

Claim 39

A method in accordance with claim 31 wherein said surface relief pattern comprises L levels, L being a positive integer greater than two, each of said plurality of periods comprising a plurality of transitions between ones of said L levels, said forming said first half periods comprising forming transitions in said first half periods, and said forming said second half periods comprising forming transitions in said second half periods, said transitions in said second half periods obtained by a translation of said first half period transitions and having a phase offset substantially equal to π with respect to said first half period transitions.

Claim 40

A method in accordance with claim 33 wherein said forming transitions in said first half periods comprises forming transitions in first quarter periods of said first half periods, and forming transitions in second quarter periods of said first half periods, said second quarter period transitions obtained by reflection of said first quarter period transitions about midpoints of said first half periods.

Claim 41

A method in accordance with claim 31 wherein said surface relief pattern comprises a continuous surface, said forming said first half periods comprising forming first quarter periods of said first half periods, and forming second quarter periods of said first half periods obtained by reflection of said first quarter periods about midpoints of said first half periods.