US5100478A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Solar cell
Assignee: Mitsubishi Electric Corp
•
Filing: 1990-11-27
•
Granted: 1992-03-31
•
Expires: 2010-11-27
Abstract
Abstract A solar cell includes a semiconductor substrate having a plurality of recesses at one surface leaving a plurality of mutually isolated areas of the substrate exposed at that surface, an electrically insulating material filling the recesses, a semiconductor film disposed on the substrate and the electrically insulating material forming a plurality of mutually isolated rectifying junctions with the substrate, one electrode in electrical contact with the semiconductor film at a light incident surface of the solar cell and another electrode in electrical contact with the substrate. The solar cell is made by forming the plurality of recesses, depositing an electrically insulating material on the substrate and in the recesses, removing a portion of the electrically insulating material to expose the substrate at a plurality of mutually isolated locations, depositing the semiconductor film on the electrically insulating material and the substrate, and depositing the electrodes.
Inventors
- 👤 Kiyoshi Kawabata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:51
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/11; H10F10/14; H10F10/146; H10F71/00; H10F71/121; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
153 words
A solar cell comprising: a semiconductor substrate of a first conductivity type having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface leaving a plurality of mutually isolated area of the substrate exposed at the first surface; an electrically insulating material filling the recesses; a first semiconductor film of a second conductivity type, opposite from the first conductivity type, disposed on the substrate and the electrically insulating material at the first surface and forming a plurality of mutually isolated rectifying junctions with the substrate; second and third semiconductor films of opposite conductivity types forming a rectifying junction and disposed on the first semiconductor film; and a first electrode in electrical contact with the third semiconductor film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 2
Dependent Claim
153 words
A solar cell comprising: a semiconductor substrate of a first conductivity type having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface leaving a plurality of mutually isolated area of the substrate exposed at the first surface; an electrically insulating material filling the recesses; a first semiconductor film of a second conductivity type, opposite from the first conductivity type, disposed on the substrate and the electrically insulating material at the first surface and forming a plurality of mutually isolated rectifying junctions with the substrate; second and third semiconductor films of opposite conductivity types forming a rectifying junction and disposed on the first semiconductor film; and a first electrode in electrical contact with the third semiconductor film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 3
Dependent Claim
19 words
The solar cell of claim 1 including an electrically conducting, transparent anti-reflection film disposed on the third semiconductor film.
Claim 4
Dependent Claim
25 words
The solar cell of claim 2 wherein the anti-reflection film is chosen from the group consisting of indium tin oxide, tin oxide, and tantalum pentoxide.
Claim 5
Dependent Claim
24 words
The solar cell of claim 1 wherein the electrically insulating material is chosen from the group consisting of silicon nitride, silicon dioxide, and SiON.
Claim 6
Dependent Claim
49 words
The solar cell of claim 1 wherein combinations of the semiconductor substrate and first semiconductor layer are chosen from the groups consisting of silicon and silicon, gallium arsenide and gallium arsenide, indium phosphide and indium phosphide, cadmium sulfide and cadmium telluride, and indium gallium arsenide phosphide and gallium arsenide.
Claim 7
Dependent Claim
147 words
A solar cell comprising: a semiconductor substrate of a first conductivity type having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface, the substrate including at the first surface mutually isolated, spaced apart regions of a second conductivity type, opposite from the first conductivity type; an electrically insulating material filling the recesses; an electrically conducting, transparent, anti-reflection film on the first surface of the substrate and on the electrically insulating material in electrical contact with the second conductivity type regions; and a first electrode in electrical contact with the electrically conducting, transparent, anti-reflection transparent film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 8
Dependent Claim
147 words
A solar cell comprising: a semiconductor substrate of a first conductivity type having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface, the substrate including at the first surface mutually isolated, spaced apart regions of a second conductivity type, opposite from the first conductivity type; an electrically insulating material filling the recesses; an electrically conducting, transparent, anti-reflection film on the first surface of the substrate and on the electrically insulating material in electrical contact with the second conductivity type regions; and a first electrode in electrical contact with the electrically conducting, transparent, anti-reflection transparent film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 9
Dependent Claim
29 words
The solar cell of claim 6 wherein the electrically conducting, transparent, anti-reflection transparent film is chosen from the group consisting of indium tin oxide, tin oxide, and tantalum pentoxide.
Claim 10
Dependent Claim
143 words
A solar cell comprising: an electrically conducting semiconductor substrate having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface; an electrically insulating material filling the recesses; a first semiconductor film of a first conductivity type disposed on the electrically insulating material and the semiconductor substrate at the first surface; a second semiconductor film of a second conductivity type, opposite from the first conductivity type, disposed on the first semiconductor film forming a rectifying junction with the first semiconductor film; and a first electrode in electrical contact with the second semiconductor film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 11
Dependent Claim
143 words
A solar cell comprising: an electrically conducting semiconductor substrate having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface; an electrically insulating material filling the recesses; a first semiconductor film of a first conductivity type disposed on the electrically insulating material and the semiconductor substrate at the first surface; a second semiconductor film of a second conductivity type, opposite from the first conductivity type, disposed on the first semiconductor film forming a rectifying junction with the first semiconductor film; and a first electrode in electrical contact with the second semiconductor film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 12
Dependent Claim
19 words
The solar cell of claim 8 including an electrically conducting, transparent, anti-reflection film disposed on the second semiconductor film.
Claim 13
Dependent Claim
28 words
The solar cell of claim 9 wherein the electrically conducting, transparent, anti-reflection film is chosen from the group consisting of indium tin oxide, tin oxide, and tantalum pentoxide.
Claim 14
Dependent Claim
24 words
The solar cell of claim 8 wherein the electrically insulating material is chosen from the group consisting of silicon nitride, silicon dioxide, and SiON.
Claim 15
Dependent Claim
27 words
The solar cell of claim 8 including third and fourth semiconductor layers of opposite conductivity types forming a rectifying junction and disposed on the first semiconductor film.
Claim 16
Dependent Claim
119 words
A solar cell comprising: an electrically conducting semiconductor substrate having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface; an electrically insulating material filling the recesses; a first semiconductor film disposed on the electrically insulating material and the semiconductor substrate at the first surface; a relatively thin metal film disposed on the first semiconductor film; and a first electrode in electrical contact with the thin metal film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 17
Dependent Claim
119 words
A solar cell comprising: an electrically conducting semiconductor substrate having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface; an electrically insulating material filling the recesses; a first semiconductor film disposed on the electrically insulating material and the semiconductor substrate at the first surface; a relatively thin metal film disposed on the first semiconductor film; and a first electrode in electrical contact with the thin metal film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.
Claim 18
Dependent Claim
21 words
The solar cell of claim 13 including an electrically insulating layer disposed between the first surface and the thin metal film.
Claim 19
Independent Claim
120 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a first semiconductor film of a second conductivity type, opposite from the first conductivity type, on the electrically insulating material and the first surface of the substrate to form a plurality of rectifying junctions between the first semiconductor film and the substrate; and depositing first and second electrodes in electrical contact with the first semiconductor film and substrate, respectively.
Claim 20
Independent Claim
120 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a first semiconductor film of a second conductivity type, opposite from the first conductivity type, on the electrically insulating material and the first surface of the substrate to form a plurality of rectifying junctions between the first semiconductor film and the substrate; and depositing first and second electrodes in electrical contact with the first semiconductor film and substrate, respectively.
Claim 21
Dependent Claim
14 words
The method of claim 15 including forming the recesses by chemically etching the substrate.
Claim 22
Dependent Claim
20 words
The method of claim 15 including depositing one of silicon nitride, silicon dioxide, and SiON as the electrically insulating material.
Claim 23
Dependent Claim
18 words
The method of claim 15 including depositing an electrically conducting, transparent, anti-reflection film on the first semiconductor film.
Claim 24
Dependent Claim
25 words
The method of claim 15 including removing a portion of the electrically insulating material to expose the first surface of the substrate by mechanical polishing.
Claim 25
Independent Claim
104 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a thin metal film on the electrically insulating material and the first surface of the substrate to form a plurality of rectifying junctions with the substrate; and depositing first and second electrodes in electrical contact with the thin metal film and substrate, respectively.
Claim 26
Independent Claim
104 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a thin metal film on the electrically insulating material and the first surface of the substrate to form a plurality of rectifying junctions with the substrate; and depositing first and second electrodes in electrical contact with the thin metal film and substrate, respectively.
Claim 27
Dependent Claim
30 words
The method of claim 20 including, after removing a portion of the electrically insulating material, depositing an electrically insulating film on the first surface before depositing the thin metal film.
Claim 28
Independent Claim
133 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; diffusing a dopant impurity producing the second conductivity type into the first surface of the semiconductor substrate to form mutually isolated pn junctions at respective mutually isolated locations on the first surface of the substrate; depositing an electrically conducting, transparent, anti-reflection film on the electrically insulating material and the first surface of the substrate; and depositing first and second electrodes in electrical contact with the electrically conducting, transparent, anti-reflection film and substrate, respectively.
Claim 29
Independent Claim
133 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; diffusing a dopant impurity producing the second conductivity type into the first surface of the semiconductor substrate to form mutually isolated pn junctions at respective mutually isolated locations on the first surface of the substrate; depositing an electrically conducting, transparent, anti-reflection film on the electrically insulating material and the first surface of the substrate; and depositing first and second electrodes in electrical contact with the electrically conducting, transparent, anti-reflection film and substrate, respectively.
Claim 30
Independent Claim
142 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of an electrically conductive semiconductor substrate; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a first semiconductor film of a first conductivity type on the electrically insulating material and the first surface of the substrate in electrical contact with the substrate at the plurality of mutually isolated locations on the substrate; depositing a second semiconductor film of a second conductivity type, opposite the first conductivity type, on the first semiconductor film to form a rectifying junction with the first semiconductor film; and depositing first and second electrodes in electrical contact with the second semiconductor film and substrate, respectively.
Claim 31
Independent Claim
142 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of an electrically conductive semiconductor substrate; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a first semiconductor film of a first conductivity type on the electrically insulating material and the first surface of the substrate in electrical contact with the substrate at the plurality of mutually isolated locations on the substrate; depositing a second semiconductor film of a second conductivity type, opposite the first conductivity type, on the first semiconductor film to form a rectifying junction with the first semiconductor film; and depositing first and second electrodes in electrical contact with the second semiconductor film and substrate, respectively.
Claim 32
Dependent Claim
14 words
The method of claim 23 including forming the recesses by mechanically scribing the substrate.
Claim 33
Dependent Claim
18 words
The method of claim 23 including depositing an electrically conducting, transparent, anti-reflection film on the second semiconductor film.
Claim 34
Dependent Claim
19 words
The method of claim 23 including forming the recesses in the substrate by molding during formation of the substrate.
Claim 35
Dependent Claim
17 words
The method of claim 23 including removing a portion of the electrically insulating material by mechanical polishing.
Claim 36
Independent Claim
113 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of an electrically conductive semiconductor substrate; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a first semiconductor film on the electrically insulating material on the first surface of the substrate; depositing a thin metal film on the first semiconductor film to form a plurality of rectifying junctions with the first semiconductor film; and depositing first and second electrodes in electrical contact with the thin metal film and substrate, respectively.
Claim 37
Independent Claim
113 words
A method of making a solar cell, comprising: forming a plurality of recesses in a surface of an electrically conductive semiconductor substrate; depositing an electrically insulating material on the substrate and in the recesses; removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations; depositing a first semiconductor film on the electrically insulating material on the first surface of the substrate; depositing a thin metal film on the first semiconductor film to form a plurality of rectifying junctions with the first semiconductor film; and depositing first and second electrodes in electrical contact with the thin metal film and substrate, respectively.
Claim 38
Dependent Claim
31 words
The method of claim 28 including, after removing a portion of the electrically insulating material, depositing an electrically insulating film on the first semiconductor film before depositing the thin metal film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-31 | 1995-09-30 | 1996-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-31 | 1999-09-30 | 2000-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-31 | 2003-09-30 | 2004-03-31 | $7700.00 | Window Closed / Lapsed |