Patent US733757A successfully refreshed from Google Patents.
US5052884A
Expired / Lapsed
US
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Transferring device for semiconductor wafers
Assignee: TOKYO AIRCRAFT INSTRUMENT Co Ltd A CORP OF JAPANESE
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Filing: 1989-10-13
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Granted: 1991-10-01
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Expires: 2009-10-13
Abstract
Abstract Transferring device for a semiconductor wafer or like part includes a rotatable carrying arm rotatably for carrying a semiconductor wafer or part from its initial position and through a first angle. The rotatable carrying arm has a holding portion for a wafer or part, and a cam follower portion. A motor rotates the rotatable carrying arm through an angle slightly greater than the first angle slightly past a desired position for the wafer. Then, an eccentric cam returns the carrying arm through a second, incremental angle, for bringing the carrying arm, and, hence, the wafer held thereby, to the desired position.
Inventors
- 👤 Kazufumi Igari
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:46
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7602; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
169 words
A transferring device for moving a semiconductor wafer from a first location to a second location, comprising: a rotatable carrying arm having an axis of rotation, said carrying arm including a first holding member for holding the semiconductor wafer; a first cam follower member disposed on said rotatable carrying arm; drive means coupled to said rotatable carrying arm, said drive means rotating said carrying arm in a first direction past a predetermined position and through an incremental angle; an eccentric cam having a first position in which it is disengaged from said cam follower member and a second position in which it is engaged with said cam follower member; and cam driver means coupled to said eccentric cam for translating and rotating said eccentric cam from said first position to said second position, the rotation of said eccentric cam rotating said carrying arm in a second direction opposite to said first direction through said incremental angle, and said cam driver means returning said eccentric cam to said first position.
Claim 2
Dependent Claim
169 words
A transferring device for moving a semiconductor wafer from a first location to a second location, comprising: a rotatable carrying arm having an axis of rotation, said carrying arm including a first holding member for holding the semiconductor wafer; a first cam follower member disposed on said rotatable carrying arm; drive means coupled to said rotatable carrying arm, said drive means rotating said carrying arm in a first direction past a predetermined position and through an incremental angle; an eccentric cam having a first position in which it is disengaged from said cam follower member and a second position in which it is engaged with said cam follower member; and cam driver means coupled to said eccentric cam for translating and rotating said eccentric cam from said first position to said second position, the rotation of said eccentric cam rotating said carrying arm in a second direction opposite to said first direction through said incremental angle, and said cam driver means returning said eccentric cam to said first position.
Claim 3
Dependent Claim
16 words
A transferring device as defined in claim 1, wherein said drive means comprises a pulse motor.
Claim 4
Dependent Claim
17 words
A transferring device as defined in claim 1, wherein said cam driver means comprises an air cylinder.
Claim 5
Dependent Claim
25 words
A transferring device as defined in claim 1, further comprising a second holding member and a second cam follower member disposed on said carrying arm.
Claim 6
Dependent Claim
26 words
A transferring device as defined in claim 4, wherein said first and second holding members and said first and second cam follower members are symmetrically disposed.
Claim 7
Dependent Claim
37 words
A transferring device as defined in claim 4, wherein said first and second holding members and said first and second cam follower members are symmetrically disposed relative to said axis of rotation of said rotatable carrying arm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-30 | 1995-04-01 | 1995-10-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-30 | 1999-04-01 | 1999-10-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-30 | 2003-04-01 | 2003-10-01 | $7700.00 | Window Closed / Lapsed |