Hermetic package having a lead extending through an aperture in the package lid and packaged semiconductor chip

Claim 2

A hermetically sealed, packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; and a package within which said chip is hermetically sealed, said package including: a lid comprising an electrically insulating substrate having first and second opposed major surfaces and aperture extending therethrough from said first major surface to said second major surface, a conductor extending through said aperture in said lid, an external lead, said external lead being electrically connected to said contact pad of said chip via said conductor, a hermetic seal including a conductive material bonded to said first major surface of said substrate and sealing said aperture, and said external lead being electrically connected to said conductive material of said hermetic seal, and said conductor being electrically connected to said conductive material proximate said first major surface of said substrate and to said contact pad proximate said second major surface of said substrate.

Claim 3

The hermetically sealed packaged chip recited in claim 1 wherein: said chip has a plurality of contact pads on said first surface; and a corresponding number of external leads are included in said package, each external lead being electrically connected to one of said contact pads via a conductor which extends through one of a plurality of apertures in said substrate each of which extends from said first major surface to said second major surface thereof, each of said apertures being sealed by a hermetic seal including conductive material bonded to said first major surface of said substrate, each conductor being electrically connected to the corresponding conductive material proximate said first major substrate surface and to the respective one of said contact pads proximate said second major substrate surface.

Claim 4

The hermetically sealed packaged chip recited in claim 2 wherein: each said conductor compliantly connects between the respective one of said contact pads and said hermetic seal conductive material sealing the aperture through which said conductor extends.

Claim 5

A hermetically sealed, packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; and a package within which said chip is hermetically sealed, said package including: a lid comprising an electrically insulating substrate having first and second opposed major surfaces and an aperture extending therethrough from said first major surface to said second major surface, a conductor extending through the aperture in said lid and spaced from the wall of said aperture, an external lead, said external lead being electrically connected to said contact pad of said chip via said conductor, a hermetic seal including a conductive material bonded to said first major surface of said substrate and sealing said aperture, and said external lead being electrically connected to said conductive material of said hermetic seal, and said conductor being electrically connected to said conductive material proximate said first major surface of said substrate and to said contact pad proximate said second major surface of said substrate.

Claim 6

A hermetically sealed, packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; and a package within which said chip is hermetically sealed, said package including: a lid comprising an electrically insulating substrate having first and second opposed major surfaces and an aperture extending therethrough from said first major surface to said second major surface, a conductor extending through the aperture in said lid and spaced from the wall of said aperture, an external lead, said external lead being electrically connected to said contact pad of said chip via said conductor, a hermetic seal including a conductive material bonded to said first major surface of said substrate and sealing said aperture, and said external lead being electrically connected to said conductive material of said hermetic seal, and said conductor being electrically connected to said conductive material proximate said first major surface of said substrate and to said contact pad proximate said second major surface of said substrate.

Claim 7

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from a portion of the wall of said aperture.

Claim 8

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from a portion of the wall of said aperture.

Claim 9

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from at least some parts of the wall of said aperture.

Claim 10

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from at least some parts of the wall of said aperture.

Claim 11

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface and being disposed in alignment with said contact pad; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from a portion of the wall of said aperture.

Claim 12

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface and being disposed in alignment with said contact pad; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from a portion of the wall of said aperture.

Claim 13

The packaged chip recited in claim 5 wherein: said conductive lead is bonded to said contact pad.

Claim 14

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from a portion of the wall of said aperture, said conductive lead being bonded to said contact pad by a bond which includes a plurality of conductive bumps of a first conductive material solderless bonded to said chip pad, the bulk of said chip pad being a conductive material other than said first conductive material.

Claim 15

A packaged semiconductor chip comprising: said chip, said chip having a contact pad on a first surface thereof; a lid comprising an electrically insulating substrate, said substrate having an aperture therein and being disposed with a major surface thereof substantially parallel to said first surface of said chip, said aperture intersecting said major surface; and a conductive lead disposed within said aperture and electrically continuous with said contact pad for connecting said contact pad to circuitry external to said package, said conductive lead being spaced from a portion of the wall of said aperture, said conductive lead being bonded to said contact pad by a bond which includes a plurality of conductive bumps of a first conductive material solderless bonded to said chip pad, the bulk of said chip pad being a conductive material other than said first conductive material.

Claim 16

The packaged chip recited in claim 9 wherein: said first conductive material comprises gold.

Claim 17

The packaged chip recited in claim 9 wherein: said lead comprises a conductive pellet disposed at least partially within said aperture, and said package further comprises a conductive foil disposed on said major surface of said substrate, said conductive foil extending across said aperture and being sealingly adhered to said substrate to provide a hermetic seal between said chip in the outside of said package.

Claim 18

The packaged chip recited in claim 11 wherein: said foil is compliant where it extends across said aperture.

Claim 19

The packaged chip recited in claim 11 wherein: said conductive pellet is bonded to said conductive foil.

Claim 20

The packaged chip recited in claim 13 wherein: said conductive pellet is bonded to said contact pad.

Claim 21

The packaged chip recited in claim 11 wherein: said conductive pellet is bonded to said contact pad.

Claim 22

The packaged chip recited in claim 13 wherein: said conductive pellet is integral with said conductive foil.

Claim 23

The packaged chip recited in claim 5 further comprising: a base comprising a conductive material bonded to a second side of said chip.

Claim 24

The packaged chip recited in claim 17 wherein: all of said bonds are solderless bonds.

Claim 25

The packaged chip recited in claim 17 wherein: said base is also bonded to said lid to hermetically seal said package.

Claim 26

The packaged chip recited in claim 11 wherein: said conductive pellet is not bonded to said substrate.

Claim 27

The packaged chip recited in claim 11 wherein: said pellet extends beyond both said first and said second major surfaces of said substrate.

Claim 28

The packaged chip recited in claim 21 wherein: said pellet is spaced from the wall of said aperture.

Claim 29

The packaged chip recited in claim 21 wherein: said foil is dimpled where it extends across said aperture.

Claim 30

The packaged chip recited in claim 23 wherein: said dimple extends outward from a major surface of said substrate.

Claim 31

A hermetically packaged semiconductor chip comprising: said chip, said chip having at least one contact pad on a first surface thereof; a plurality of conductive pellets each bonded to one of said at least one contact pad on said first surface; a lid including an electrically insulating substrate disposed adjacent to said first surface, said substrate having a first major surface and a second major surface opposed thereto, and said substrate having a plurality of apertures therein extending from said first major surface to said second major surface, each of said conductive pellets being at least partially disposed within one of said apertures; and a conductive foil extending across at least one of said apertures, said conductive foil being sealingly adhered to one of said first and second major substrate surfaces to provide a hermetic seal between said chip and the outside of said package.

Claim 32

A hermetically packaged semiconductor chip comprising: said chip, said chip having at least one contact pad on a first surface thereof; a plurality of conductive pellets each bonded to one of said at least one contact pad on said first surface; a lid including an electrically insulating substrate disposed adjacent to said first surface, said substrate having a first major surface and a second major surface opposed thereto, and said substrate having a plurality of apertures therein extending from said first major surface to said second major surface, each of said conductive pellets being at least partially disposed within one of said apertures; and a conductive foil extending across at least one of said apertures, said conductive foil being sealingly adhered to one of said first and second major substrate surfaces to provide a hermetic seal between said chip and the outside of said package.

Claim 33

The packaged chip recited in claim 25 wherein said conductive pellets are integral with said foil.

Claim 34

The packaged chip recited in claim 25 wherein: said foil is bonded to said substrate to provide a hermetic seal between said chip and the outside of said package.

Claim 35

The packaged chip recited in claim 26 wherein: said conductive pellets are bonded to said foil.

Claim 36

The packaged chip recited in claim 28 wherein: said foil is compliant where it extends across said aperture.

Claim 37

The packaged chip recited in claim 28 further comprising: a base sealed to said lid to hermetically seal said chip within said package.

Claim 38

The packaged chip recited in claim 30 further comprising: a frame disposed between said base and said lid and sealed to both said base and said lid.

Claim 39

The packaged chip recited in claim 31 wherein: said frame is integral with said base.

Claim 40

The packaged chip recited in claim 31 wherein: said frame is solderless bonded to said base.

Claim 41

The packaged chip recited in claim 25 wherein: said foil is dimpled where it extends across said at least one aperture.

Claim 42

The packaged chip recited in claim 34 wherein: said dimple extends outward from a major source of said lid.

Claim 43

The packaged chip recited in claim 25 wherein: said pellets extend beyond both major surfaces of said substrate.

Claim 44

A lid for a hermetic semiconductor device package comprising: a ceramic substrate having opposed major surfaces and an aperture therein which extends between said major surfaces; a sealing frame disposed on one of said major surfaces of said substrate; and a conductive foil bonded to one of said major surfaces of said substrate to extend across said aperture and hermetically seal said aperture, said foil being compliant where it extends across said aperture.

Claim 45

A lid for a hermetic semiconductor device package comprising: a ceramic substrate having opposed major surfaces and an aperture therein which extends between said major surfaces; a sealing frame disposed on one of said major surfaces of said substrate; and a conductive foil bonded to one of said major surfaces of said substrate to extend across said aperture and hermetically seal said aperture, said foil being compliant where it extends across said aperture.

Claim 46

The lid recited in claim 37 wherein: said conductive foil is solderless bonded to said ceramic substrate.

Claim 47

The hermetically sealed, packaged semiconductor chip recited in claim 11 wherein: said conductive foil is direct bonded to said substrate.

Claim 48

The hermetically sealed, packaged semiconductor chip recited in claim 39 wherein: said conductive foil is copper.

Claim 49

The hermetically sealed, packaged semiconductor chip recited in claim 25 wherein: said conductive foil is direct bonded to said substrate.

Claim 50

The hermetically sealed, packaged semiconductor chip recited in claim 41 wherein: said conductive foil is copper.