US5092360A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flow rated control valve using a high-temperature stacked-type displacement device
Assignee: Proterial Ltd
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Filing: 1990-11-13
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Granted: 1992-03-03
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Expires: 2010-11-13
Abstract
Abstract A flow rate control valve including a valve chest having an open end, an inflow passage and outflow passage each having one end communicating with the valve chest and the other end opened, a valve seat provided at the end of the inflow passage or outflow passage communicating with the valve chest, a sheet-like diaphragm provided to tightly close the open end of the valve chest and a stacked-type displacement device made of an electromechanical transducing material exhibiting the maximum value of piezoelectric distortion constant at a higher temperature range than 100° C. or above and which exerts a pressure on the diaphragm by its deformation to change the position of the diaphragm, thereby controlling the gap between the valve seat and the diaphragm.
Inventors
- 👤 Yoshiyuki Watanabe
- 👤 Junichi Watanabe
- 👤 Shigeru Jomura
- 👤 Takahiro Someji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:50
CPC Classifications
F; F16; F16K; F16K31/00; F16K31/004; F16K31/007; C; C04; C04B; C04B35/00; C04B35/01; C04B35/48; C04B35/49; C04B35/491; C04B35/495; C04B35/497; C04B35/499; C04B37/00; C04B37/02; C04B37/023; C04B37/026; H; H10; H10N; H10N30/00; H10N30/50; H10N30/80; H10N30/85; H10N30/853; H10N30/8548; H10N30/8554; C04B2235/00; C04B2235/02; C04B2235/30; C04B2235/32; C04B2235/3205; C04B2235/3213; C04B2235/327; C04B2235/3279; C04B2235/3294; C04B2235/60; C04B2235/602; C04B2235/6025; C04B2237/00; C04B2237/02; C04B2237/12; C04B2237/30; C04B2237/32; C04B2237/34; C04B2237/345; C04B2237/346; C04B2237/348; H10N30/87; H10N30/872; Y; Y10; Y10T; Y10T137/00; Y10T137/7722; Y10T137/7758; Y10T137/7761
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
139 words
A flow rate control valve including: (a) a valve chest having an open end; (b) an inflow passage and outflow passage each having one end communicating with said valve chest and the other end open; (c) a valve seat provided at said one end of said inflow passage or said outflow passage communicating with said valve chest; (d) a sheet-like diaphragm provided to tightly close the open end of said valve chest and forming a gap with said valve seat; and (e) a stacked-type displacement device made of an electromechanical transducing material exhibiting a maximum value of piezoelectric distortion constant in the temperature range 100° C. and above, said displacement device being positioned to exert a pressure on said diaphragm by its deformation, whereby said diaphragm is displaced to control the gap between said valve seat and said diaphragm.
Claim 2
Dependent Claim
139 words
A flow rate control valve including: (a) a valve chest having an open end; (b) an inflow passage and outflow passage each having one end communicating with said valve chest and the other end open; (c) a valve seat provided at said one end of said inflow passage or said outflow passage communicating with said valve chest; (d) a sheet-like diaphragm provided to tightly close the open end of said valve chest and forming a gap with said valve seat; and (e) a stacked-type displacement device made of an electromechanical transducing material exhibiting a maximum value of piezoelectric distortion constant in the temperature range 100° C. and above, said displacement device being positioned to exert a pressure on said diaphragm by its deformation, whereby said diaphragm is displaced to control the gap between said valve seat and said diaphragm.
Claim 3
Dependent Claim
30 words
The flow rate control valve according to claim 1, wherein said stacked-type displacement device has said piezoelectric distortion constant which reaches a maximum between about 130° C. and 180° C.
Claim 4
Dependent Claim
57 words
The flow rate control valve according to claim 1, wherein said electromechanical transducing material of said stacked-up displacement device consists essentially of 61-44 weight % of PbO, 2.5 weight % of SrCO 3 , 10.5-12 weight % of TiO 2 , 20-22 weight % of ZrO 2 and 0.1-2.0 weight % of Sb 2 O 3 .
Claim 5
Dependent Claim
34 words
The flow rate control valve according to claim 1, wherein said stacked-type displacement device is covered on substantially its entire surface by a film which is made of a heat resistant insulating resin material.
Claim 6
Dependent Claim
33 words
The flow rate control valve according to claim 1, wherein said stacked-type displacement device has outer electrodes connected to lead wires with solder having a liquid phase temperature of 200° C. or above.
Claim 7
Dependent Claim
32 words
The flow rate control valve according to claim 1, further including heating means for heating said stacked-type displacement device to said temperature range at which said piezoelectric distortion constant reaches a maximum.
Claim 8
Dependent Claim
188 words
A mass flow controller including: (a) a flow rate control valve comprising: a valve chest having an open end; an inflow passage and outflow passage each having one end communicating with said valve chest and the other end open; a valve seat provided at said one end of said inflow passage or said outflow passage communicating with said valve chest; a sheet-like diaphragm provided to tightly close the open end of said valve chest and forming a gap with said valve seat; and a stacked-type displacement device made of an electromechanical transducing material exhibiting a maximum value of piezoelectric distortion constant in the temperature range 100° C. and above, said displacement device being positioned to exert a pressure on said diaphragm by its deformation, whereby said diaphragm is displaced to control the gap between said valve chest and said diaphragm; (b) flow rate detecting means provided in said inflow passage or said outflow passage; (c) means for comparing the output of said flow rate detecting means with a set control value; and (d) control means for controlling said flow control valve on the basis of said compared result.
Claim 9
Dependent Claim
188 words
A mass flow controller including: (a) a flow rate control valve comprising: a valve chest having an open end; an inflow passage and outflow passage each having one end communicating with said valve chest and the other end open; a valve seat provided at said one end of said inflow passage or said outflow passage communicating with said valve chest; a sheet-like diaphragm provided to tightly close the open end of said valve chest and forming a gap with said valve seat; and a stacked-type displacement device made of an electromechanical transducing material exhibiting a maximum value of piezoelectric distortion constant in the temperature range 100° C. and above, said displacement device being positioned to exert a pressure on said diaphragm by its deformation, whereby said diaphragm is displaced to control the gap between said valve chest and said diaphragm; (b) flow rate detecting means provided in said inflow passage or said outflow passage; (c) means for comparing the output of said flow rate detecting means with a set control value; and (d) control means for controlling said flow control valve on the basis of said compared result.
Claim 10
Dependent Claim
29 words
The mass flow controller according to claim 7, wherein said stacked-type displacement device has said piezoelectric distortion constant which reaches a maximum between about 130° C. and 180° C.
Claim 11
Dependent Claim
54 words
The mass flow controller according to claim 7, wherein said electromechanical transducing material of said stacked-type displacement device contains 61-66 weight % of PbO, 2-5 weight % of SrCO 3 , 10.5-12 weight % of TiO 2 , 20-22 weight % of SrO 2 and 0.1-2.0 weight % of Sb 2 O 3 .
Claim 12
Dependent Claim
23 words
The flow rate control valve as in claim 1, wherein said diaphragm abuttingly contacts said valve seat during closure of the control valve.
Claim 13
Dependent Claim
32 words
The flow rate control valve as in claim 7 further including heating means for heating said stacked-type displacement device to said temperature range at which said piezoelectric distortion constant reaches a maximum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-03 | 1995-09-02 | 1996-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-03 | 1999-09-02 | 2000-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-03 | 2003-09-02 | 2004-03-03 | $7700.00 | Window Closed / Lapsed |