Position sensitive detector and method using successive interdigitated electrodes with different patterns

Claim 2

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and/or charged particles and producing an amplified and accelerated charged image which corresponds spatially to the incident radiation and/or charged particles, successive means for impingement of said accelerated charged image downstream in the accelerated direction of said charged image from said detecting and producing means, each of said successive impingement means including at least a pair of interdigitated electrode means, said interdigitated electrodes at said successive impingement means having different electrode patterns, a collector downstream of said successive impingement means for collecting the charged image, and means for comparing the electrodes of each pair for impingement when the charged image is collected and determining the location of the charges making up the charged image.

Claim 3

The detector of claim 1 wherein said different electrode patterns include two sets of patterns orthogonal to one another.

Claim 4

The detector of claim 2 wherein each said set of patterns includes a broad pattern bisecting said accelerated charged image and finer patterns bisecting the electrodes of a broader pattern.

Claim 5

The detector of claim 1 wherein said different electrode patterns include finer patterns on each successive impingement means in the upstream direction.

Claim 6

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and/or charged particles and producing an amplified and accelerated charged image which corresponds spatially to the incident radiation and/or charged particles, successive means for impingement of said accelerated charged image downstream in the accelerated direction of said charged image from said detecting and producing means, each of said successive impingement means including at least a pair of interdigitated electrode means, said interdigitated electrodes at said successive impingement means having different electrode patterns including two sets of patterns orthogonal to one another, each said set of patterns including a broad pattern bisecting said accelerated charged image and finer patterns bisecting the electrodes of a broader pattern, said pairs of said electrodes having different and finer patterns on each successive impingement means in the upstream direction, a collector downstream of said successive impingement means for collecting the charged image, and means for comparing the electrodes of each pair for impingement when the charged image is collected and determining the location of the charges making up the charged image.

Claim 7

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and/or charged particles and producing an amplified and accelerated charged image which corresponds spatially to the incident radiation and/or charged particles, successive means for impingement of said accelerated charged image downstream in the accelerated direction of said charged image from said detecting and producing means, each of said successive impingement means including at least a pair of interdigitated electrode means, said interdigitated electrodes at said successive impingement means having different electrode patterns including two sets of patterns orthogonal to one another, each said set of patterns including a broad pattern bisecting said accelerated charged image and finer patterns bisecting the electrodes of a broader pattern, said pairs of said electrodes having different and finer patterns on each successive impingement means in the upstream direction, a collector downstream of said successive impingement means for collecting the charged image, and means for comparing the electrodes of each pair for impingement when the charged image is collected and determining the location of the charges making up the charged image.

Claim 8

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and/or charged particles and producing an amplified and accelerated electron image which corresponds spatially to the incident radiation and/or charged particles, a plurality of microchannel plates positioned successively downstream from said detecting and producing means in the direction of the accelerated electron image, each microchannel plate having image input and output surfaces with at least one of said surfaces having at least a pair of interdigitated electrodes, said pairs of said electrodes having different patterns, a collector downstream of said microchannel plates, and means for comparing the electrodes of each pair of electrodes for impingement when the electron image is collected and determining the location of the electrons making up the electron image.

Claim 9

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and/or charged particles and producing an amplified and accelerated electron image which corresponds spatially to the incident radiation and/or charged particles, a plurality of microchannel plates positioned successively downstream from said detecting and producing means in the direction of the accelerated electron image, each microchannel plate having image input and output surfaces with at least one of said surfaces having at least a pair of interdigitated electrodes, said pairs of said electrodes having different patterns, a collector downstream of said microchannel plates, and means for comparing the electrodes of each pair of electrodes for impingement when the electron image is collected and determining the location of the electrons making up the electron image.

Claim 10

The detector of claim 6 wherein said different electrode patterns include two sets of patterns orthogonal to one another.

Claim 11

The detector of claim 7 wherein each said set of said patterns includes a broad pattern bisecting said accelerated electron image and finer patterns bisecting the electrodes of a broader pattern.

Claim 12

The detector of claim 1 wherein said different electrode patterns include finer patterns on each successive microchannel plate in the upstream direction.

Claim 13

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and charged particles and producing an amplified and accelerated electron image which corresponds spatially to the incident radiation and/or charged particles, a plurality of microchannel plates positioned successively downstream in the direction of the accelerated electron image from said detecting and producing means, each microchannel plate having image input and output surfaces with at least a pair of interdigitated electrodes on each of said surfaces, said electrodes on said input surface of a given plate being orthogonal to said electrodes on said output surface of said given plate when projected onto a common plane, said pairs of said electrodes having different and finer patterns on each successive plate in the upstream direction, a collector downstream of said microchannel plates, and means for comparing the electrodes of each pair of electrodes for impingement when the electron image is collected and determining the location of the electrons making up the electron image.

Claim 14

A position sensitive detector for imaging incident radiation, charged particles and/or energetic neutral particles comprising, in combination: means for detecting said radiation and charged particles and producing an amplified and accelerated electron image which corresponds spatially to the incident radiation and/or charged particles, a plurality of microchannel plates positioned successively downstream in the direction of the accelerated electron image from said detecting and producing means, each microchannel plate having image input and output surfaces with at least a pair of interdigitated electrodes on each of said surfaces, said electrodes on said input surface of a given plate being orthogonal to said electrodes on said output surface of said given plate when projected onto a common plane, said pairs of said electrodes having different and finer patterns on each successive plate in the upstream direction, a collector downstream of said microchannel plates, and means for comparing the electrodes of each pair of electrodes for impingement when the electron image is collected and determining the location of the electrons making up the electron image.

Claim 17

The method of claim 11 including providing different electrode patterns including two sets of patterns orthogonal to one another.

Claim 18

The method of claim 12 including providing in each said set of patterns a broad pattern bisecting said accelerated charged image and finer patterns bisecting the electrodes of a broader pattern.

Claim 19

The method of claim 13 including providing finer patterns at each successive impingement location in the upstream direction.