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US5092177A Expired / Lapsed US ⏱️ 0.0 years remaining

Device for measuring the deformations of a diaphragm

Assignee: Thales Avionics SAS
•
Filing: 1990-07-26
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Granted: 1992-03-03
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Expires: 2010-07-26
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Abstract

Abstract A device for measuring the deformations of a flexible diaphragm (1) sealed by its periphery to a support (2) and wherein are formed four sensors constituted by a thick layer of piezo-resistive material and connected as a Wheatstone bridge. The sensors are arranged on both sides of the diaphragm with, on each surface, a sensor (R3, R4) at the neighborhood of the center and a sensor (R1, R2) at the neighborhood of the periphery. A central sensor and a peripheral sensor of the opposite surface are arranged in opposite legs of the bridge, two sensors of the same surface having their connection point connected to a supply terminal of the bridge. The device serves as a pressure sensor.

Inventors

  • 👤 Henri Varacca

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 23:15
CPC Classifications
G; G01; G01B; G01B7/00; G01B7/16; G01B7/18; G01L; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0055

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 125 words
A device for measuring the deformations of a flexible diaphragm sealed by its periphery to a support and wherein are formed four sensors constituted by a thick layer of piezo-resistive material and connected as a Wheatstone bridge, wherein: the sensors are arranged on both sides of the diaphragm with first and second sensors on opposite sides and generally at the center of said diaphragm, and third and fourth sensors on opposite sides and generally at the periphery of said diaphragm; and each said sensor generally at the center and each said sensor generally at the periphery on opposite sides are connected in opposite legs of the bridge, two sensors of the same side having their connection point connected to a supply terminal of the bridge.
Claim 2
Independent Claim 125 words
A device for measuring the deformations of a flexible diaphragm sealed by its periphery to a support and wherein are formed four sensors constituted by a thick layer of piezo-resistive material and connected as a Wheatstone bridge, wherein: the sensors are arranged on both sides of the diaphragm with first and second sensors on opposite sides and generally at the center of said diaphragm, and third and fourth sensors on opposite sides and generally at the periphery of said diaphragm; and each said sensor generally at the center and each said sensor generally at the periphery on opposite sides are connected in opposite legs of the bridge, two sensors of the same side having their connection point connected to a supply terminal of the bridge.
Claim 3
Dependent Claim 23 words
A device for measuring the deformations of a diaphragm according to claim 1, wherein said sensors and said support are made of ceramics.
Claim 4
Dependent Claim 46 words
A device for measuring the deformations of a diaphragm according to claim 1, wherein said support constitues a chamber connected to a pneumatic circuit, whereby the diaphragm moves as a function of the pressure variations on its two surfaces and said device constitutes a pressure sensor.

References Cited (Backward Citations)

US2580407A Cited
US3341794A Cited
US3455165A Cited
US4116075A Cited
US4376929A Cited
US4140023A Cited
US4311980A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-03-03 1995-09-02 1996-03-03 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-03-03 1999-09-02 2000-03-03 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-03-03 2003-09-02 2004-03-03 $7700.00 Window Closed / Lapsed

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