US5097381A
Expired / Lapsed
US
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Double sidewall trench capacitor cell
Assignee: Micron Technology Inc
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Filing: 1990-10-11
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Granted: 1992-03-17
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Expires: 2010-10-11
Abstract
Abstract A double sidewall trench capacitor cell particularly adapted for use as a memory cell capacitor of a DRAM is disclosed. The preferred embodiments of the invention include a loop shaped trench formed in the semiconductor substrate upon which the integrated circuit is formed. The trench preferably forms a closed loop and in the described embodiment is a circular trench. The sidewalls and the bottom of the trench are covered with a dielectric material. The sidewalls and bottom of the trench function as one plate of a capacitor formed by the completed structure. The dielectric layer is covered with a material which functions as a cell node and serves as the opposing plate of the capacitor structure. The cell node may be formed by filling the trench with a relatively conductive material covering substantially all of the dielectric layer in the trench. The described capacitor structure provides increased charge storage on the capacitor structure without increasing the planar area occupied by the structure.
Inventors
- 👤 Huy T. Vo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:51
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/37; H10D; H10D1/00; H10D1/60; H10D1/62; H10D1/66; H10D1/665
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
96 words
A capacitor structure for use on an integrated circuit comprising: a body of relatively conductive material; a loop trench formed in the body, the loop trench having an inner sidewall and an outer sidewall; a dielectric layer formed on the inner sidewall and the outer sidewall wherein the inner sidewall and the outer sidewall taper toward each other; and a relatively conductive layer formed so as to cover the dielectric layer, the inner and outer sidewall of the trench functioning as a first capacitor plate and the relatively conductive layer functioning as a second capacitor plate.
Claim 2
Dependent Claim
96 words
A capacitor structure for use on an integrated circuit comprising: a body of relatively conductive material; a loop trench formed in the body, the loop trench having an inner sidewall and an outer sidewall; a dielectric layer formed on the inner sidewall and the outer sidewall wherein the inner sidewall and the outer sidewall taper toward each other; and a relatively conductive layer formed so as to cover the dielectric layer, the inner and outer sidewall of the trench functioning as a first capacitor plate and the relatively conductive layer functioning as a second capacitor plate.
Claim 3
Dependent Claim
22 words
A capacitor structure for use on an integrated circuit as defined in claim wherein the relatively conductive body comprises a semiconductor substrate.
Claim 4
Dependent Claim
23 words
A capacitor structure for use on an integrated circuit as defined in claim 1 wherein the loop trench comprises a closed loop trench.
Claim 5
Dependent Claim
23 words
A capacitor structure for use on an integrated circuit as defined in claim 3 wherein the closed loop trench comprises a circular trench.
Claim 6
Dependent Claim
67 words
A capacitor structure for use on an integrated circuit as defined in claim 1 wherein the depth of the trench is in the range from about 5.0 microns to about 15.0 microns, wherein the upper trench width is in the range from about 0.2 microns to about 0.7 microns, and wherein the bottom trench width is in the range from about 0.0 microns to about 0.7 microns.
Claim 7
Dependent Claim
29 words
A capacitor structure for use on an integrated circuit as defined in claim 1 wherein the dielectric layer covers substantially all of the inner sidewall and the outer sidewall.
Claim 8
Dependent Claim
31 words
A capacitor structure for use on an integrated circuit as defined in claim 6 wherein the trench has a bottom and the dielectric layer substantially covers the bottom of the trench.
Claim 9
Dependent Claim
23 words
A capacitor structure for use on an integrated circuit as defined in claim 1 wherein the relatively conductive layer comprises a cell node.
Claim 10
Dependent Claim
30 words
A capacitor structure for use on an integrated circuit as defined in claim 8 wherein the cell node comprises a material substantially filling the trench and covering the dielectric layer.
Claim 11
Dependent Claim
75 words
A capacitor structure for use on an integrated circuit as defined in claim 1 wherein the integrated circuit comprises a dynamic random access memory cell comprising an access device, a bit line, and a word line and wherein the loop trench comprises a closed loop trench and wherein the dielectric layer covers substantially all of the inner sidewall and the outer sidewall of the trench and wherein the relatively conductive layer comprises a cell node.
Claim 12
Dependent Claim
134 words
A dynamic random access memory cell comprising: a heavily doped substrate; an access device; a closed loop trench formed in the substrate; an inner sidewall formed in the closed loop trench; an outer sidewall formed in the closed loop trench, the inner and outer sidewalls tapering toward each other toward the bottom of the trench; a dielectric layer formed over substantially all of the inner sidewall and the outer sidewall; a cell node covering substantially all of the dielectric layer in the trench, the inner and outer sidewalls of the trench formed in the substrate acting as a first capacitor plate and the cell node acting as an opposing second capacitor plate such that a charge can be stored using the capacitor plates, the stored charge representing a logical state of the memory cell.
Claim 13
Dependent Claim
134 words
A dynamic random access memory cell comprising: a heavily doped substrate; an access device; a closed loop trench formed in the substrate; an inner sidewall formed in the closed loop trench; an outer sidewall formed in the closed loop trench, the inner and outer sidewalls tapering toward each other toward the bottom of the trench; a dielectric layer formed over substantially all of the inner sidewall and the outer sidewall; a cell node covering substantially all of the dielectric layer in the trench, the inner and outer sidewalls of the trench formed in the substrate acting as a first capacitor plate and the cell node acting as an opposing second capacitor plate such that a charge can be stored using the capacitor plates, the stored charge representing a logical state of the memory cell.
Claim 14
Dependent Claim
30 words
A dynamic random access memory cell as defined in claim 11 wherein the depth of the circular trench is in the range from about 5.0 microns to about 15.0 microns.
Claim 15
Dependent Claim
28 words
A dynamic random access memory cell as defined in claim 12 wherein the upper trench width is in the range from about 0.2 microns to about 0.7 microns.
Claim 16
Dependent Claim
37 words
A dynamic random access memory cell as defined in claim 13 wherein the closed loop trench comprises a bottom and wherein the bottom trench width is in the range from about 0.0 microns to about 0.7 microns.
Claim 17
Dependent Claim
20 words
A dynamic random access memory cell as defined in claim 11 wherein the access device comprises a field effect transistor.
Claim 18
Dependent Claim
20 words
A dynamic random access memory cell as defined in claim 11 wherein the closed loop trench comprises a cylindrical trench.
Claim 19
Dependent Claim
17 words
A dynamic random access memory cell as defined in claim 11 wherein the substrate is electrically grounded.
Claim 20
Dependent Claim
26 words
A dynamic random access memory cell as defined in claim 11 wherein the heavily doped substrate and the cell node each comprise a relatively conductive material.
Claim 21
Independent Claim
123 words
A method of forming a capacitor structure on an integrated circuit substrate, the method comprising the steps of: forming a loop trench in the substrate, the loop trench having an inner sidewall and an outer sidewall wherein the inner sidewall and the outer sidewall converge toward each other; forming a dielectric layer over the inner sidewall and over the outer sidewall; forming a cell node over the dielectric layer in the trench, the inner and outer sidewalls of the trench formed in the substrate acting as a first capacitor plate and the cell node acting as an opposing second capacitor plate such that a charge can be stored using the capacitor plates, the stored charge representing a logical state of the memory cell.
Claim 22
Independent Claim
123 words
A method of forming a capacitor structure on an integrated circuit substrate, the method comprising the steps of: forming a loop trench in the substrate, the loop trench having an inner sidewall and an outer sidewall wherein the inner sidewall and the outer sidewall converge toward each other; forming a dielectric layer over the inner sidewall and over the outer sidewall; forming a cell node over the dielectric layer in the trench, the inner and outer sidewalls of the trench formed in the substrate acting as a first capacitor plate and the cell node acting as an opposing second capacitor plate such that a charge can be stored using the capacitor plates, the stored charge representing a logical state of the memory cell.
Claim 23
Dependent Claim
58 words
A method of forming a capacitor structure on an integrated circuit substrate as defined in claim 19 wherein the step of forming a loop trench comprises the step of forming a closed loop trench having an inner sidewall, an outer sidewall, and a bottom and further comprising the step of forming the dielectric layer over the trench bottom.
Claim 24
Dependent Claim
33 words
A method of forming a capacitor structure on an integrated circuit substrate as defined in claim 19 wherein the step of forming a loop trench comprises the step of forming a cylindrical trench.
Claim 25
Dependent Claim
48 words
A method of forming a capacitor structure on an integrated circuit substrate as defined in claim 19 wherein the step of forming a loop trench comprises the step of forming a loop trench wherein the inner sidewall and the outer sidewall converge toward the bottom of the trench.
Claim 26
Dependent Claim
45 words
A method of forming a capacitor structure on an integrated circuit substrate as defined in claim 19 wherein the step of forming the dielectric layer comprises the step of forming a dielectric layer which covers substantially all of the inner sidewall and the outer sidewall.
Claim 27
Dependent Claim
37 words
A method of forming a capacitor structure on an integrated circuit substrate as defined in claim 19 wherein the step of forming a cell node comprises the step of filling the trench with a relatively conductive material.
Claim 28
Dependent Claim
35 words
A method of forming a capacitor structure on an integrated circuit substrate as defined in claim 19 further comprising the steps of: forming an access device; forming a bit line; and forming a word line.
References Cited (Backward Citations)
US4849854A
Cited
US4978634A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-17 | 1995-09-16 | 1996-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-17 | 1999-09-16 | 2000-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-17 | 2003-09-16 | 2004-03-17 | $7700.00 | Window Closed / Lapsed |