US5091335A
Expired / Lapsed
US
⏱️ 0.0 years remaining
MBE growth technology for high quality strained III-V layers
Assignee: National Aeronautics and Space Administration
•
Filing: 1990-03-30
•
Granted: 1992-02-25
•
Expires: 2010-03-30
Abstract
Abstract III-V films are grown on large automatically perfect terraces of III-V substrates which have a different lattice constant, with temperature and Group II and V arrival rates chosen to give a Group III element stable surface. The growth is pulsed to inhibit Group III metal accumulation to low temperature, and to permit the film to relax to equilibrium. The method of the invention 1) minimizes starting step density on sample surface; 2) deposits InAs and GaAs using an interrupted growth mode (0.25 to 2 mono-layers at a time); 3) maintains the instantaneous surface stoichiometry during growth (As-stable for GaAs, In-stable for InAs); and 4) uses time-resolved RHEED to achieve aspects (1)-14 (3).
Inventors
- 👤 Frank J. Grunthaner
- 👤 John K. Liu
- 👤 Bruce R. Hancock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 13:21
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/22; H10P14/2907; H10P14/2911; H10P14/2912; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/3252; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3422; Y; Y10; Y10S; Y10S148/00; Y10S148/005; Y10S148/018; Y10S438/00; Y10S438/938
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
115 words
A method for growing a film comprising multiple high quality strained layers comprising a first III-V compound on a substrate comprising a second III-V compound in molecular beam epitaxy apparatus, said substrate having a sufficiently different lattice parameter than said III-V layer to generate strain in said III-V layers, said method comprising: (a) forming a layer of said first III-V material having a slight excess of III-component to maintain a metal-stabilized surface reconstruction while forming about 1/4 to 2 monolayers thick of said first III-V material on said substrate; (b) ceasing formation of said layer for a period of time; (c) repeating steps (a) and (b) until said film of the desired thickness is grown.
Claim 2
Independent Claim
115 words
A method for growing a film comprising multiple high quality strained layers comprising a first III-V compound on a substrate comprising a second III-V compound in molecular beam epitaxy apparatus, said substrate having a sufficiently different lattice parameter than said III-V layer to generate strain in said III-V layers, said method comprising: (a) forming a layer of said first III-V material having a slight excess of III-component to maintain a metal-stabilized surface reconstruction while forming about 1/4 to 2 monolayers thick of said first III-V material on said substrate; (b) ceasing formation of said layer for a period of time; (c) repeating steps (a) and (b) until said film of the desired thickness is grown.
Claim 3
Dependent Claim
29 words
The material of claim 1 wherein said III-V material consists essentially of a material selected from the group consisting of InAs, AlAs, GaAs, and InSb x As 1-x .
Claim 4
Dependent Claim
41 words
The method of claim 2 wherein said III-V material grown on said substrate evidences lattice mismatch, said III-V layer/substrate combinations selected from the group consisting of InAs/GaAs, GaAs/InAs, GaAs/Si, InAs/Si, InSb x As 1-x /GaSb y As 1-y , and AlAs/InAs.
Claim 5
Dependent Claim
26 words
The method of claim 1 wherein said time period is sufficient to permit the surface of said III-V layer to epitaxially orient with the layer underneath.
Claim 6
Dependent Claim
18 words
The method of claim 4 wherein said time period ranges from a few seconds to about two minutes.
Claim 7
Dependent Claim
36 words
The method of claim 4 wherein RHEED analysis is used to determine the surface lattice constant of said III-V layer and said layer formation is reinitiated when said surface lattice constant becomes indistinguishable from said substrate.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein said substrate is maintained at a temperature ranging from about 250° to 575° C.
Claim 9
Dependent Claim
20 words
The method of claim 7 wherein said substrate is maintained at as low a temperature as possible within said range.
Claim 10
Dependent Claim
32 words
The method of claim 1 in which steps (a)-(c) are repeated for the deposition of a superlattice interlayer as required to create a multilayer or quantum well structure of the appropriate thickness.
Claim 11
Independent Claim
83 words
A method for growing a film comprising multiple high quality strained InAs layers on a GaAs substrate in molecular beam epitaxy apparatus comprising: (a) forming a layer of InAs material having a slight excess of In to maintain an In-stabilized surface reconstruction while forming about 1/4 to 2 monolayers thick of said InAs material on said substrate; (b) ceasing formation of said layer for a period of time; (c) repeating steps (a) and (b) until said film of the desired thickness is grown.
Claim 12
Independent Claim
83 words
A method for growing a film comprising multiple high quality strained InAs layers on a GaAs substrate in molecular beam epitaxy apparatus comprising: (a) forming a layer of InAs material having a slight excess of In to maintain an In-stabilized surface reconstruction while forming about 1/4 to 2 monolayers thick of said InAs material on said substrate; (b) ceasing formation of said layer for a period of time; (c) repeating steps (a) and (b) until said film of the desired thickness is grown.
Claim 13
Dependent Claim
32 words
The method of claim 10 in which steps (a)-(c) are repeated for the deposition of a superlattice interlayer as required to create a multilayer or quantum well structure of the appropriate thickness.
Claim 14
Dependent Claim
26 words
The method of claim 10 wherein said time period is sufficient to permit the surface of said InAs layer to epitaxially orient with the layer underneath.
Claim 15
Dependent Claim
18 words
The method of claim 12 wherein said time period ranges from a few seconds to about two minutes.
Claim 16
Dependent Claim
36 words
The method of claim 12 wherein RHEED analysis is used to determine the surface lattice constant of said InAs layer and said layer formation is reinitiated when said surface lattice constant becomes indistinguishable from said substrate.
Claim 17
Dependent Claim
20 words
The method of claim 10 wherein said substrate is maintained at a temperature ranging from about 250° to 575° C.
Claim 18
Dependent Claim
20 words
The method of claim 15 wherein said substrate is maintained at as low a temperature as possible within said range.
References Cited (Backward Citations)
US4058430A
Cited
US4575462A
Cited
US4829022A
Cited
US4833101A
Cited
US4933300A
Cited
US4843029A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-24 | 1995-08-26 | 1996-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-24 | 1999-08-26 | 2000-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-24 | 2003-08-26 | 2004-02-25 | $7700.00 | Window Closed / Lapsed |