US5057185A
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US
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Triode plasma reactor with phase modulated plasma control
Assignee: Consortium for Surface Processing Inc
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Filing: 1990-09-27
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Granted: 1991-10-15
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Expires: 2010-09-27
Abstract
Abstract A triode plasma reactor having first, second and third electrodes for forming a plasma in a reaction chamber from a reactant gas includes a phase modulated potential generator for generating time varying potentials on the second and third electrodes which are phase modulated versions of one another. The phase modulated versions may also include a fixed phase shift between them. By time varying the phase angle relative to a set phase shift, a new dimension of time varying control for the reactor may be obtained. Phase modulation at frequencies from audio frequencies to radio frequencies may be provided. Phase modulation may be accomplished digitally or in the analogue domain.
Inventors
- 👤 John Henry Thomas, III
- 👤 Bawa Singh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:05
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32174; H01J37/32137; H01J37/32155; H01J37/32165; H01J37/32431; H01J37/32532; H01J37/32587; H01J37/32733; H01J37/32752; H01J37/32761; H01J37/32779
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
84 words
A plasma reactor for processing a sample comprising: a reaction chamber for containing a sample; means for introducing a reactant into said chamber; first, second and third electrodes for forming a plasma in said chamber from the reactant introduced into said chamber, said first electrode being connected to a first potential; and phase modulated potential generating means for generating second and third time varying potentials on said second and third electrodes, respectively, said third potential being a phase modulated version of said second potential.
Claim 2
Dependent Claim
84 words
A plasma reactor for processing a sample comprising: a reaction chamber for containing a sample; means for introducing a reactant into said chamber; first, second and third electrodes for forming a plasma in said chamber from the reactant introduced into said chamber, said first electrode being connected to a first potential; and phase modulated potential generating means for generating second and third time varying potentials on said second and third electrodes, respectively, said third potential being a phase modulated version of said second potential.
Claim 3
Dependent Claim
38 words
The plasma reactor of claim 1 wherein said phase modulated potential generating means comprises a phase shift modulated potential generating means, said third potential being a phase modulated version of a phase shifted version of said second potential.
Claim 4
Dependent Claim
59 words
The plasma reactor of claim 1 wherein said phase modulated potential generating means comprises: time varying potential generating means, for generating said second time varying potential on said second electrode; and phase modulating means, electrically connected to said time varying potential generating means, for generating said phase modulated version of said second time varying potential on said third electrode.
Claim 5
Dependent Claim
66 words
The plasma reactor of claim 2 wherein said phase shift modulated potential generating means comprises: time varying potential generating means for generating said second time varying potential on said second electrode; and phase shift modulating means, electrically connected to said time varying potential generating means, for generating said phase modulated version of a phase shifted version of said second time varying potential on said third electrode.
Claim 6
Dependent Claim
82 words
The plasma reactor of claim 2 wherein said phase shift modulated potential generating means comprises: means for generating a fourth time varying potential; phase shifting means, electrically connected to said fourth time varying potential generating means, for generating a phase shifted version of said fourth time varying potential on said third electrode; and phase modulating means, electrically connected to said fourth time varying potential generating means, for generating a phase modulated version of said fourth time varying potential on said fourth electrode.
Claim 7
Dependent Claim
30 words
The plasma reactor of claim 1 wherein said phase modulated potential generating means is responsive to a time varying signal for generating said phase modulated version of said second potential.
Claim 8
Dependent Claim
53 words
The plasma reactor of claim 2 wherein said phase shift modulated potential generating means is responsive to a fixed signal for generating the phase shifted version of said second potential, and is responsive to a time varying signal for generating the phase modulated version of the phase shifted version of said second potential.
Claim 9
Dependent Claim
62 words
The plasma reactor of claim 1 wherein said reaction chamber includes a wall, wherein said first electrode comprises at least part of the wall of the reaction chamber, wherein said second electrode is mounted in said reaction chamber and electrically insulated therefrom, and wherein said third electrode is mounted inside said reaction chamber and electrically insulated therefrom and from said first electrode.
Claim 10
Dependent Claim
17 words
The plasma reactor of claim 3 wherein said time varying potential generating means comprises a sinusoidal oscillator.
Claim 11
Dependent Claim
16 words
The plasma reactor of claim 9 wherein said sinusoidal oscillator comprises a radio frequency sinusoidal oscillator.
Claim 12
Dependent Claim
17 words
The plasma reactor of claim 4 wherein said time varying potential generating means comprises a sinusoidal oscillator.
Claim 13
Dependent Claim
16 words
The plasma reactor of claim 11 wherein said sinusoidal oscillator comprises a radio frequency sinusoidal oscillator.
Claim 14
Dependent Claim
51 words
The plasma reactor of claim 3 wherein said time varying potential generating means comprises first and second time varying potential generating means, said first time varying potential means being electrically connected to said second electrode, and said second time varying potential generating means being electrically connected to said phase modulating means.
Claim 15
Dependent Claim
21 words
The plasma reactor of claim 13 wherein said first and second time varying potential generating means are synchronized to one another.
Claim 16
Dependent Claim
52 words
The plasma reactor of claim 4 wherein said time varying potential generating means comprises first and second time varying potential generating means, said first time varying potential generating means being electrically connected to said second electrode, and said second time varying potential generating means being electrically connected to said phase modulating means.
Claim 17
Dependent Claim
21 words
The plasma reactor of claim 15 wherein said first and second time varying potential generating means are synchronized to one another.
Claim 18
Dependent Claim
18 words
The plasma reactor of claim 1 further comprising means for generating a magnetic field in said reaction chamber.
Claim 19
Dependent Claim
72 words
The plasma reactor of claim 1 wherein said third electrode comprises a plurality of third electrodes and wherein said phase modulated potential generating means generates a second time varying potential on said second electrode and a respective one of a plurality of third time varying potentials on a respective one of said plurality of third electrodes, each of said third time varying potentials being a phase modulated version of said second potential.
Claim 20
Dependent Claim
33 words
The plasma reactor of claim 18 further comprising a controller, electrically connected to said phase modulated potential generating means, for independently controlling the phase modulation of each of said third time varying potentials.
Claim 21
Independent Claim
75 words
A method of processing a sample in a plasma reactor including first and second electrodes in a reaction chamber, comprising the steps of: introducing a reactant into the reaction chamber; generating first and second time varying potentials, with the second time varying potential being a phase modulated version of the first time varying potential; applying the first time varying potential to the first electrode; and applying the second time varying potential to the second electrode.
Claim 22
Independent Claim
75 words
A method of processing a sample in a plasma reactor including first and second electrodes in a reaction chamber, comprising the steps of: introducing a reactant into the reaction chamber; generating first and second time varying potentials, with the second time varying potential being a phase modulated version of the first time varying potential; applying the first time varying potential to the first electrode; and applying the second time varying potential to the second electrode.
Claim 23
Dependent Claim
38 words
The method of claim 20 wherein said generating step comprises the step of: generating first and second time varying potentials, with the second time varying potential being a phase shift modulated version of the first time varying potential.
Claim 24
Dependent Claim
34 words
The method of claim 20 wherein said generating step comprises the steps of: generating the first time varying potential; and phase modulating the first time varying potential to generate the second time varying potential.
Claim 25
Dependent Claim
48 words
The method of claim 21 wherein said generating step comprises the steps of: generating the first time varying potential; shifting the phase of the first time varying potential by a predetermined phase shift; and modulating the phase shifted time varying potential to generate the second time varying potential.
Claim 26
Dependent Claim
55 words
The method of claim 21 wherein said generating step comprises the steps of: generating a third time varying potential; shifting the phase of the third time varying potential by a predetermined phase shift to generate the first time varying potential; and phase modulating the third time varying potential to generate the second time varying potential.
Claim 27
Dependent Claim
84 words
The method of claim 20 adapted for use with a plasma reactor including a plurality of second electrodes; wherein said generating step comprises the step of generating a first and a plurality of second time varying potentials, with each of the second time varying potentials being a phase modulated version of the first time varying potential; and wherein the second applying step comprises the step of applying a respective one of the second time varying potentials to a respective one of the second electrodes.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-14 | 1995-04-15 | 1995-10-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-14 | 1999-04-15 | 1999-10-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-14 | 2003-04-15 | 2003-10-15 | $7700.00 | Window Closed / Lapsed |