Photoelectric converting device having an electrode formed across an insulating layer on a control electrode and method for producing the same

Claim 1

A method for producing a photoelectric conversion device comprising a phototransistor cell including a first and a second main electrode region of a first conductivity-type semiconductor material and a control electrode region of a second conductivity-type semiconductor material different from said first conductivity-type semiconductor material in which an electrode for controlling a potential of said control electrode region is formed on a portion of said control electrode region, comprising the steps of: preparing a substrate provided with a first semiconductor region of said first conductivity-type semiconductor material so as to form said first main electrode region; forming a field insulating layer region on said first semiconductor region so as to define the cell; forming a second semiconductor region of the second conductivity-type semiconductor material within said first semiconductor region by a self-alignment process utilizing said field insulating layer region as a mask, so as to form said control electrode region; forming an electrode on a portion of said second semiconductor region and a portion of said field insulating layer region; forming a third semiconductor region of the first conductivity-type semiconductor material within said second semiconductor region by a self-alignment process utilizing said field insulating region and said electrode as a mask, so as to form said second main electrode region; forming an insulating layer on said third semiconductor region; forming a contact hole in said insulating layer; and forming an electrode connected to said third semiconductor region via said contact hole.

Claim 2

A method for producing a photoelectric conversion device comprising a phototransistor cell including a first and a second main electrode region of a first conductivity-type semiconductor material and a control electrode region of a second conductivity-type semiconductor material different from said first conductivity-type semiconductor material in which an electrode for controlling a potential of said control electrode region is formed on a portion of said control electrode region, comprising the steps of: preparing a substrate provided with a first semiconductor region of said first conductivity-type semiconductor material so as to form said first main electrode region; forming a field insulating layer region on said first semiconductor region so as to define the cell; forming a second semiconductor region of the second conductivity-type semiconductor material within said first semiconductor region by a self-alignment process utilizing said field insulating layer region as a mask, so as to form said control electrode region; forming an electrode on a portion of said second semiconductor region and a portion of said field insulating layer region; forming a third semiconductor region of the first conductivity-type semiconductor material within said second semiconductor region by a self-alignment process utilizing said field insulating region and said electrode as a mask, so as to form said second main electrode region; forming an insulating layer on said third semiconductor region; forming a contact hole in said insulating layer; and forming an electrode connected to said third semiconductor region via said contact hole.