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US5050534A Expired / Lapsed US ⏱️ 0.0 years remaining

Mobile injector system

Assignee: Imtech Inc
•
Filing: 1989-08-03
•
Granted: 1991-09-24
•
Expires: 2009-08-03
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Abstract

Abstract A mobile injector system with a CVD door assembly including flexible tubing secured to the door, a hole for accommodating a SiC or like paddle, and an injector clamp securing the injector tubes to the paddle. The CVD door assembly mates to a gas ring. A gas inlet channel extends through the CVD door assembly to communicate with the flexible tubing and with the injector tubes. The gas ring secures to a back ring and over and about an annular flange on the end of a process tube. Gas inlet channels extend through the gas ring to connect to gas inlet couplings to communicate with gas inlet ports in the CVD door. The injector tubes are in a predetermined geometrical proximity to the paddle, and provide for repeatability of processes for the semiconductor wafers or substrates.

Inventors

  • 👤 Cleon R. Yates

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 14:10
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45578

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 79 words
Gas ring assembly for engaging about an end of a process tube for semiconductor processes, comprising: a. gas ring for engaging against and between a front end flange of a process tube and a CVD door, the gas ring including gas inlet means for engaging with a gas inlet channel of a CVD door; b. back ring for engaging against a back end flange of a process tube; and, c. means securing said gas ring to said back ring.
Claim 2
Dependent Claim 79 words
Gas ring assembly for engaging about an end of a process tube for semiconductor processes, comprising: a. gas ring for engaging against and between a front end flange of a process tube and a CVD door, the gas ring including gas inlet means for engaging with a gas inlet channel of a CVD door; b. back ring for engaging against a back end flange of a process tube; and, c. means securing said gas ring to said back ring.
Claim 3
Dependent Claim 16 words
Gas ring assembly of claim 1 including O-ring means between said gas ring and said flange.
Claim 4
Dependent Claim 16 words
Gas ring assembly of claim 1 including O-ring means between said back ring and said flange.
Claim 5
Dependent Claim 98 words
In combination, a CVD door assembly and a gas ring assembly, said combination comprising: a. a CVD door assembly including a paddle hole, and at least one gas inlet port extending through said door; and, b. a gas ring assembly for engaging against and between a front end flange of a process tube and a CVD door, the gas ring including gas inlet means for engaging with a gas inlet channel of a CVD door, back ring for engaging against a back end flange of a process tube, and means securing said gas ring to said back ring.
Claim 6
Dependent Claim 98 words
In combination, a CVD door assembly and a gas ring assembly, said combination comprising: a. a CVD door assembly including a paddle hole, and at least one gas inlet port extending through said door; and, b. a gas ring assembly for engaging against and between a front end flange of a process tube and a CVD door, the gas ring including gas inlet means for engaging with a gas inlet channel of a CVD door, back ring for engaging against a back end flange of a process tube, and means securing said gas ring to said back ring.

References Cited (Backward Citations)

US4466381A Cited
US4751895A Cited
US4793283A Cited
US4911638A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-09-23 1995-03-25 1995-09-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-09-23 1999-03-25 1999-09-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-09-23 2003-03-25 2003-09-24 $7700.00 Window Closed / Lapsed

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