US5064683A
Expired / Lapsed
US
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Method for polish planarizing a semiconductor substrate by using a boron nitride polish stop
Assignee: Motorola Solutions Inc
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Filing: 1990-10-29
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Granted: 1991-11-12
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Expires: 2010-10-29
Abstract
Abstract In a polish palnarization process using a polishing apparatus and an abrasive slurry, a boron nitride (BN) polish stop layer (18) is provided to increase the polish selectivity. The BN layer deposited in accordance with the invention has a hexagonal-close-pack crystal orientation and is characterized by chemical inertness and high hardness. The BN layer has a negligible polish removal rate yielding extremely high polish selectivity when used as a polish stop for polishing a number of materials commonly used in the fabrication of semiconductor devices. In accordance with the invention, a substrate (12) is provided having an uneven topography including elevated regions and recessed regions. A BN polish stop layer (18) is desposited to overlie the substrate (12) and a fill material (20, 36) which can be dielectric material or a conductive material, is deposited to overlie the BN polish stop (18) and the recessed regions of the substrate. The fill material is then polished back until the BN polish stop is reached resulting in the formation of a planar surface (38).
Inventors
- 👤 Stephen S. Poon
- 👤 Avgerinos V. Gelatos
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 00:49
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; H10P52/00; H10P52/40; H10P52/403; H10P70/00; H10P70/20; H10P70/23; H10P70/237; H10P70/27; H10P70/277
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
83 words
A method for polish planarizing a substrate comprising: providing a substrate having an uneven topography including elevated regions and recessed regions; providing a boron nitride polish stop on the elevated regions by depositing boron nitride on the substrate using chemical vapor deposition at a deposition temperature no greater than substantially four hundred degrees Centigrade; depositing a fill material to overlie the boron nitride polish stop and the recessed regions; and polishing back the fill material until the boron nitride polish stop is reached.
Claim 2
Independent Claim
83 words
A method for polish planarizing a substrate comprising: providing a substrate having an uneven topography including elevated regions and recessed regions; providing a boron nitride polish stop on the elevated regions by depositing boron nitride on the substrate using chemical vapor deposition at a deposition temperature no greater than substantially four hundred degrees Centigrade; depositing a fill material to overlie the boron nitride polish stop and the recessed regions; and polishing back the fill material until the boron nitride polish stop is reached.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein the step of providing a boron nitride polish stop comprises plasma enhanced chemical vapor deposition of boron nitride.
Claim 4
Dependent Claim
31 words
The method of claim 2 wherein the plasma enhanced chemical vapor deposition is carried out at selected temperature and bias voltage conditions to form boron nitride having a hexagonal-close-pack crystal orientation.
Claim 5
Dependent Claim
18 words
The method of claim 1 wherein the step of polishing comprises polishing with a silica based slurry material.
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein the fill material is selected from the group consisting of silicon oxide, silicon oxide doped with phosphorus and silicon oxide doped with boron and phosphorus.
Claim 7
Dependent Claim
29 words
The method of claim 1 wherein the fill material is selected from the group consisting of polysilicon, tungsten, titanium, molybdenum, cobalt and silicides of tungsten, titanium, molybdenum and cobalt.
Claim 8
Independent Claim
133 words
A method for polishing planarizing a silicon substrate having recessed regions and protruding regions comprising the steps of: depositing a boron nitride polish stop layer to overlie the substrate, the boron nitride polish stop layer having a hexagonal-close-pack crystal orientation; depositing at least one layer of filler material to overlie the boron nitride polish stop layer wherein the at least one layer of filler material has a polishing removal rate substantially greater than the boron nitride polish stop layer; placing the substrate in a polishing apparatus wherein the substrate is brought into contact with a rotating polishing wheel having a polishing pad disposed thereon; applying a silica slurry suspended in potassium hydroxide to the polishing pad; and polishing back the at least one layer of filler material until the polish stop is reached.
Claim 9
Independent Claim
133 words
A method for polishing planarizing a silicon substrate having recessed regions and protruding regions comprising the steps of: depositing a boron nitride polish stop layer to overlie the substrate, the boron nitride polish stop layer having a hexagonal-close-pack crystal orientation; depositing at least one layer of filler material to overlie the boron nitride polish stop layer wherein the at least one layer of filler material has a polishing removal rate substantially greater than the boron nitride polish stop layer; placing the substrate in a polishing apparatus wherein the substrate is brought into contact with a rotating polishing wheel having a polishing pad disposed thereon; applying a silica slurry suspended in potassium hydroxide to the polishing pad; and polishing back the at least one layer of filler material until the polish stop is reached.
Claim 10
Dependent Claim
17 words
The method of claim 7 wherein the boron nitride polish stop layer is deposited by plasma-enhanced-chemical-vapor-deposition (PECVD).
Claim 11
Independent Claim
94 words
A method for forming a polish stop layer in a semiconductor fabrication process comprising: placing a semiconductor substrate in a plasma-enhanced-chemical-vapor-deposition (PECVD) reactor; heating the substrate to about 250° to 400° C.; flowing B 2 H 6 , NH 3 and a carrier gas into the PECVD reactor; applying about 1500 to 2000 Watts of RF power to an anode within the PECVD reactor; maintaining a total pressure of about 1 to 3 Torr within the reactor; and depositing a layer of boron nitride (BN) having a hexagonal-close-pack crystal orientation onto the semiconductor substrate.
Claim 12
Independent Claim
94 words
A method for forming a polish stop layer in a semiconductor fabrication process comprising: placing a semiconductor substrate in a plasma-enhanced-chemical-vapor-deposition (PECVD) reactor; heating the substrate to about 250° to 400° C.; flowing B 2 H 6 , NH 3 and a carrier gas into the PECVD reactor; applying about 1500 to 2000 Watts of RF power to an anode within the PECVD reactor; maintaining a total pressure of about 1 to 3 Torr within the reactor; and depositing a layer of boron nitride (BN) having a hexagonal-close-pack crystal orientation onto the semiconductor substrate.
Claim 13
Dependent Claim
20 words
The method of claim 9 wherein the carrier gas is selected from the group consisting of argon, nitrogen and helium.
Claim 14
Dependent Claim
33 words
The method of claim 9 wherein the flow rate of B 2 H 6 is about 100 to 250 SCCM and the flow rate of NH 3 is about 500 to 1500 SCCM.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-11-11 | 1995-05-13 | 1995-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-11 | 1999-05-13 | 1999-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-11 | 2003-05-13 | 2003-11-12 | $7700.00 | Window Closed / Lapsed |