Method of making integrated magnetic read/write head/flexure/conductor structure

Claim 1

A method of making an integrated, unitary read/write head/flexure/conductor structure for the reading and writing of information with respect to a relatively moving recording medium, said method comprising forming in plural stages, and by a deposition process, an elongate dielectric flexure body, and creating within such body, and also by a deposition process, in plural stages interspersed with the forming stages, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure.

Claim 2

A method of making an integrated, unitary read/write head/flexure/conductor structure for the reading and writing of information with respect to a relatively moving recording medium, said method comprising forming in plural stages, and by a deposition process, an elongate dielectric flexure body, and creating within such body, and also by a deposition process, in plural stages interspersed with the forming stages, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure.

Claim 4

The method of claims 1 or 2 which results in a final unit having an overall length in the range of about 0.2- to about 0.5-inches, an overall width in the range of about 4- to about 20-mils, a thickness in the range of about 15- to about 65-microns, and a mass of about 100 micrograms.

Claim 5

The method of claims 1 or 2 which results in a final unit wherein the read/write pole structure takes the form of a probe-type structure.

Claim 6

The method of claims 1 or 2 which results in a final unit wherein the read/write pole structure takes the form of a ring-type structure.

Claim 7

A method of making an integrated, unitary read/write head/flexure/conductor structure of the reading and writing of information with respect to a relatively moving recording medium, said method comprising forming on a first planar surface of a nonmagnetic host wafer, by a deposition process, and in plural stages, an elongate dielectric flexure body, and during said forming, creating within such body, in plural stages which are interspersed with the forming stages, and also by a deposition process, magnetic yoke structure, and an electrical coil and conductor means operatively associated with such yoke structure, exposing an end surface of such body and yoke structure in a newly formed second planar surface which is generally orthogonal to such first planar surfaced, and fabricating on such second planar surface, by a deposition process, a pole structure magnetically coupled to an operatively associated with such yoke structure.

Claim 8

A method of making an integrated, unitary read/write head/flexure/conductor structure of the reading and writing of information with respect to a relatively moving recording medium, said method comprising forming on a first planar surface of a nonmagnetic host wafer, by a deposition process, and in plural stages, an elongate dielectric flexure body, and during said forming, creating within such body, in plural stages which are interspersed with the forming stages, and also by a deposition process, magnetic yoke structure, and an electrical coil and conductor means operatively associated with such yoke structure, exposing an end surface of such body and yoke structure in a newly formed second planar surface which is generally orthogonal to such first planar surfaced, and fabricating on such second planar surface, by a deposition process, a pole structure magnetically coupled to an operatively associated with such yoke structure.

Claim 13

A method of making plural integrated, unitary read/write head/flexure/conductor structures each for the reading and writing of information with respect to a relatively moving recoding medium, said method comprising forming in plural stages, and by a deposition process, plural side-by-side adjacent, elongate dielectric flexure bodies whose respective widths are defined by etchable wall-like stripes that extend between the separate adjacent bodies, creating within each such body, in plural stages interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said creating, etching such stripes as a step toward freeing individual bodies.

Claim 14

A method of making plural integrated, unitary read/write head/flexure/conductor structures each for the reading and writing of information with respect to a relatively moving recoding medium, said method comprising forming in plural stages, and by a deposition process, plural side-by-side adjacent, elongate dielectric flexure bodies whose respective widths are defined by etchable wall-like stripes that extend between the separate adjacent bodies, creating within each such body, in plural stages interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said creating, etching such stripes as a step toward freeing individual bodies.

Claim 16

A method of making on a supporting substrate an integrated, unitary, read/write head/flexure/conductor structure for the reading and writing of information with respect to a relatively moving recording medium, said method comprising preparing, on a surface in such a substrate, an etchable layer, forming on such layer, in plural stags, and by a deposition process, an elongate dielectric flexure body whose with is defined by etchable wall-like stripes that extend on the layer along opposite sides of the body, with such stripes being etchable under the same circumstances that such layer is etchable, creating within such body, in plural stages which are interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said preparing, forming and creating, etching such layer and such stripes to free the body from the substrate.

Claim 17

A method of making on a supporting substrate an integrated, unitary, read/write head/flexure/conductor structure for the reading and writing of information with respect to a relatively moving recording medium, said method comprising preparing, on a surface in such a substrate, an etchable layer, forming on such layer, in plural stags, and by a deposition process, an elongate dielectric flexure body whose with is defined by etchable wall-like stripes that extend on the layer along opposite sides of the body, with such stripes being etchable under the same circumstances that such layer is etchable, creating within such body, in plural stages which are interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said preparing, forming and creating, etching such layer and such stripes to free the body from the substrate.

Claim 22

A method of making on a supporting substrate an integrated, unitary, read/write head/flexure/conductor structure for the reading and writing of information with respect to a relatively moving recording medium, said method comprising preparing on a surface in such a substrate, an etchable layer, forming on such layer, in plural stages, and by a deposition process, an elongate, dielectric flexure body; creating within such body, in plural stages which are interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said preparing, forming and creating, etching such layer to free the body from the substrate.

Claim 23

A method of making on a supporting substrate an integrated, unitary, read/write head/flexure/conductor structure for the reading and writing of information with respect to a relatively moving recording medium, said method comprising preparing on a surface in such a substrate, an etchable layer, forming on such layer, in plural stages, and by a deposition process, an elongate, dielectric flexure body; creating within such body, in plural stages which are interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said preparing, forming and creating, etching such layer to free the body from the substrate.

Claim 25

A method of making on a supporting substrate plural, integrated, unitary read/write head/flexure/conductor structures, each for the reading and writing of information with respect to a relatively moving recoding medium, said method comprising preparing, on such a substrate, an etchable layer, forming on such layer, in plural stages, and by a deposition process, plural, side-by-side adjacent, elongate, dielectric flexure bodies, one set of sides in which rests on such layer, and whose respective widths are defined by etchable, wall-like stripes that extend between and separate adjacent bodies, creating within each such body, in plural stages interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said preparing, forming and creating, etching such layer and such stripes to free individual bodies from the substrate.

Claim 26

A method of making on a supporting substrate plural, integrated, unitary read/write head/flexure/conductor structures, each for the reading and writing of information with respect to a relatively moving recoding medium, said method comprising preparing, on such a substrate, an etchable layer, forming on such layer, in plural stages, and by a deposition process, plural, side-by-side adjacent, elongate, dielectric flexure bodies, one set of sides in which rests on such layer, and whose respective widths are defined by etchable, wall-like stripes that extend between and separate adjacent bodies, creating within each such body, in plural stages interspersed with the forming stages, and also by a deposition process, magnetic read/write pole structure, and electrical coil and conductor means operatively associated with such pole structure, and following said preparing, forming and creating, etching such layer and such stripes to free individual bodies from the substrate.