US5084407A
Expired / Lapsed
US
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Method for planarizing isolated regions
Assignee: NXP USA Inc
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Filing: 1991-06-03
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Granted: 1992-01-28
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Expires: 2011-06-03
Abstract
Abstract A method is described for planarizing isolated regions (12) and active regions (22) of a semiconductor wafer (10). Semiconductor wafer (10) is provided with islands of dielectric (12) that cover portions of the semiconductor wafer (10), while leaving other portions of the semiconductor wafer (10) exposed. The dielectric islands (12) have a polysilicon layer (13) that covers the dielectric islands' (12) top surface. A blanket layer of silicon is deposited on the polysilicon layer (13) that covers the top surface of the dielectric islands and is deposited between the dielectric islands (12). Planarizing the blanket layer of epitaxial silicon is achieved by a chemical-mechanical means, thereby producing a planar surface of isolated areas (12) and active areas (22).
Inventors
- 👤 Bernard W. Boland
- 👤 Barbara Vasquez
- 👤 James Jen-Ho Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:04
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/129; H10P14/00; H10P14/20; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2907; H10P14/2911; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P95/00; H10P95/06; H10P95/062; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/018; H10W10/10; Y; Y10; Y10S; Y10S438/00; Y10S438/969; Y10S438/977
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
83 words
A method for planarizing both an active area and a dielectric area on a semiconductor wafer comprising: providing the semiconductor wafer with both a patterned dielectric that is on the semiconductor wafer with a patterned polysilicon layer that is on the patterned dielectric, thereby exposing portions of the semiconductor wafer; depositing a blanket layer of silicon over the patterned polysilicon layer and on the exposed semiconductor wafer; and planarizing the blanket layer of silicon by a chemical-mechanical means, thereby making a planarized surface.
Claim 2
Independent Claim
83 words
A method for planarizing both an active area and a dielectric area on a semiconductor wafer comprising: providing the semiconductor wafer with both a patterned dielectric that is on the semiconductor wafer with a patterned polysilicon layer that is on the patterned dielectric, thereby exposing portions of the semiconductor wafer; depositing a blanket layer of silicon over the patterned polysilicon layer and on the exposed semiconductor wafer; and planarizing the blanket layer of silicon by a chemical-mechanical means, thereby making a planarized surface.
Claim 3
Dependent Claim
43 words
The method of claim 1 further comprising stopping the chemical-mechanical means at a predetermined point above the dielectric and oxidizing a remaining amount of residual patterned polysilicon layer that is over the patterned dielectric and further removing the oxidized polysilicon by hydrofluoric acid.
Claim 4
Dependent Claim
14 words
The method of claim 1 further comprising making the patterned dielectric of silicon dioxide.
Claim 5
Dependent Claim
14 words
The method of claim 2 further comprising making the patterned dielectric of silicon nitride.
Claim 6
Dependent Claim
13 words
The method of claim 1 further comprising making the semiconductor wafer of silicon.
Claim 7
Dependent Claim
14 words
The method of claim 5 further comprising making the semiconductor wafer of gallium arsenide.
Claim 8
Dependent Claim
17 words
The method of claim 1 further comprising having the chemical-mechanical means be a semiconductor wafer polishing system.
Claim 9
Dependent Claim
17 words
The method of claim 1 further including making the patterned dielectric with sidewalls having a predetermined slope.
Claim 10
Independent Claim
128 words
A method for making both an active silicon region and a dielectric region self-aligned to a doped region comprising: providing a semiconductor substrate; providing a channel stop region on the semiconductor substrate; depositing a dielectric layer on the silicon substrate; depositing a polysilicon layer on the dielectric layer; patterning the polysilicon layer and the oxide layer, thereby exposing portions of the semiconductor substrate and creating islands of dielectric with polysilicon on top of the dielectric islands; depositing a blanket layer of epitaxial silicon on the patterned semiconductor substrate, wherein the epitaxial silicon is deposited and fills between the dielectric islands and also is deposited on the polysilicon layer; and removing the epitaxial silicon by a chemical-mechanical means that is on the polysilicon layer, thereby producing a planar surface.
Claim 11
Independent Claim
128 words
A method for making both an active silicon region and a dielectric region self-aligned to a doped region comprising: providing a semiconductor substrate; providing a channel stop region on the semiconductor substrate; depositing a dielectric layer on the silicon substrate; depositing a polysilicon layer on the dielectric layer; patterning the polysilicon layer and the oxide layer, thereby exposing portions of the semiconductor substrate and creating islands of dielectric with polysilicon on top of the dielectric islands; depositing a blanket layer of epitaxial silicon on the patterned semiconductor substrate, wherein the epitaxial silicon is deposited and fills between the dielectric islands and also is deposited on the polysilicon layer; and removing the epitaxial silicon by a chemical-mechanical means that is on the polysilicon layer, thereby producing a planar surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-27 | 1995-07-29 | 1996-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-27 | 1999-07-29 | 2000-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-27 | 2003-07-29 | 2004-01-28 | $7700.00 | Window Closed / Lapsed |