US5069928A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microwave chemical vapor deposition apparatus and feedback control method
Assignee: Canon Inc
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Filing: 1989-01-27
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Granted: 1991-12-03
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Expires: 2009-01-27
Abstract
Abstract A microwave plasma CVD apparatus includes a hermetically sealed vacuum vessel, a device for evacuating the vacuum vessel, and a device for introducing microwaves through a microwave transmission circuit into the vacuum vessel to produce a plasma within the vacuum vessel. The microwave transmission circuit includes a cavity resonator integrally provided with two matching circuits, one of which is a plunger for varying the length of the cavity resonator and the other of which is a pair of sliding matching irises. Feedback in the apparatus can be controlled by driving one of the matching circuits for rough matching of the microwave impedance and driving the other matching circuit for fine matching of the microwave impedance, so that the calculated ratio of the reflected power to the input power, based on a signal from a power monitor, is reduced to a minimum.
Inventors
- 👤 Hiroshi Echizen
- 👤 Satoshi Takaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:20
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32357; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
96 words
A microwave plasma CVD apparatus comprising: (a) a hermetically sealed vacuum vessel; (b) raw material gas introducing means for introducing a raw material gas into the vacuum vessel; (c) evacuating means for evacuating said vacuum vessel; and (d) microwave introducing means for introducing microwaves through a microwave transmission circuit into said vacuum vessel to generate a plasma within the vacuum vessel; said microwave transmission circuit including a cavity resonator integrally provided with two matching circuits; said matching circuits comprising a plunger for varying the length of said cavity resonator and a pair of sliding matching irises.
Claim 2
Dependent Claim
96 words
A microwave plasma CVD apparatus comprising: (a) a hermetically sealed vacuum vessel; (b) raw material gas introducing means for introducing a raw material gas into the vacuum vessel; (c) evacuating means for evacuating said vacuum vessel; and (d) microwave introducing means for introducing microwaves through a microwave transmission circuit into said vacuum vessel to generate a plasma within the vacuum vessel; said microwave transmission circuit including a cavity resonator integrally provided with two matching circuits; said matching circuits comprising a plunger for varying the length of said cavity resonator and a pair of sliding matching irises.
Claim 3
Dependent Claim
28 words
The microwave plasma CVD apparatus according to claim 1 wherein said cavity resonator is a cylindrical cavity resonator and said sliding matching irises are cylindrical sliding matching irises.
Claim 4
Dependent Claim
28 words
The microwave plasma CVD apparatus according to claim 1, wherein said cavity resonator is a rectangular cavity resonator and said sliding matching irises are flat sliding matching irises.
Claim 5
Dependent Claim
38 words
The microwave plasma CVD apparatus according to claim 1, wherein the microwave introducing means comprises a continuously oscillating microwave oscillator and wherein a microwave transmissive bell jar defining a space for discharge is provided within the cavity resonator.
Claim 6
Dependent Claim
88 words
The microwave plasma CVD apparatus according to claim 1, wherein said microwave transmission circuit includes power monitor means and a feedback control means to sequentially (i) calculate the ratio of the reflected power to the input power on the basis of a signal provided by the power monitor means, (ii) drive one of the matching circuits for rough matching of the microwave input impedance, and (iii) drive the other matching circuit for fine matching of the microwave impedance so that the calculated ratio is reduced to a minimum.
Claim 7
Dependent Claim
76 words
Method for controlling feedback in the apparatus of claim 5 comprising the steps of: (a) calculating the ratio of the reflected power to the input power on the basis of a signal provided by the power monitor means; (b) driving one of the matching circuits for rough matching of the microwave impedance; and (c) driving the other matching circuit for fine matching of the microwave impedance so that the calculated ratio is reduced to a minimum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-02 | 1995-06-03 | 1995-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-02 | 1999-06-03 | 1999-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-02 | 2003-06-03 | 2003-12-03 | $7700.00 | Window Closed / Lapsed |