US5091694A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Quartz probe apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1990-01-30
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Granted: 1992-02-25
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Expires: 2010-01-30
Abstract
Abstract A quartz probe apparatus having a plurality of quartz probe bodies and a metal pattern layer formed on each of the quartz probe bodies. A plurality of quartz probe bodies integrally incorporate a microprobe portion including a number of microprobes corresponding to electrode arrays of an object of examination, a pattern wiring portion connected with the microprobe portion, and an electrode pad portion connected with the pattern wiring portion. A plurality of quartz probe bodies are formed by etching a Z-plane of a quartz plate perpendicular to the crystal axis Z thereof.
Inventors
- 👤 Towl Ikeda
- 👤 Hisashi Koike
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:47
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06711; G01R1/06755; G01R1/06761; G01R1/073; G01R1/07307; G01R1/07342; G01R1/06733; G01R1/07364; G01R1/07371
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
107 words
A quartz probe apparatus comprising; a plurality of quartz probe bodies integrally formed from one quartz plate by etching a Z-plane of said quartz plate perpendicular to the crystal axis Z thereof, each quartz probe body incorporating a microprobe portion including: a number of microprobes corresponding to electrode arrays of an object of examination; a pattern wiring portion connected with the microprobe portion; an electrode pad portion connected with the pattern wiring portion; and a metal pattern layer formed on each side of each quartz probe body; wherein said quartz plate serves as a substrate for said quartz probe bodies during testing of said object of examination.
Claim 2
Dependent Claim
107 words
A quartz probe apparatus comprising; a plurality of quartz probe bodies integrally formed from one quartz plate by etching a Z-plane of said quartz plate perpendicular to the crystal axis Z thereof, each quartz probe body incorporating a microprobe portion including: a number of microprobes corresponding to electrode arrays of an object of examination; a pattern wiring portion connected with the microprobe portion; an electrode pad portion connected with the pattern wiring portion; and a metal pattern layer formed on each side of each quartz probe body; wherein said quartz plate serves as a substrate for said quartz probe bodies during testing of said object of examination.
Claim 3
Dependent Claim
14 words
The quartz probe apparatus according to claim 1, wherein said etching is anisotropic etching.
Claim 4
Dependent Claim
19 words
The quartz probe apparatus according to claim 1, wherein said metal pattern layer has a multiple metla layer structure.
Claim 5
Dependent Claim
24 words
The quartz probe apparatus according to claim 3, wherein said multiple metal layer is formed of a primary layer and an electrically conductive layer.
Claim 6
Dependent Claim
19 words
The quartz probe apparatus according to claim 4, wherein said primary layer is formed of gold deposited on chromium.
Claim 7
Dependent Claim
30 words
The quartz probe apparatus according to claim 4, wherein said conductive layer is formed of a metal selected from the group consisting of gold, silver, copper, iridium, palladium, and platinum.
Claim 8
Dependent Claim
18 words
The quartz probe apparatus according to claim 3, wherein said multiple metal layer has a microstrip line structure.
Claim 9
Dependent Claim
44 words
The quartz probe apparatus according to claim 7, comprising a lead strip line formed on one side of the quartz plate, and a ground strip line formed on the other side of the quartz plate so as to correspond to the lead strip line.
Claim 10
Dependent Claim
22 words
The quartz probe apparatus according to claim 8, wherein said lead strip line and said ground strip line have the same pattern.
Claim 11
Dependent Claim
118 words
A quartz probe apparatus comprising: a plurality of quartz probe bodies formed by etching a Z-plane of a quartz plate perpendicular to the crystal axis Z thereof and integrally incorporating a microprobe portion including a number of microprobes corresponding to electrode arrays of an object of examination, a pattern wiring portion connected with the microprobe portion, and an electrode pad portion connected with the pattern wiring portion; a metal pattern layer formed on each said quartz probe body; and aligning means for aligning the electrode arrays on all sides of the object of examination and the microprobe portion; wherein said quartz plate serves as a substrate for said quartz probe bodies during testing of said object of examination.
Claim 12
Dependent Claim
118 words
A quartz probe apparatus comprising: a plurality of quartz probe bodies formed by etching a Z-plane of a quartz plate perpendicular to the crystal axis Z thereof and integrally incorporating a microprobe portion including a number of microprobes corresponding to electrode arrays of an object of examination, a pattern wiring portion connected with the microprobe portion, and an electrode pad portion connected with the pattern wiring portion; a metal pattern layer formed on each said quartz probe body; and aligning means for aligning the electrode arrays on all sides of the object of examination and the microprobe portion; wherein said quartz plate serves as a substrate for said quartz probe bodies during testing of said object of examination.
Claim 13
Dependent Claim
23 words
The quartz probe apparatus according to claim 10, wherein said aligning means adjusts the positions of the quartz probe bodies through screw connections.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-24 | 1995-08-26 | 1996-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-24 | 1999-08-26 | 2000-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-24 | 2003-08-26 | 2004-02-25 | $7700.00 | Window Closed / Lapsed |