US5109149A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser, direct-write integrated circuit production system
Assignee: SF UNIVENTURES Corp
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Filing: 1990-03-15
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Granted: 1992-04-28
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Expires: 2010-03-15
Abstract
Abstract A laser, direct-write system for making personalized custom or semi-custom integrated circuits with a very fast turnaround time. The system includes a method and apparatus for high percision scanning of a submicron laser spot. The laser beam is scanned at the entrance of a beam expander. The beam expander reduces the scan angle and error produced by a mechanical scanning device such as a rotating polygonal mirror. The smaller scan angle at the output of the beam expander matches well with the projection optics of a laser, direct-write semi-custom integrated circuit production system. The scan error reduction permits more accurate positioning of the focussed laser spot on the surface of the semi-custom integrated circuit.
Inventors
- 👤 Albert Leung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/0665; B23K26/08; B23K26/083; B23K26/0853
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
31 words
A method for high precision laser scanning and focussing which comprises scanning a laser beam, passing thereafter the beam through a beam expander, and then focussing the beam onto a surface.
Claim 2
Independent Claim
31 words
A method for high precision laser scanning and focussing which comprises scanning a laser beam, passing thereafter the beam through a beam expander, and then focussing the beam onto a surface.
Claim 3
Dependent Claim
30 words
A method as claimed in claim 1 wherein the beam expander gives a large diameter laser beam which is focussed by a lens to a small spot on the surface.
Claim 4
Independent Claim
47 words
A method for high precision laser scanning and focussing which comprises scanning a laser beam, passing the beam through a beam expander, and then focussing the beam onto a surface by projecting the expanded laser beam through a microscope objective to focus the beam on the surface.
Claim 5
Independent Claim
47 words
A method for high precision laser scanning and focussing which comprises scanning a laser beam, passing the beam through a beam expander, and then focussing the beam onto a surface by projecting the expanded laser beam through a microscope objective to focus the beam on the surface.
Claim 6
Dependent Claim
17 words
A method as claimed in claim 3 wherein the surface is a photoresist coated integrated circuit wafer.
Claim 7
Dependent Claim
34 words
A method as claimed in claim 4 wherein the position of the integrated circuit wafer in relation to the focussed laser beam is controlled by a movable surface on which the wafer is positioned.
Claim 8
Dependent Claim
31 words
A method as claimed in claim 5 wherein the laser beam is generated from a helium cadmium laser source, and the beam is switched on or off by an acousto-optic modulator.
Claim 9
Dependent Claim
19 words
A method as claimed in claim 6 wherein the switched on laser beam is scanned by a resonant scanner.
Claim 10
Dependent Claim
28 words
A method as claimed in claim 6 wherein the switched on laser beam is scanned by a rotating polygonal mirror located at the entrance of the beam expander.
Claim 11
Independent Claim
96 words
A method for high precision laser scanning and focussing which comprises scanning a laser beam emitted from a laser source and having a first diametrical width to produce a first scan angle, and thereafter passing the scanned beam through a beam expander which expands the beam to form an expanded beam having a second diametrical width, said beam expander reducing the first scan angle to a second scan angle inversely proportional to a beam expansion ratio of the first diametrical width relative to the second diametrical width, and then focussing the expanded beam onto a surface.
Claim 12
Independent Claim
96 words
A method for high precision laser scanning and focussing which comprises scanning a laser beam emitted from a laser source and having a first diametrical width to produce a first scan angle, and thereafter passing the scanned beam through a beam expander which expands the beam to form an expanded beam having a second diametrical width, said beam expander reducing the first scan angle to a second scan angle inversely proportional to a beam expansion ratio of the first diametrical width relative to the second diametrical width, and then focussing the expanded beam onto a surface.
Claim 13
Dependent Claim
30 words
A method as claimed in claim 9 wherein the beam expander produces a large diameter laser beam which is focussed by a lens to a small spot on the surface.
References Cited (Backward Citations)
US4456812A
Cited
JPH01306088A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-28 | 1995-10-28 | 1996-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-28 | 1999-10-28 | 2000-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-28 | 2003-10-28 | 2004-04-28 | $7700.00 | Window Closed / Lapsed |