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US5061871A Expired / Lapsed US ⏱️ 0.0 years remaining

Electrode structure with constant velocity and zero reflectivity

Assignee: RF Monolithics Inc
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Filing: 1991-01-25
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Granted: 1991-10-29
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Expires: 2011-01-25
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Abstract

Abstract An electrode structure for use with a surface acoustic wave device which has the same velocity as the transducers and the gratings forming the device but no reflections and which can be used to vary structure reflectivity.

Inventors

  • 👤 Peter Wright

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 09:50
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02637

Claims Analysis

Total Claims: 29
Claim 1
Independent Claim 93 words
An electrode structure for transducing acoustic waves in a surface acoustic wave device comprising: a piezoelectric substrate; a group of only four spaced electrodes on the substrate for each 2λ distance of electrode structure; each of the electrodes having a width of substantially λ/4; a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes such that the electrode structure has the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections; and a space between adjacent groups of electrodes of substantially 5/8λ to maintain the transduction phase between groups.
Claim 2
Dependent Claim 93 words
An electrode structure for transducing acoustic waves in a surface acoustic wave device comprising: a piezoelectric substrate; a group of only four spaced electrodes on the substrate for each 2λ distance of electrode structure; each of the electrodes having a width of substantially λ/4; a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes such that the electrode structure has the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections; and a space between adjacent groups of electrodes of substantially 5/8λ to maintain the transduction phase between groups.
Claim 3
Dependent Claim 18 words
An electrode structure as in claim 1 wherein the structure is used in a surface acoustic wave transducer.
Claim 4
Dependent Claim 21 words
An electrode structure as in claim 1 wherein the structure is used in a grating in a surface acoustic wave device.
Claim 5
Dependent Claim 101 words
An improved surface acoustic wave transducer structure comprising: a plurality of groups of interdigitated electrodes on a piezoelectric substrate; each group having four spaced electrodes for each 2λ distance of transducer structure; each electrode in each group having a λ/4 width; the groups of electrodes lying on a 3/8λ grid such that adjacent electrodes within each group have a center-to-center spacing of substantially 3/8λ where λ=one wavelength; and each group of electrodes being separated from adjacent groups of electrodes by a 5/8λ space so as to create a transducer having the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections.
Claim 6
Dependent Claim 101 words
An improved surface acoustic wave transducer structure comprising: a plurality of groups of interdigitated electrodes on a piezoelectric substrate; each group having four spaced electrodes for each 2λ distance of transducer structure; each electrode in each group having a λ/4 width; the groups of electrodes lying on a 3/8λ grid such that adjacent electrodes within each group have a center-to-center spacing of substantially 3/8λ where λ=one wavelength; and each group of electrodes being separated from adjacent groups of electrodes by a 5/8λ space so as to create a transducer having the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections.
Claim 7
Dependent Claim 106 words
An improved grating structure for a surface acoustic wave device comprising: a plurality of groups of interdigitated electrodes on a piezoelectric substrate; each group having four spaced electrodes for each 2λ distance of grating structure; each electrode in each group having a λ/4 width; the groups of electrodes lying on a 3/8λ grid such that adjacent electrodes within each group have a center-to-center spacing of substantially 3/8λ where λ=one wavelength; and each group of electrodes being separated from adjacent groups of electrodes by a 5/8λ space so as to create a transducer grating having the velocity of a uniform two electrode-per-wavelength grating and substantially no reflections.
Claim 8
Dependent Claim 106 words
An improved grating structure for a surface acoustic wave device comprising: a plurality of groups of interdigitated electrodes on a piezoelectric substrate; each group having four spaced electrodes for each 2λ distance of grating structure; each electrode in each group having a λ/4 width; the groups of electrodes lying on a 3/8λ grid such that adjacent electrodes within each group have a center-to-center spacing of substantially 3/8λ where λ=one wavelength; and each group of electrodes being separated from adjacent groups of electrodes by a 5/8λ space so as to create a transducer grating having the velocity of a uniform two electrode-per-wavelength grating and substantially no reflections.
Claim 9
Dependent Claim 100 words
A withdrawal weighted electrode structure for a surface acoustic wave device comprising: a piezoelectric substrate having multiple λ/4 electrodes thereon with center-to-center spacing of λ/2; selected 2λ portions of the electrodes each having a group of only four spaced electrodes each having a width of λ/4 and a center-to-center spacing of 3/8λ between adjacent ones of the four spaced electrodes in each group; and a 5/8λ spacing between each group of four electrodes and the nearest adjacent electrode so as to form an electrode structure having a predetermined reflection coefficient, K, and a constant velocity of a uniform two-electrode-per-wavelength structure.
Claim 10
Dependent Claim 100 words
A withdrawal weighted electrode structure for a surface acoustic wave device comprising: a piezoelectric substrate having multiple λ/4 electrodes thereon with center-to-center spacing of λ/2; selected 2λ portions of the electrodes each having a group of only four spaced electrodes each having a width of λ/4 and a center-to-center spacing of 3/8λ between adjacent ones of the four spaced electrodes in each group; and a 5/8λ spacing between each group of four electrodes and the nearest adjacent electrode so as to form an electrode structure having a predetermined reflection coefficient, K, and a constant velocity of a uniform two-electrode-per-wavelength structure.
Claim 11
Dependent Claim 15 words
A structure as in claim 6 wherein the structure is a surface acoustic wave transducer.
Claim 12
Dependent Claim 15 words
A structure as in claim 6 wherein the structure is a surface acoustic wave grating.
Claim 13
Dependent Claim 155 words
A resonator having external gratings separated by spaced transducers with the gratings and the transducers having only two λ/4 electrodes per wavelength, λ, and the same velocity, the gratings having a predetermined reflection coefficient, K, the resonator comprising: a piezoelectric substrate; first and second spaced gratings attached to the substrate; input and output spaced transducer structures attached to the substrate between the first and second gratings for generating standing waves in the substrate; each of the first and second gratings being formed as one continuous electrode structure; a group of only four electrodes in selected wavelengths, 2λ, of the continuous electrode structures for withdrawal weighting the gratings; each electrode in each group having a width of λ/4 and a center-to-center spacing between adjacent electrodes of 3/8λ; and a space of 5/8λ separating adjacent groups of electrodes so as to have substantially no reflectivity in each group and the same velocity as a standard two-electrode-per-wavelength transducer.
Claim 14
Dependent Claim 155 words
A resonator having external gratings separated by spaced transducers with the gratings and the transducers having only two λ/4 electrodes per wavelength, λ, and the same velocity, the gratings having a predetermined reflection coefficient, K, the resonator comprising: a piezoelectric substrate; first and second spaced gratings attached to the substrate; input and output spaced transducer structures attached to the substrate between the first and second gratings for generating standing waves in the substrate; each of the first and second gratings being formed as one continuous electrode structure; a group of only four electrodes in selected wavelengths, 2λ, of the continuous electrode structures for withdrawal weighting the gratings; each electrode in each group having a width of λ/4 and a center-to-center spacing between adjacent electrodes of 3/8λ; and a space of 5/8λ separating adjacent groups of electrodes so as to have substantially no reflectivity in each group and the same velocity as a standard two-electrode-per-wavelength transducer.
Claim 15
Dependent Claim 18 words
A resonator as in claim 9 wherein the resonator has a middle grating to form a coupled resonator.
Claim 16
Dependent Claim 28 words
A resonator as in claim 10 wherein said middle grating has a velocity identical to the velocity of the transducers and the external gratings and has no reflections
Claim 17
Dependent Claim 168 words
A coupled resonator having external gratings separated by spaced transducers and having a center grating, all of which have only two electrodes per wavelength, λ, and all of which have the same velocity, the coupled resonator comprising: a piezoelectric substrate; first and second spaced gratings attached to the substrate; input and output spaced transducer structures attached to the substrate between the first and second gratings for generating standing waves in the substrate; a center grating located between the input and output transducer structures to couple the transducer structures acoustically; the center grating being formed of a plurality of groups of electrode structures; each group of electrodes having only four spaced electrodes for each 2λ distance of electrode structure; each electrode in each group having a width of λ/4 and a center-to-center spacing between adjacent electrodes of 3/8λ; and a space of 5/8λ separating adjacent groups of electrodes so as to have substantially no reflectivity in each group and the same velocity as the transducers and the external gratings.
Claim 18
Dependent Claim 168 words
A coupled resonator having external gratings separated by spaced transducers and having a center grating, all of which have only two electrodes per wavelength, λ, and all of which have the same velocity, the coupled resonator comprising: a piezoelectric substrate; first and second spaced gratings attached to the substrate; input and output spaced transducer structures attached to the substrate between the first and second gratings for generating standing waves in the substrate; a center grating located between the input and output transducer structures to couple the transducer structures acoustically; the center grating being formed of a plurality of groups of electrode structures; each group of electrodes having only four spaced electrodes for each 2λ distance of electrode structure; each electrode in each group having a width of λ/4 and a center-to-center spacing between adjacent electrodes of 3/8λ; and a space of 5/8λ separating adjacent groups of electrodes so as to have substantially no reflectivity in each group and the same velocity as the transducers and the external gratings.
Claim 19
Independent Claim 101 words
A method of forming an electrode structure for use in transducers and gratings in a surface acoustic wave device, the structure having no reflections and a velocity that is constant, the method comprising the steps of: forming groups of only four spaced electrodes on a piezoelectric substrate for each 2λ distance of structure; forming the electrodes with substantially identical λ/4 widths and a center-to-center spacing of 3λ/8 to cause wave cancellation between the electrodes of each group; and forming a space of 5λ/8 between adjacent groups of electrodes so as to create an electrode structure with constant velocity and no reflections.
Claim 20
Independent Claim 101 words
A method of forming an electrode structure for use in transducers and gratings in a surface acoustic wave device, the structure having no reflections and a velocity that is constant, the method comprising the steps of: forming groups of only four spaced electrodes on a piezoelectric substrate for each 2λ distance of structure; forming the electrodes with substantially identical λ/4 widths and a center-to-center spacing of 3λ/8 to cause wave cancellation between the electrodes of each group; and forming a space of 5λ/8 between adjacent groups of electrodes so as to create an electrode structure with constant velocity and no reflections.
Claim 21
Dependent Claim 25 words
A method as in claim 13 further including the step of forming the electrodes with a mask that created with a digitally operated E-beam structure.
Claim 22
Independent Claim 135 words
A method of withdrawal weighting an electrode structure for a surface acoustic wave device having multiple electrodes with only two electrodes per wavelength, λ, and a constant velocity, the method comprising the steps of: forming multiple λ/4 electrodes on a piezoelectric substrate, the electrodes having a center-to-center spacing of λ/2; forming a group of only four spaced electrodes in selected 2λ portions of the electrode structure, each of the electrodes in each group having a width of substantially λ/4 and a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes in each group; and spacing each group of four electrodes and the nearest adjacent electrode with a 5/8λ spacing so as to form an electrode structure having a predetermined reflection coefficient, K, and the constant velocity of a uniform two-electrode-per-wavelength structure.
Claim 23
Independent Claim 135 words
A method of withdrawal weighting an electrode structure for a surface acoustic wave device having multiple electrodes with only two electrodes per wavelength, λ, and a constant velocity, the method comprising the steps of: forming multiple λ/4 electrodes on a piezoelectric substrate, the electrodes having a center-to-center spacing of λ/2; forming a group of only four spaced electrodes in selected 2λ portions of the electrode structure, each of the electrodes in each group having a width of substantially λ/4 and a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes in each group; and spacing each group of four electrodes and the nearest adjacent electrode with a 5/8λ spacing so as to form an electrode structure having a predetermined reflection coefficient, K, and the constant velocity of a uniform two-electrode-per-wavelength structure.
Claim 24
Dependent Claim 140 words
In a resonator structure, a piezoelectric substrate having external gratings with λ/4 electrodes that are separated by spaced transducers and having a constant velocity through the structure, the improvement comprising a center grating between the transducers having multiple electrodes, a reflection coefficient of substantially 0, and a constant velocity that is essentially the same as the velocity of the remainder of the structure; the center grating comprising a group of only four spaced electrodes on the substrate for each 2λ distance of electrode structure forming the center grating; each of the electrodes having a width of substantially λ/4, and a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes; and a spacing of 5/8λ between adjacent groups of electrodes such that the electrode structure has the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections.
Claim 25
Dependent Claim 140 words
In a resonator structure, a piezoelectric substrate having external gratings with λ/4 electrodes that are separated by spaced transducers and having a constant velocity through the structure, the improvement comprising a center grating between the transducers having multiple electrodes, a reflection coefficient of substantially 0, and a constant velocity that is essentially the same as the velocity of the remainder of the structure; the center grating comprising a group of only four spaced electrodes on the substrate for each 2λ distance of electrode structure forming the center grating; each of the electrodes having a width of substantially λ/4, and a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes; and a spacing of 5/8λ between adjacent groups of electrodes such that the electrode structure has the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections.
Claim 26
Dependent Claim 133 words
In a resonator structure having spaced external gratings with λ/4 electrodes on a substrate and a constant velocity through the gratings, the improvement comprising: spaced transducers separating the gratings, each of the transducers having multiple electrodes with a reflection coefficient of substantially 0 and a constant velocity that is essentially the same as the velocity through the external gratings; each of the spaced transducers comprising a group of only four spaced electrodes on the substrate for each 2λ distance of transducer electrode structure; each of the electrodes having a width of substantially λ/4; a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes and a 5/8λ spacing between adjacent groups of electrodes such that the electrode structure has the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections.
Claim 27
Dependent Claim 133 words
In a resonator structure having spaced external gratings with λ/4 electrodes on a substrate and a constant velocity through the gratings, the improvement comprising: spaced transducers separating the gratings, each of the transducers having multiple electrodes with a reflection coefficient of substantially 0 and a constant velocity that is essentially the same as the velocity through the external gratings; each of the spaced transducers comprising a group of only four spaced electrodes on the substrate for each 2λ distance of transducer electrode structure; each of the electrodes having a width of substantially λ/4; a center-to-center spacing of substantially 3/8λ between adjacent ones of the four spaced electrodes and a 5/8λ spacing between adjacent groups of electrodes such that the electrode structure has the velocity of a uniform two-electrode-per-wavelength structure with substantially no reflections.
Claim 28
Dependent Claim 86 words
In a resonator structure having external gratings formed of λ/4 electrodes on a substrate and a constant velocity through the gratings, the improvement comprising: spaced transducers separating the gratings, each of the transducers having a plurality of groups of four spaced electrodes for each 2λ distance of transducer electrode structure with each electrode in each group having a width of λ/4 and being spaced from each other λ/8; and a space of 5/8λ separating the electrodes in each group from the electrodes in an adjacent group.
Claim 29
Dependent Claim 86 words
In a resonator structure having external gratings formed of λ/4 electrodes on a substrate and a constant velocity through the gratings, the improvement comprising: spaced transducers separating the gratings, each of the transducers having a plurality of groups of four spaced electrodes for each 2λ distance of transducer electrode structure with each electrode in each group having a width of λ/4 and being spaced from each other λ/8; and a space of 5/8λ separating the electrodes in each group from the electrodes in an adjacent group.

References Cited (Backward Citations)

US4728912A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-10-28 1995-04-29 1995-10-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-10-28 1999-04-29 1999-10-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-10-28 2003-04-29 2003-10-29 $7700.00 Window Closed / Lapsed

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