Method for fine patterning

Claim 1

A method for fine patterning, comprising in sequence the steps of: applying a photoresist layer to a substrate, the photoresist layer having a surface layer and a lower layer beneath the surface layer; implanting ions into predetermined regions in said surface layer of said photoresist layer and leaving other regions in the surface layer free of the implanting of ions, said lower layer thereby being constituted by a first lower portion beneath the predetermined regions and a second lower portion beneath the other regions; irradiating at least some of the other regions of said surface layer of said photoresist layer with ultraviolet from above; forming a resist pattern for lift-off by developing said photoresist layer to remove a portion of said photoresist layer, a rate of the developing of said first lower portion being less than a rate of developing of said second lower portion because of differences in an extent of exposure of the first and second lower portions to the ultraviolet from above, said differences being dependent upon a level of concentration of the ions implanted into the predetermined regions; depositing a material to be patterned onto said resist pattern and said substrate from above said resist pattern; and removing said resist pattern, thereby lifting off said material which is on said resist pattern, whereby a fine pattern of said material is left on said substrate.

Claim 2

A method for fine patterning, comprising in sequence the steps of: applying a photoresist layer to a substrate, the photoresist layer having a surface layer and a lower layer beneath the surface layer; implanting ions into predetermined regions in said surface layer of said photoresist layer and leaving other regions in the surface layer free of the implanting of ions, said lower layer thereby being constituted by a first lower portion beneath the predetermined regions and a second lower portion beneath the other regions; irradiating at least some of the other regions of said surface layer of said photoresist layer with ultraviolet from above; forming a resist pattern for lift-off by developing said photoresist layer to remove a portion of said photoresist layer, a rate of the developing of said first lower portion being less than a rate of developing of said second lower portion because of differences in an extent of exposure of the first and second lower portions to the ultraviolet from above, said differences being dependent upon a level of concentration of the ions implanted into the predetermined regions; depositing a material to be patterned onto said resist pattern and said substrate from above said resist pattern; and removing said resist pattern, thereby lifting off said material which is on said resist pattern, whereby a fine pattern of said material is left on said substrate.

Claim 7

A method of fabricating a semiconductor device, comprising in sequence the steps of: applying a photoresist layer to a substrate, the photoresist layer having a surface layer and a lower layer beneath the surface layer; implanting ions into predetermined regions in said surface layer of said photoresist layer and leaving other regions in the surface layer free of the implanting of ions, said lower layer thereby being constituted by a first lower portion beneath the predetermined regions and a second lower portion beneath said other regions; irradiating at least some of the other regions of said surface layer of said photoresist layer with ultraviolet from above; forming a resist pattern for lift-off by developing said photoresist layer to remove a portion of said photoresist layer, a rate of developing of said first lower portion being less than a rate of developing of said second lower portion because of differences in an extent of exposure of the first and second lower portions to the ultraviolet from above, said differences being dependent upon a level of concentration of the ions implanted into the predetermined regions; depositing a conductive material to be patterned onto said resist pattern and said substrate from above said resist pattern; and removing said resist pattern, thereby lifting off said material which is on said resist pattern, whereby a fine pattern of said conductive material is left on said substrate.

Claim 8

A method of fabricating a semiconductor device, comprising in sequence the steps of: applying a photoresist layer to a substrate, the photoresist layer having a surface layer and a lower layer beneath the surface layer; implanting ions into predetermined regions in said surface layer of said photoresist layer and leaving other regions in the surface layer free of the implanting of ions, said lower layer thereby being constituted by a first lower portion beneath the predetermined regions and a second lower portion beneath said other regions; irradiating at least some of the other regions of said surface layer of said photoresist layer with ultraviolet from above; forming a resist pattern for lift-off by developing said photoresist layer to remove a portion of said photoresist layer, a rate of developing of said first lower portion being less than a rate of developing of said second lower portion because of differences in an extent of exposure of the first and second lower portions to the ultraviolet from above, said differences being dependent upon a level of concentration of the ions implanted into the predetermined regions; depositing a conductive material to be patterned onto said resist pattern and said substrate from above said resist pattern; and removing said resist pattern, thereby lifting off said material which is on said resist pattern, whereby a fine pattern of said conductive material is left on said substrate.

Claim 13

A method for fine patterning, comprising in sequence the steps of: applying a photoresist layer to a substrate, the photoresist layer having a surface layer and a lower layer beneath the surface layer; implanting ions into predetermined regions in said surface layer of said photoresist layer and leaving other regions in the surface layer free of the implanting of ions, the lower layer thereby being constituted by first lower areas beneath the predetermined regions and by second lower areas beneath the other regions; irradiating at least some of the other regions of said surface layer of said photoresist layer with ultraviolet from above; forming a resist pattern for lift-off by developing said photoresist layer to remove a portion of said photoresist layer, the step of forming including forming an undercut beneath the predetermined regions by the developing, the rate of the developing which removes portions of the first lower areas to form the undercuts being less than the rate of developing which removes the second lower areas because of the presence of the predetermined region during the step of irradiating which creates differences in an extent of exposure to the ultraviolet as between the first and second lower areas, said differences being dependent upon a level of concentration of the ion implanted into the predetermined regions; depositing a material to be patterned onto said resist pattern and said substrate from above said resist pattern; and removing said resist pattern, thereby lifting off said material which is on said resist patter, whereby a fine pattern of said material if left on said substrate.

Claim 14

A method for fine patterning, comprising in sequence the steps of: applying a photoresist layer to a substrate, the photoresist layer having a surface layer and a lower layer beneath the surface layer; implanting ions into predetermined regions in said surface layer of said photoresist layer and leaving other regions in the surface layer free of the implanting of ions, the lower layer thereby being constituted by first lower areas beneath the predetermined regions and by second lower areas beneath the other regions; irradiating at least some of the other regions of said surface layer of said photoresist layer with ultraviolet from above; forming a resist pattern for lift-off by developing said photoresist layer to remove a portion of said photoresist layer, the step of forming including forming an undercut beneath the predetermined regions by the developing, the rate of the developing which removes portions of the first lower areas to form the undercuts being less than the rate of developing which removes the second lower areas because of the presence of the predetermined region during the step of irradiating which creates differences in an extent of exposure to the ultraviolet as between the first and second lower areas, said differences being dependent upon a level of concentration of the ion implanted into the predetermined regions; depositing a material to be patterned onto said resist pattern and said substrate from above said resist pattern; and removing said resist pattern, thereby lifting off said material which is on said resist patter, whereby a fine pattern of said material if left on said substrate.