US5065118A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electronically tuned VHF/UHF matching network
Assignee: Applied Materials Inc
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Filing: 1990-07-26
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Granted: 1991-11-12
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Expires: 2010-07-26
Abstract
Abstract A matching network matches an output impedance of a source with an input impedance of a load. The matching network includes a plurality of transmission line stubs. Each transmission line stub includes a first transmission line conductor, a second transmission line conductor running parallel to but not in electrical contact with the first transmission line conductor, and ferrite dielectric material between the first transmission line conductor and the second transmission line conductor. A magnetic field is used to vary the relative permeability of the ferrite dielectric material.
Inventors
- 👤 Kenneth S. Collins
- 👤 Craig A. Roderick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 22:31
CPC Classifications
H; H03; H03H; H03H7/00; H03H7/38; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32247; H01J37/32256; H01P; H01P5/00; H01P5/04
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
122 words
A transmission line stub in a matching network coupled between a power supply and electrodes used in a plasma process, the transmission line stub comprising: a first electrically conducting pipe; a second electrically conducting pipe, the second electrically conducting pipe being placed inside the first electrically conducting pipe; ferrite dielectric material between the first electrically conducting pipe and the second electrically conducting pipe, the ferrite dielectric material being in thermal contact with the first electrically conducting pipe and the second electrically conducting pipe; variance means for changing the relative permeability of the ferrite dielectric material; and, cooling means for cooling the second electrically conducting pipe and the ferrite dielectric material, the cooling means including fluid flowing through the second electrically conducting pipe.
Claim 2
Dependent Claim
122 words
A transmission line stub in a matching network coupled between a power supply and electrodes used in a plasma process, the transmission line stub comprising: a first electrically conducting pipe; a second electrically conducting pipe, the second electrically conducting pipe being placed inside the first electrically conducting pipe; ferrite dielectric material between the first electrically conducting pipe and the second electrically conducting pipe, the ferrite dielectric material being in thermal contact with the first electrically conducting pipe and the second electrically conducting pipe; variance means for changing the relative permeability of the ferrite dielectric material; and, cooling means for cooling the second electrically conducting pipe and the ferrite dielectric material, the cooling means including fluid flowing through the second electrically conducting pipe.
Claim 3
Dependent Claim
21 words
A transmission line stub as in claim 1, wherein the fluid flowing though the second electrically conducting pipe is deionized water.
Claim 4
Dependent Claim
48 words
A transmission line stub as in claim 1 wherein the variance means includes a magnetic field generator which comprises: wire wrapped around the first electrically conducting pipe, the second electrically conducting pipe and the ferrite dielectric material; and, a current generating means for generating current through the wire.
Claim 5
Dependent Claim
24 words
A transmission line stub as in claim 3 additionally comprising flow means for flowing fluid between the wire and the first electrically conducting pipe.
Claim 6
Dependent Claim
23 words
A transmission line stub as in claim 4 wherein the fluid flowing between the wire and the first electrically conducting pipe is air.
Claim 7
Dependent Claim
109 words
A matching network with a plurality of transmission line stubs, the matching network being coupled between a power supply and electrodes used in a plasma process, wherein each transmission line stub comprises: a first electrically conducting pipe; a second electrically conducting pipe, the second electrically conducting pipe being placed inside the first electrically conducting pipe; ferrite dielectric material between the first electrically conducting pipe and the second electrically conducting pipe; variance means for changing the relative permeability of the ferrite dielectric material; and, cooling means for cooling the second electrically conducting pipe and the ferrite dielectric material, the cooling means including fluid flowing through the second electrically conducting pipe.
Claim 8
Dependent Claim
109 words
A matching network with a plurality of transmission line stubs, the matching network being coupled between a power supply and electrodes used in a plasma process, wherein each transmission line stub comprises: a first electrically conducting pipe; a second electrically conducting pipe, the second electrically conducting pipe being placed inside the first electrically conducting pipe; ferrite dielectric material between the first electrically conducting pipe and the second electrically conducting pipe; variance means for changing the relative permeability of the ferrite dielectric material; and, cooling means for cooling the second electrically conducting pipe and the ferrite dielectric material, the cooling means including fluid flowing through the second electrically conducting pipe.
Claim 9
Dependent Claim
46 words
A matching network as in claim 6 wherein the variance means includes a magnetic field generator which comprises: wire wrapped around the first electrically conducting pipe, the second electrically conducting pipe and the ferrite dielectric material; and, current generating means for generating current through the wire.
Claim 10
Dependent Claim
70 words
A matching network as in claim 6 wherein wherein a first transmission line stub from the plurality of transmission line stubs is coupled between the power supply and the the electrodes, and wherein a first end of a second transmission line stub from the plurality of transmission line stubs is coupled to the power supply and a second end of the second transmission line stub is coupled to a terminator.
Claim 11
Dependent Claim
39 words
A matching network as in claim 8 wherein the terminator is a short circuit electrically coupling a first electrically conducting pipe of the second transmission line stub to a second electrically conducting pipe of the second transmission line stub.
Claim 12
Dependent Claim
45 words
A matching network as in claim 6 wherein a first transmission line stub from the plurality of transmission line stubs and a second transmission line stub from the plurality of transmission line stubs are coupled in series between the power supply and the the electrodes.
Claim 13
Dependent Claim
96 words
A matching network as in claim 6 wherein a first end of a first transmission line stub from the plurality of transmission line stubs is coupled to a connecting transmission line connecting the power supply to the the electrodes, and a second end of the first transmission line stub is coupled to a first terminator, and wherein a first end of a second transmission line stub from the plurality of transmission line stubs is coupled to the connecting transmission line and a second end of the second transmission line stub is coupled to a second terminator.
Claim 14
Dependent Claim
20 words
A matching network as in claim 6, wherein the fluid flowing through the second electrically conducting pipe is deionized water.
Claim 15
Dependent Claim
28 words
A matching network as in claim 6 wherein each transmission line stub additionally comprises flow means for flowing fluid between the wire and the first electrically conducting pipe.
Claim 16
Dependent Claim
22 words
A matching network as in claim 13 wherein the fluid flowing between the wire and the first electrically conducting pipe is air.
Claim 17
Dependent Claim
43 words
A matching network as in claim 6 wherein second electrically conducting pipes from each of the transmission line stubs in the plurality of transmission line stubs are connected together so as to form a fluid flow path through the second electrically conducting pipes.
Claim 18
Independent Claim
121 words
A method for providing a matching network between a power supply and electrodes used in a plasma process, the matching network including a plurality of transmission line stubs, each transmission line stub including a first electrically conducting pipe and a second electrically conducting pipe, the second electrically conducting pipe being placed inside the first electrically conducting pipe, the method comprising the step of: (a) placing ferrite dielectric material in contact with and between the the first electrically conducting pipe and the second electrically conducting pipe in each transmission line stub; (b) varying the permeability of the ferrite dielectric material; and, (c) cooling the second electrically conducting pipe and the ferrite dielectric material by flowing fluid through the second electrically conducting pipe.
Claim 19
Independent Claim
121 words
A method for providing a matching network between a power supply and electrodes used in a plasma process, the matching network including a plurality of transmission line stubs, each transmission line stub including a first electrically conducting pipe and a second electrically conducting pipe, the second electrically conducting pipe being placed inside the first electrically conducting pipe, the method comprising the step of: (a) placing ferrite dielectric material in contact with and between the the first electrically conducting pipe and the second electrically conducting pipe in each transmission line stub; (b) varying the permeability of the ferrite dielectric material; and, (c) cooling the second electrically conducting pipe and the ferrite dielectric material by flowing fluid through the second electrically conducting pipe.
Claim 20
Dependent Claim
22 words
A method as in claim 16 wherein step (b) is performed by varying a magnetic field placed around each transmission line stub.
Claim 21
Dependent Claim
12 words
A method as in claim 16 wherein the fluid is deionized water.
Claim 22
Dependent Claim
22 words
A method as in claim 16 additionally comprising the step of: (d) flowing fluid over the first electrically conducting pipe for cooling.
Claim 23
Dependent Claim
14 words
A method as in claim 19 wherein in step (d) the fluid is air.
Claim 24
Dependent Claim
44 words
A method as in claim 16 wherein step (c) includes connecting second electrically conducting together pipes from each of the transmission line stubs in the plurality of transmission line stubs so as to form a fluid flow path through the second electrically conducting pipes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-11 | 1995-05-13 | 1995-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-11 | 1999-05-13 | 1999-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-11 | 2003-05-13 | 2003-11-12 | $7700.00 | Window Closed / Lapsed |