Quantitative determination method of chemicals for processing semiconductor and an apparatus thereof

Claim 1

A method of determining quantitatively the concentration of an inorganic electrolyte in an aqueous solution used in processing a semiconductor and containing at least one inorganic electrolyte, said method comprising carrying out the following steps for each inorganic electrolyte: (i) obtaining a near-infrared spectrum at 800-1400 nm of an aqueous solution of a known concentration of said electrolyte; (ii) selecting from the spectrum obtained in step (i) at least three wavelengths at which there are observed significant differences between said spectrum and the near-infrared spectrum of pure water at 800-1400 nm, said differences being caused by ionic hydration; (iii) repeating step (i) for a plurality of aqueous solutions each containing a known concentration of said electrolyte; (iv) deriving a calibration equation (I) for said electrolyte by regression analysis of the relation between the concentration of electrolyte in the aqueous solutions used in steps (i) and (iii) and the absorbance at each of the wavelengths selected in step (ii): C=Σα.sub.i A.sub.i (I) wherein C is the concentration of said electrolyte, A i is the absorbance at each of said selected wavelengths, and α i is a constant determined for each of said selected wavelengths by said regression analysis; (v) obtaining a near-infrared spectrum under the same conditions as in step (i) for a sample of unknown concentration of said electrolyte; (vi) measuring the absorbance at each of said selected wavelengths in the spectrum obtained in step (v); and (vii) determining the concentration of said electrolyte in the sample of unknown concentration by correlation between the absorbances measured in step (vi) and the calibration equation obtained in step (iv).

Claim 2

A method of determining quantitatively the concentration of an inorganic electrolyte in an aqueous solution used in processing a semiconductor and containing at least one inorganic electrolyte, said method comprising carrying out the following steps for each inorganic electrolyte: (i) obtaining a near-infrared spectrum at 800-1400 nm of an aqueous solution of a known concentration of said electrolyte; (ii) selecting from the spectrum obtained in step (i) at least three wavelengths at which there are observed significant differences between said spectrum and the near-infrared spectrum of pure water at 800-1400 nm, said differences being caused by ionic hydration; (iii) repeating step (i) for a plurality of aqueous solutions each containing a known concentration of said electrolyte; (iv) deriving a calibration equation (I) for said electrolyte by regression analysis of the relation between the concentration of electrolyte in the aqueous solutions used in steps (i) and (iii) and the absorbance at each of the wavelengths selected in step (ii): C=Σα.sub.i A.sub.i (I) wherein C is the concentration of said electrolyte, A i is the absorbance at each of said selected wavelengths, and α i is a constant determined for each of said selected wavelengths by said regression analysis; (v) obtaining a near-infrared spectrum under the same conditions as in step (i) for a sample of unknown concentration of said electrolyte; (vi) measuring the absorbance at each of said selected wavelengths in the spectrum obtained in step (v); and (vii) determining the concentration of said electrolyte in the sample of unknown concentration by correlation between the absorbances measured in step (vi) and the calibration equation obtained in step (iv).