US5074984A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for coating polymethylmethacrylate substrate with aluminum
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1989-12-13
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Granted: 1991-12-24
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Expires: 2009-12-13
Abstract
Abstract In a device for coating a substrate 1 made of polymethylmethacrylate with aluminum by means of a direct current source 10 which is connected to an electrode 5 disposed in an evacuable coating chamber 15a and electrically connected to a target 3 to be sputtered and the sputtered particles are deposited on a substrate 1 and wherein a process gas is introduced into the coating chamber (15, 15a), helium has is introduced as a process gas in order to improve adhesiveness and service life 2.
Inventors
- 👤 Eggo Sichmann
- 👤 Thomas Krug
- 👤 Wolf-Eckart Fritsche
- 👤 Martin Pollmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:01
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/06; C23C14/14; C23C14/20; C23C14/205
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
126 words
Process for coating a polymethylmethacrylate substrate with a metal, comprising placing said polymethylmethacrylate substrate in an evacuable coating chamber containing a target of said metal, said target having a surface to be sputtered and magnetic means for forming an arch-like magnetic field over said surface of said target, said target being connected to an electrode which is connected to a direct current source, evacuating said chamber and introducing helium into said chamber as a process gas to produce a plasma which is condensed over said surface to be sputtered, applying a direct current to said electrode to generate an electric field which accelerates the ions in the plasma toward the surface to be sputtered, thereby sputtering said target and coating said polymethylacrylate substrate with said metal.
Claim 2
Dependent Claim
126 words
Process for coating a polymethylmethacrylate substrate with a metal, comprising placing said polymethylmethacrylate substrate in an evacuable coating chamber containing a target of said metal, said target having a surface to be sputtered and magnetic means for forming an arch-like magnetic field over said surface of said target, said target being connected to an electrode which is connected to a direct current source, evacuating said chamber and introducing helium into said chamber as a process gas to produce a plasma which is condensed over said surface to be sputtered, applying a direct current to said electrode to generate an electric field which accelerates the ions in the plasma toward the surface to be sputtered, thereby sputtering said target and coating said polymethylacrylate substrate with said metal.
Claim 3
Dependent Claim
10 words
Process as in claim 1 wherein said metal is aluminum.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-23 | 1995-06-24 | 1995-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-23 | 1999-06-24 | 1999-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-23 | 2003-06-24 | 2003-12-24 | $7700.00 | Window Closed / Lapsed |