US5106794A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Zirconium oxide sinter for forming thin film thereof and method for production of the same
Assignee: Tosoh Corp
•
Filing: 1989-03-15
•
Granted: 1992-04-21
•
Expires: 2009-03-15
Abstract
Abstract Zirconium oxide sinter for use in forming a thin film thereof by vapor deposition etc., having a purity not less than 99.0% by weight with unavoidable hafnium oxide and a density more than 4.9 g/cm3. Desirably the sinter further contains calcium oxide in an amount from 50 to 2000 ppm. The sinter can produce a uniform zirconium oxide thin film which can be used in optical applications with superior characteristics.
Inventors
- 👤 Fukuo Oizumi
- 👤 Kinitiro Uemura
- 👤 Katuo Minoya
- 👤 Akemi Katoh
- 👤 Tutomu Uema
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/083; C04; C04B; C04B35/00; C04B35/01; C04B35/48; C04B35/486
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
63 words
Zirconium oxide (ZrO 2 ) sinter for forming a thin film thereof, having a purity not less than 99.0% by weight with unavoidable hafnium oxide (HfO 2 ) as an impurity and a density in the range of 4.9 g/cm 3 -5.3 g/cm 3 , wherein said sinter further contains calcium oxide (CaO) in an amount of from 50 ppm to 2,000 ppm.
Claim 2
Dependent Claim
63 words
Zirconium oxide (ZrO 2 ) sinter for forming a thin film thereof, having a purity not less than 99.0% by weight with unavoidable hafnium oxide (HfO 2 ) as an impurity and a density in the range of 4.9 g/cm 3 -5.3 g/cm 3 , wherein said sinter further contains calcium oxide (CaO) in an amount of from 50 ppm to 2,000 ppm.
Claim 3
Independent Claim
95 words
A method for producing zirconium oxide sinter for forming a thin film thereof, said method comprising forming at room temperature and then sintering zirconium oxide powders having a purity not less than 99.0% by weight with unavoidable hafnium oxide as an impurity and having a secondary particle size distribution comprising not less than 30% by weight of particles in the range of 10 μm to smaller than 40 μm, and not less than 2% by weight of particles smaller than 1 μm, wherein the sintering is at a temperature of from 1000° to 1400° C.
Claim 4
Independent Claim
95 words
A method for producing zirconium oxide sinter for forming a thin film thereof, said method comprising forming at room temperature and then sintering zirconium oxide powders having a purity not less than 99.0% by weight with unavoidable hafnium oxide as an impurity and having a secondary particle size distribution comprising not less than 30% by weight of particles in the range of 10 μm to smaller than 40 μm, and not less than 2% by weight of particles smaller than 1 μm, wherein the sintering is at a temperature of from 1000° to 1400° C.
Claim 5
Independent Claim
103 words
A method for producing zirconium oxide sinter for forming a thin film thereof, said method comprising forming and then sintering zirconium powders having a purity not less than 99.0% by weight with unavoidable hafnium oxide as an impurity, containing calcium oxide in an amount from 50 to 2000 ppm and having a secondary particle size distribution comprising not less than 30% by weight of particles in the range of 10 μm to smaller than 40 μm, and not less than 2% by weight of particles not smaller than 1 μm, wherein the sintering is at a temperature of from 1000° to 1400° C.
Claim 6
Independent Claim
103 words
A method for producing zirconium oxide sinter for forming a thin film thereof, said method comprising forming and then sintering zirconium powders having a purity not less than 99.0% by weight with unavoidable hafnium oxide as an impurity, containing calcium oxide in an amount from 50 to 2000 ppm and having a secondary particle size distribution comprising not less than 30% by weight of particles in the range of 10 μm to smaller than 40 μm, and not less than 2% by weight of particles not smaller than 1 μm, wherein the sintering is at a temperature of from 1000° to 1400° C.
References Cited (Backward Citations)
US3175919A
Cited
US3565645A
Cited
US3929498A
Cited
US4344904A
Cited
US4789651A
Cited
JPH01155256A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-21 | 1995-10-21 | 1996-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-21 | 1999-10-21 | 2000-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-21 | 2003-10-21 | 2004-04-21 | $7700.00 | Window Closed / Lapsed |