US5069244A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid source container device
Assignee: Toshiba Corp
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Filing: 1990-12-28
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Granted: 1991-12-03
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Expires: 2010-12-28
Abstract
Abstract A liquid source container device is used for a liquid gas source for a semiconductor manufacturing device. This container device includes a main body for containing a source liquid, to which a gas supply line for transferring the source liquid, and a source liquid delivery line for delivering the liquid are connected. The gas supply line has first and second gas supply valves provided thereon, and the liquid delivery line has first and second liquid delivery valves also provided thereon. A section of the gas supply line which is located between the first and second gas supply valves and a section of the liquid delivery line which is located between the first and second delivery valves are connected with each other by means of a purge line which has a purge valve provided thereon. By operating the purge line, the purge valve, and the four valves, the efficiency of purge-drying procedures carried out before and after transferring the source liquid, is improved, and therefore the container device, as well as the semiconductor manufacturing device can be prevented from being contaminated.
Inventors
- 👤 Shinji Miyazaki
- 👤 Yoshitaka Tsunashima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:22
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C30; C30B; C30B25/00; C30B25/02; C30B25/14; Y; Y10; Y10T; Y10T137/00; Y10T137/2931; Y10T137/3115; Y10T137/3127; Y10T137/4238; Y10T137/4245; Y10T137/4259
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
252 words
A liquid source container device for supplying a source liquid to a material tank, the liquid source container comprising: a main body for containing the source liquid; a gas supply line having a first end connected to said main body for introducing a supply gas to the main body to exert a pressure on the source liquid; a first joint provided at a second end of the gas supply line opposite the first end for coupling the gas supply line to the material tank; first and second gas supply valves provided on the gas supply line between the first and second ends of the gas supply line; a source liquid delivery line having a first end connected to said main body for transferring the source liquid therefrom in response to the pressure exerted on the source liquid; a second joint provided at a second end of the source liquid delivery line opposite the first end for coupling the source liquid delivery line to the material tank; first and second source liquid delivery valves provided on the source liquid delivery line between the first and second ends of the source liquid delivery line; a purge line having a first end connected to the gas supply line between the first and second gas supply valves, and a second end connected to the source liquid delivery line between the first and second source liquid delivery valves; and a purge valve provided on the purge line between the first and second ends of said purge line.
Claim 2
Dependent Claim
252 words
A liquid source container device for supplying a source liquid to a material tank, the liquid source container comprising: a main body for containing the source liquid; a gas supply line having a first end connected to said main body for introducing a supply gas to the main body to exert a pressure on the source liquid; a first joint provided at a second end of the gas supply line opposite the first end for coupling the gas supply line to the material tank; first and second gas supply valves provided on the gas supply line between the first and second ends of the gas supply line; a source liquid delivery line having a first end connected to said main body for transferring the source liquid therefrom in response to the pressure exerted on the source liquid; a second joint provided at a second end of the source liquid delivery line opposite the first end for coupling the source liquid delivery line to the material tank; first and second source liquid delivery valves provided on the source liquid delivery line between the first and second ends of the source liquid delivery line; a purge line having a first end connected to the gas supply line between the first and second gas supply valves, and a second end connected to the source liquid delivery line between the first and second source liquid delivery valves; and a purge valve provided on the purge line between the first and second ends of said purge line.
Claim 3
Dependent Claim
27 words
A container device according to claim 1, further including heating mechanisms provided for each of said gas supply line, said liquid delivery line, and said purge line.
Claim 4
Dependent Claim
23 words
A container device according to claim 1, wherein said container device is used for a liquid gas source for a semiconductor manufacturing device.
Claim 5
Dependent Claim
18 words
A container device according to claim 1, wherein said main body is employed as a constant temperature tank.
Claim 6
Dependent Claim
16 words
A container device according to claim 3, wherein said source liquid is an organic source liquid.
Claim 7
Dependent Claim
26 words
A container device according to claim 5, wherein said source liquid is an organic source liquid containing a doping material such as phosphor, boron, or arsenic.
Claim 8
Dependent Claim
17 words
A container device according to claim 1, wherein said first and second joints are of different types.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-02 | 1995-06-03 | 1995-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-02 | 1999-06-03 | 1999-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-02 | 2003-06-03 | 2003-12-03 | $7700.00 | Window Closed / Lapsed |