US5080927A
Expired / Lapsed
US
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Tin thin film formation method
Assignee: NTT Inc
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Filing: 1990-07-06
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Granted: 1992-01-14
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Expires: 2010-07-06
Abstract
Abstract A thin film formation method includes the steps of holding a substrate in a reduced-pressure vapor phase reaction chamber having means for irradiating light in visible and ultraviolet ranges, supplying an organo-titanium compound containing a tri-azo group, and vapor-depositing a titanium nitride film on a surface of the substrate by an excitation reaction caused by light.
Inventors
- 👤 Koichi Ikeda
- 👤 Masahiko Maeda
- 👤 Yoshinobu Arita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:50
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/22; C23C16/30; C23C16/34; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
56 words
A thin film formation method comprising the steps of: holding a substrate in a reduced-pressure vapor phase reaction chamber having means for irradiating light in visible and ultraviolet ranges; supplying an organo-titanium compound containing a tri-azo group; and depositing a titanium nitride film on a surface of said substrate by an excitation reaction caused by light.
Claim 2
Dependent Claim
56 words
A thin film formation method comprising the steps of: holding a substrate in a reduced-pressure vapor phase reaction chamber having means for irradiating light in visible and ultraviolet ranges; supplying an organo-titanium compound containing a tri-azo group; and depositing a titanium nitride film on a surface of said substrate by an excitation reaction caused by light.
Claim 3
Dependent Claim
21 words
A method according to claim 1, wherein a carrier gas is supplied together with the organo-titanium compound containing a tri-azo group.
Claim 4
Dependent Claim
31 words
A method according to claim 1, wherein the organo-titanium compound containing a tri-azo group is biscyclopentadienyltitanium diazide [Cp 2 Ti(N 3 ) 2 ] represented by the following formula (a): ##STR3##
Claim 5
Dependent Claim
41 words
A method according to claim 1, wherein the organo-titanium compound containing a tri-azo group is an organo-titanium compound represented by the following formula (b) in which a substituting group of an alkyl group is added to cyclopentadienyl group (Cp group): ##STR4##
Claim 6
Dependent Claim
41 words
A method according to claim 1, wherein the organo-titanium compound containing a tri-azo group is an organo-titanium compound represented by the following formula (c) in which a substituting group of a methyl group is added to cyclopentadienyl group (Cp group): ##STR5##
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-13 | 1995-07-15 | 1996-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-13 | 1999-07-15 | 2000-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-13 | 2003-07-15 | 2004-01-14 | $7700.00 | Window Closed / Lapsed |