Clean air room for a semiconductor factory

Abstract

Abstract A clean air room for a semiconductor factory includes a plurality of clean air boxes placed in side-by-side relation and each designed for its own processing step, an air conditioning equipment including a fresh-air regulator for controlling a supply of fresh-air to the clean air boxes, and fan filter units for supplying the air under pressure, the clean air boxes having clean air chambers of which environment is maintained to a predetermined degree of cleanliness in response to the fan filter units and defining an air circulating path extending through the clean air chambers, the clean air chambers including low clean air chambers and an ultra clean air chamber divided by common side walls of the clean air boxes, the low clean air chambers having operating zones and the ultra clean air chamber having a transfer robot therein, and semiconductor processors extending through the common side walls and having processing stations, the processing stations being located at least within the ultra clean air chamber. The ultra clean air chamber includes partitions between which the transfer robot is movable, and the partitions and the common side walls cooperate to form small chambers, the partitions having openings through which an arm of the robot is moved into and out of the small chambers.

Inventors

• 👤 Shousuke Shinoda
• 👤 Tetsuo Yamashita
• 👤 Yukio Sugihara
• 👤 Yoshihiro Matsumoto

Bibliographic Details