US5112468A
Expired / Lapsed
US
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Target for magnetron-sputtering systems
Assignee: Heraeus Inc
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Filing: 1991-02-04
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Granted: 1992-05-12
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Expires: 2011-02-04
Abstract
Abstract Targets for magnetron - sputtering systems with a high utilization of material are obtained from ferromagnetic alloys if the amount of hexagonal structural phase is greater than the cubic phase portion and if the hexagonal prism axis (0001) is aligned preferably vertically to the target surface.
Inventors
- 👤 Martin Weigert
- 👤 Lorenz Berchtold
- 👤 Stephan U. Schittny
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; C22; C22C; C22C19/00; C22C19/07; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
130 words
A target obtained by forming a ferromagnetic alloy into a magnetron sputter target for magnetron - sputtering systems comprising a ferromagnetic alloy whose phase diagram exhibits a cubic and a hexagonal phase, whereby during magnetron sputtering operation of the target the hexagonal phase is present in a state of equilibrium with portions of cubic phase, wherein the amount of hexagonal phase is greater than the amount of cubic phase and the hexagonal phase is aligned with the hexagonal prism axes (0001) mostly vertical to the target surface, wherein the X-ray backscatter intensity of the hexagonal (0001) Bragg reflex, measured with Mo-Kα radiation, vertical to the target plane is greater by more than a factor 1.5 than the average X-ray intensity, averaged over the entire half space over the target plane.
Claim 2
Dependent Claim
130 words
A target obtained by forming a ferromagnetic alloy into a magnetron sputter target for magnetron - sputtering systems comprising a ferromagnetic alloy whose phase diagram exhibits a cubic and a hexagonal phase, whereby during magnetron sputtering operation of the target the hexagonal phase is present in a state of equilibrium with portions of cubic phase, wherein the amount of hexagonal phase is greater than the amount of cubic phase and the hexagonal phase is aligned with the hexagonal prism axes (0001) mostly vertical to the target surface, wherein the X-ray backscatter intensity of the hexagonal (0001) Bragg reflex, measured with Mo-Kα radiation, vertical to the target plane is greater by more than a factor 1.5 than the average X-ray intensity, averaged over the entire half space over the target plane.
Claim 3
Dependent Claim
29 words
The target according to claim 1 wherein the X-ray backscatter intensity of the (0001) reflex is greater than the average X-ray intensity by at least a factor of 2.5.
Claim 4
Dependent Claim
11 words
The target according to claim 1 consisting of a cobalt alloy.
Claim 5
Dependent Claim
17 words
The target according to claim 3 wherein the cobalt alloy has more than 60% by weight cobalt.
Claim 6
Dependent Claim
22 words
The target according to claim 4 with the following compositions expressed in atomic %: ______________________________________
62.5-80% Co
18-30% Ni
0-8% Cr.
______________________________________
Claim 7
Dependent Claim
52 words
The target as claimed in claim 1, wherein the target is obtained by melting and casting an ingot of the ferromagnetic alloy, quenching in water and subsequently cold-deforming below 400° C., and up to 100% of the hexagonal phase is aligned with the hexagonal prism axes (0001) vertical to the target surface.
Claim 8
Dependent Claim
41 words
The target as claimed in claim 1, wherein the target is obtained by melting and casting an ingot of the ferromagnetic alloy, quenching in water and subsequently cold-deforming below 400° C. to a degree of cold deformation of at least 50%.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-12 | 1995-11-11 | 1996-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-12 | 1999-11-11 | 2000-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-12 | 2003-11-11 | 2004-05-12 | $7700.00 | Window Closed / Lapsed |