US5057664A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for laser processing a target material to provide a uniformly smooth, continuous trim profile
Assignee: Electro Scientific Industries Inc
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Filing: 1989-10-20
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Granted: 1991-10-15
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Expires: 2009-10-20
Abstract
Abstract A diode-pumped laser system (10) incorporates a polarization state control device (12) that provides a trim profile (84) having minimal striations (64) on a target material (42). The striations run generally parallel to the polarization direction of laser output light beam (L) and are diminished whenever the polarization direction is parallel to the laser trimming direction. The striations are substantially eliminated by circularly or randomly polarizing the laser output light beam.
Inventors
- 👤 Joel C. Johnson
- 👤 Ho W. Lo
- 👤 David Rowley
- 👤 Terri J. Irland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:14
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/351
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
111 words
A method of laser trimming a target material to provide a uniform trim profile, comprising: directing a light beam emitted by a compact diode-pumped solid-state laser toward the surface of a thin-film target material; moving the light beam and the target material relative to each other in a direction along the surface of the thin-film target material to form a trimming path; and imparting to the light beam a polarization state with a polarization component of sufficient magnitude in the direction of the trimming path to substantially prevent the formation of a prominent striation pattern along the trimming path of the thin-film target material and thereby provide a uniform trim profile.
Claim 2
Independent Claim
111 words
A method of laser trimming a target material to provide a uniform trim profile, comprising: directing a light beam emitted by a compact diode-pumped solid-state laser toward the surface of a thin-film target material; moving the light beam and the target material relative to each other in a direction along the surface of the thin-film target material to form a trimming path; and imparting to the light beam a polarization state with a polarization component of sufficient magnitude in the direction of the trimming path to substantially prevent the formation of a prominent striation pattern along the trimming path of the thin-film target material and thereby provide a uniform trim profile.
Claim 3
Dependent Claim
16 words
The method of claim 1 in which the light beam is in a circularly polarized state.
Claim 4
Dependent Claim
16 words
The method of claim 1 in which the light beam is in a randomly polarized state.
Claim 5
Dependent Claim
40 words
The method of claim 1 in which the light beam is in an elliptically polarized state defined by major and minor polarization axes, and the polarization component in the direction of the trimming path corresponds to the major polarization axis.
Claim 6
Dependent Claim
41 words
The method of claim 1 in which the polarization state of the light beam is established by a polarization state control device that changes the polarization state of an incident light beam in accordance with the direction of the trimming path.
Claim 7
Dependent Claim
15 words
The method of claim 1 in which the diode-pumped laser is of a YAG type.
Claim 8
Dependent Claim
15 words
The method of claim 1 in which the diode-pumped laser is of a YLF type.
Claim 9
Dependent Claim
18 words
The method of claim 1 in which a quarter-wave plate imparts the polarization state to the light beam.
Claim 10
Dependent Claim
19 words
The method of claim 1 in which a wedged wave plate imparts the polarization state to the light beam.
Claim 11
Dependent Claim
22 words
The method of claim 1 in which the critical dimensions of the light beam are not adversely affected during trim profile formation.
Claim 12
Dependent Claim
16 words
The method of claim 6 in which the light beam is in a circularly polarized state.
Claim 13
Dependent Claim
16 words
The method of claim 6 in which the light beam is in a randomly polarized state.
Claim 14
Dependent Claim
40 words
The method of claim 6 in which the light beam is in an elliptically polarized state defined by major and minor polarization axes, and the polarization component in the direction of the trimming path corresponds to the major polarization axis.
Claim 15
Dependent Claim
18 words
The method of claim 6 in which a quarter-wave plate imparts the polarization state to the light beam.
Claim 16
Dependent Claim
19 words
The method of claim 6 in which a wedged wave plate imparts the polarization state to the light beam.
Claim 17
Dependent Claim
16 words
The method of claim 7 in which the light beam is in a circularly polarized state.
Claim 18
Dependent Claim
16 words
The method of claim 7 in which the light beam is in a randomly polarized state.
Claim 19
Dependent Claim
40 words
The method of claim 7 in which the light beam is in an elliptically polarized state defined by major and minor polarization axes, and the polarization component in the direction of the trimming path corresponds to the major polarization axis.
Claim 20
Dependent Claim
18 words
The method of claim 7 in which a quarter-wave plate imparts the polarization state to the light beam.
Claim 21
Dependent Claim
19 words
The method of claim 7 in which a wedged wave plate imparts the polarization state to the light beam.
References Cited (Backward Citations)
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Cited
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Cited
US4634831B1
Cited
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Cited
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Cited
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-14 | 1995-04-15 | 1995-10-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-14 | 1999-04-15 | 1999-10-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-14 | 2003-04-15 | 2003-10-15 | $7700.00 | Window Closed / Lapsed |