US5083061A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam excited ion source
Assignee: Tokyo Electron Ltd
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Filing: 1990-11-15
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Granted: 1992-01-21
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Expires: 2010-11-15
Abstract
Abstract An ion source according to the present invention includes a first chamber, including a main chamber having an electron generating arrangement therein, and a sub-chamber communicating with the main chamber through a nozzle, for producing a first plasma by a discharge. A supply is also provided for supplying a first gas for a discharge into the main chamber, as well as an electron extracting arrangement for extracting electrons from the first plasma. Also included are a second chamber for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas, a further supply for supplying the second gas into the second chamber, and a magnetic field generator for generating a magnetic field for guiding the extracted electrons toward the second chamber. The electron extracting arrangement includes an electrode between the sub-chamber and the second chamber. The electrode has a first hole, formed at a position opposite to the opening of the nozzle, for allowing the extracted electrons to pass therethrough and to move into the second chamber, and second holes, arranged around the first hole, for allowing part of the first gas injected from the nozzle to pass therethrough and to move into the second chamber. Part of the first gas is drawn into the second chamber through the second holes of the electrode, and the density of the first gas passing through the first hole is decreased.
Inventors
- 👤 Akira Koshiishi
- 👤 Kohei Kawamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 01:33
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J2237/00; H01J2237/06; H01J2237/08; H01J2237/30; H01J2237/317; H01J2237/31701
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
195 words
An ion source for producing an ionized gas by discharge excitation using an electron beam, comprising: a first chamber for producing a first plasma by causing electric discharge in a first gas contained in an electron-emitting region, said first chamber including: a main chamber having electron generating means arranged therein, and a sub-chamber communicating with said main chamber through a nozzle; means for supplying the first gas for a discharge into said main chamber; electron extracting means, having only a single electrode, for extracting electrons from the first plasma; a second chamber for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas; and means for supplying the second gas into said second chamber; said single electrode including: a first hold, a center of which is coaxial with a center of an opening of said nozzle, for allowing the extracted electrons to pass therethrough and to move into said second chamber, and second holes, arranged around the first hole and surrounding the first hole, for allowing part of the first gas injected from said nozzle to pass therethrough and to move into said second chamber.
Claim 2
Dependent Claim
195 words
An ion source for producing an ionized gas by discharge excitation using an electron beam, comprising: a first chamber for producing a first plasma by causing electric discharge in a first gas contained in an electron-emitting region, said first chamber including: a main chamber having electron generating means arranged therein, and a sub-chamber communicating with said main chamber through a nozzle; means for supplying the first gas for a discharge into said main chamber; electron extracting means, having only a single electrode, for extracting electrons from the first plasma; a second chamber for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas; and means for supplying the second gas into said second chamber; said single electrode including: a first hold, a center of which is coaxial with a center of an opening of said nozzle, for allowing the extracted electrons to pass therethrough and to move into said second chamber, and second holes, arranged around the first hole and surrounding the first hole, for allowing part of the first gas injected from said nozzle to pass therethrough and to move into said second chamber.
Claim 3
Dependent Claim
20 words
An ion source according to claim 1, wherein said single electrode is provided between the sub-chamber and the second chamber.
Claim 4
Dependent Claim
33 words
An ion source according to claim 1, wherein said single electrode includes the second holes which are positioned in a range of 2.5 to 10 mm from the center of the first hole.
Claim 5
Dependent Claim
24 words
An ion source according to claim 1, wherein said single electrode includes the second holes which are constituted by four to eight circular holes.
Claim 6
Dependent Claim
22 words
An ion source according to claim 1, wherein said single electrode includes the second holes which are arranged on the same circumference.
Claim 7
Dependent Claim
28 words
An ion source according to claim 1, wherein said single electrode includes the first hole which is a circular hole having a diameter of 2.0 to 3.0 mm.
Claim 8
Dependent Claim
22 words
An ion source according to claim 1, wherein aid single electrode is a plate having a thickness of 1.0 to 3.5 mm.
Claim 9
Dependent Claim
19 words
An ion source according to claim 1, wherein said single electrode is made of a plate consisting of tungsten.
Claim 10
Dependent Claim
38 words
An ion source according to claim 2, wherein a power source of said electron extracting means is capable of applying a maximum voltage of 150 volts between said single electrode and a side wall of said second chamber.
Claim 11
Dependent Claim
167 words
An ion source for producing an ionized gas by discharge excitation using an electron beam, comprising: a first chamber for producing a first plasma by causing electric discharge in a first gas contained in an electron-emitting region, said first chamber including a main chamber having electron generating means contained therein and a sub-chamber communicating with the main chamber through a nozzle; electron extracting means for extracting electrons from the first plasma, the electron extracting means having only a single electrode with a primary opening, aligned to the nozzle, for passage of extracted electrons, the primary opening being surrounded by a plurality of secondary openings for passing the first gas; a second chamber for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas; means for supplying the second gas into said second chamber; and insulating means for insulating regions whose potential levels are lower than a potential level of the first plasma produced in the first chamber.
Claim 12
Dependent Claim
167 words
An ion source for producing an ionized gas by discharge excitation using an electron beam, comprising: a first chamber for producing a first plasma by causing electric discharge in a first gas contained in an electron-emitting region, said first chamber including a main chamber having electron generating means contained therein and a sub-chamber communicating with the main chamber through a nozzle; electron extracting means for extracting electrons from the first plasma, the electron extracting means having only a single electrode with a primary opening, aligned to the nozzle, for passage of extracted electrons, the primary opening being surrounded by a plurality of secondary openings for passing the first gas; a second chamber for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas; means for supplying the second gas into said second chamber; and insulating means for insulating regions whose potential levels are lower than a potential level of the first plasma produced in the first chamber.
Claim 13
Dependent Claim
21 words
An ion source according to claim 10, wherein said insulating means is provided inside the sub-chamber on an upper surface thereof.
Claim 14
Dependent Claim
17 words
An ion source according to claim 10, wherein said insulating means includes boron nitride or silicon nitride.
Claim 15
Dependent Claim
200 words
An ion source for producing an ionized gas by discharge excitation using an electron beam, comprising: a first chamber for producing a first plasma by causing electric discharge in a first gas contained in an electron-emitting region, said first chamber including: a main chamber having electron generating means arranged therein, and a sub-chamber communicating with said main chamber through a nozzle; means for supplying the first gas for a discharge into said main chamber; electron extracting means for extracting electrons from the first plasma, the electron extracting means having only a single electrode with a primary opening, aligned to the nozzle, for passing extracted electrons, the primary opening being surrounded by a plurality of secondary openings for passing the first gas; a second chamber having plural insulating members, for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas; means for supplying the second gas into said second chamber; and means for preventing adhesion of flied conductive particles in the second chamber, wherein said particle-adhesion preventing means serves as a shadow with respect to the second plasma due to at least part of said insulating members of the second chamber.
Claim 16
Dependent Claim
200 words
An ion source for producing an ionized gas by discharge excitation using an electron beam, comprising: a first chamber for producing a first plasma by causing electric discharge in a first gas contained in an electron-emitting region, said first chamber including: a main chamber having electron generating means arranged therein, and a sub-chamber communicating with said main chamber through a nozzle; means for supplying the first gas for a discharge into said main chamber; electron extracting means for extracting electrons from the first plasma, the electron extracting means having only a single electrode with a primary opening, aligned to the nozzle, for passing extracted electrons, the primary opening being surrounded by a plurality of secondary openings for passing the first gas; a second chamber having plural insulating members, for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas; means for supplying the second gas into said second chamber; and means for preventing adhesion of flied conductive particles in the second chamber, wherein said particle-adhesion preventing means serves as a shadow with respect to the second plasma due to at least part of said insulating members of the second chamber.
Claim 17
Dependent Claim
37 words
An ion source according to claim 13, wherein said particle-adhesion preventing means is provided on a contacting portion between said single electrode and the insulating member which is covered with a lower surface of said single electrode.
Claim 18
Dependent Claim
30 words
An ion source according to claim 13, wherein said particle-adhesion preventing means is provided on a contacting portion between a bottom plate and a support member in the second chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-20 | 1995-07-22 | 1996-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-20 | 1999-07-22 | 2000-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-20 | 2003-07-22 | 2004-01-21 | $7700.00 | Window Closed / Lapsed |