US5089742A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam source formed with biologically derived tubule materials
Assignee: United States Department of the Navy
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Filing: 1990-09-28
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Granted: 1992-02-18
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Expires: 2010-09-28
Abstract
Abstract A field emitter array comprises an array of aligned metallic, conductive rotubules extending from a conductive base. The array is typically made by cutting a matrix comprising the aligned microtubules into sections, usually normal to the tubule alignment axis. One end surface of a section is etched or otherwise treated to remove the matrix, but not the tubules. That end surface is then provided with a conductive coating and fixed to a contact. The other end surface of that section is then also treated to remove the matrix material and leave the tubules extending from the conductive metal base. Field emitter arrays made according to the present invention provide a greater brightness than conventional field emitter arrays.
Inventors
- 👤 Douglas A. Kirkpatrick
- 👤 Joel M. Schnur
- 👤 Paul E. Schoen
- 👤 Ronald R. Price
- 👤 Wallace M. Manheimer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:03
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
24 words
A cathode having an emitter comprising a plurality of electrically conductive, self-assembled hollow cylinders having outer diameters of no more than about 1.0 μm.
Claim 2
Dependent Claim
24 words
A cathode having an emitter comprising a plurality of electrically conductive, self-assembled hollow cylinders having outer diameters of no more than about 1.0 μm.
Claim 3
Dependent Claim
23 words
A field array emitter comprising a plurality of conductive metal tubules nonrandomly aligned with respect to and extending from an electrically conductive base.
Claim 4
Dependent Claim
23 words
A field array emitter comprising a plurality of conductive metal tubules nonrandomly aligned with respect to and extending from an electrically conductive base.
Claim 5
Dependent Claim
20 words
The field array emitter of claim 2, wherein said tubules have been aligned in a magnetic, electric or flow field.
Claim 6
Dependent Claim
17 words
The field array emitter of claim 2, wherein said tubules extending essentially normal to said conductive base.
Claim 7
Dependent Claim
25 words
The field array emitter of claim 2, wherein said tubules have distal ends which extend a height of about 10 μm above the conductive base.
Claim 8
Dependent Claim
21 words
The field array emitter of claim 2, further comprising a current limiting means for limiting the current emitted from said array.
Claim 9
Dependent Claim
28 words
The field array emitter of claim 6, wherein said current limiting means comprises a semiconductor or transition oxide onto which said conductive base is mounted and electrically connected.
Claim 10
Dependent Claim
31 words
The field array emitter of claim 6, wherein said current limiter comprises a coating of a semiconductor or transition metal oxides on the ends of said tubules distal to said base.
Claim 11
Dependent Claim
13 words
The field array emitter of claim 8, wherein said coating is n-doped silicon.
Claim 12
Dependent Claim
14 words
The field array emitter of claim 2, wherein said conductive base comprises a metal.
Claim 13
Dependent Claim
54 words
The field array emitter of claim 10, wherein said conductive base comprises an upper layer of metal which wets and forms an electrical contact with said tubules, and a lower layer of metal which wets and forms an electrical contact with said upper layer and which also covers the proximal ends of said tubules.
Claim 14
Dependent Claim
28 words
The field array emitter of claim 2, wherein an end of said conductive base opposite that from which said tubules extend is electrically connected to a macroscopic contact.
Claim 15
Dependent Claim
14 words
The field array emitter of claim 12, wherein said macroscopic contact is a plug.
Claim 16
Dependent Claim
39 words
A cathode comprising a plurality of nonrandomly aligned electrically conductive, hollow metal cylinders having outer radii of less than about 0.3 μm and which are essentially uniformly and randomly spaced in a plane transverse to the axis of alignment.
Claim 17
Dependent Claim
39 words
A cathode comprising a plurality of nonrandomly aligned electrically conductive, hollow metal cylinders having outer radii of less than about 0.3 μm and which are essentially uniformly and randomly spaced in a plane transverse to the axis of alignment.
Claim 18
Independent Claim
126 words
A method of producing a field emitter array, comprising the steps of: removing a fraction matrix material from an end of a section of a composite material having nonrandomly aligned metal tubules extend across the length of said section so as to expose a fraction of the length of said tubules at ends thereof; coating the expose fraction of said tubules with a conductive metallic material so as to wet and form an electrical contact with said metal tubules and to form a smooth electrically conducting surface over the exposed ends of said tubules; removing the remainder of said matrix material to provide a field array emitter comprising a plurality of conductive metal tubules nonrandomly aligned with respect to and extending from an electrically conductive base.
Claim 19
Independent Claim
126 words
A method of producing a field emitter array, comprising the steps of: removing a fraction matrix material from an end of a section of a composite material having nonrandomly aligned metal tubules extend across the length of said section so as to expose a fraction of the length of said tubules at ends thereof; coating the expose fraction of said tubules with a conductive metallic material so as to wet and form an electrical contact with said metal tubules and to form a smooth electrically conducting surface over the exposed ends of said tubules; removing the remainder of said matrix material to provide a field array emitter comprising a plurality of conductive metal tubules nonrandomly aligned with respect to and extending from an electrically conductive base.
Claim 20
Dependent Claim
24 words
The method of claim 15, further comprising the step of wetting and electrically connecting the smooth, electrically conductive surface to a macroscopic, electrical contact.
Claim 21
Dependent Claim
25 words
The method of claim 15, wherein said matrix material is solventable and said step of removing the remainder of said matrix comprises dissolving said matrix.
Claim 22
Dependent Claim
16 words
The method of claim 15, wherein at least one of said removing steps comprises plasma etching.
Claim 23
Dependent Claim
22 words
The method of claim 13, further comprising the step of coating said exposed ends of said tubules with a current limiting film.
Claim 24
Dependent Claim
16 words
The method of claim 19, wherein said current limiting film is a semiconductor or transition oxide.
Claim 25
Dependent Claim
13 words
The method of claim 20, wherein said current limiting film is n-doped silicon.
Claim 26
Dependent Claim
8 words
The product of the process of claim 15.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-17 | 1995-08-19 | 1996-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-17 | 1999-08-19 | 2000-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-17 | 2003-08-19 | 2004-02-18 | $7700.00 | Window Closed / Lapsed |