US5050137A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ultrasonic probe
Assignee: Hitachi Construction Machinery Co Ltd
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Filing: 1990-05-14
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Granted: 1991-09-17
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Expires: 2010-05-14
Abstract
Abstract An ultrasonic probe comprising an acoustic lens (20) having a concave lens surface (21) formed on one side of a lens body, and a piezoelectric transducer (23) disposed on the other side of the acoustic lens, ultrasonic waves generated by applying voltage to the piezoelectric transducer being focused through the lens surface to detect the reflected waves of the ultrasonic waves from a sample (26) by the piezoelectric transducer for obtaining information about the surface or interior of the sample. The lens surface (21) of the acoustic lens (20) is defined by an etch profile (15) formed by etching a substrate material (11) which makes up the lens body.
Inventors
- 👤 Kazuo Sato
- 👤 Hiroshi Kanda
- 👤 Shigeo Kato
- 👤 Kuninori Imai
- 👤 Takeji Shiokawa
- 👤 Shinji Tanaka
- 👤 Isao Ishikawa
- 👤 Harumasa Onozato
- 👤 Hisayoshi Hashimoto
- 👤 Morio Tamura
- 👤 Kazuyoshi Hatano
- 👤 Fujio Sato
- 👤 Ken Ichiryuu
- 👤 Kiyoshi Tanaka
- 👤 Takao Kawanuma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:27
CPC Classifications
G; G10; G10K; G10K11/00; G10K11/18; G10K11/26; G10K11/30; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
71 words
A lens comprising: a lens body of substrate material having an outer surface that is concave on one side of said lens body, said concave lens surface of said lens body being an etch profile on said substrate material of said lens body, wherein said substrate material is a single-crystal silicon, and further including a thin film of silicon dioxide uniformly coated on the outer surface of said concave lens surface.
Claim 2
Dependent Claim
71 words
A lens comprising: a lens body of substrate material having an outer surface that is concave on one side of said lens body, said concave lens surface of said lens body being an etch profile on said substrate material of said lens body, wherein said substrate material is a single-crystal silicon, and further including a thin film of silicon dioxide uniformly coated on the outer surface of said concave lens surface.
Claim 3
Dependent Claim
34 words
The lens according to claim 1, further including a concave border etch profile etched around the outer peripheral portion of said lens surface and merging with said concave lens surface along a sharp edge.
Claim 4
Dependent Claim
30 words
The lens according to claim 1, further including transducer means mounted on said lens body for receiving radiation passing through said concave lens surface and producing a detection output signal.
Claim 5
Dependent Claim
31 words
The lens according to claim 3, wherein said transducer means is a thin film of transducer material coated on the surface of said substrate material opposite from said concave lens surface.
Claim 6
Dependent Claim
42 words
The lens according to claim 3, wherein said transducer means is a thin film of transducer material coated on the surface of said substrate material on the same side of said concave lens surface as and immediately adjacent said concave lens surface.
Claim 7
Dependent Claim
41 words
The lens according to claim 3, further including an integrated electronic circuit formed in said substrate material adjacent said concave lens surface, and including a preamplifier electrically coupled to said transducer means to receive as an input the detection output signal.
Claim 8
Dependent Claim
16 words
A lens as claimed in claim 1, wherein the concave lens surface etch profile is spherical.
Claim 9
Dependent Claim
32 words
A lens as claimed in claim 1, wherein the concave lens surface etch profile is formed by carrying out etching by the use of a mass layer which has a non-circular opening.
Claim 10
Dependent Claim
90 words
A lens as claimed in claim 1, wherein said substrate material is crystalline with different crystal axes; a concave lens surface etch profile of said lens surface has different etch profile radii dependent on the directions of crystal axes of said substrate material; and said concave lens surface etch profile comprises a central portion which has a spherical surface, and a peripheral portion which has a non-spherical surface having a smaller curvature in at least a partial region thereof in a depthwise direction than that of said central spherical surface.
Claim 11
Dependent Claim
32 words
A lens as claimed in claim 1, wherein said lens comprises a plurality of lens surfaces arrayed on said lens body, said plurality of lens surfaces being defined by respective etch profiles.
Claim 12
Dependent Claim
34 words
A lens as claimed in claim 8, wherein said lens further comprises a plurality of said lens surfaces arrayed on said lens body, said plurality of lens surfaces being defined by respective etch profiles.
Claim 13
Dependent Claim
28 words
A lens as claimed in claim 11, wherein said plurality of lens surfaces are outwardly concave and defined respective shapes having respective axes that intersect with each other.
Claim 14
Dependent Claim
28 words
A lens as claimed in claim 12, wherein said plurality of lens surfaces are disposed closely adjacent to each other around an axis defined by said lens body.
Claim 15
Dependent Claim
26 words
A lens as claimed in claim 12, wherein said plurality of lens surfaces are unified with each other around an axis defined by said lens body.
Claim 16
Dependent Claim
29 words
A lens as claimed in claim 1, further including a flat surface on the lens surface periphery of said lens body that is substantially rougher than said lens surface.
Claim 17
Dependent Claim
75 words
A lens, comprising: a lens body of substrate material having a concave lens surface formed on one side of said lens body, said concave lens surface of said lens body being an etch profile on said substrate material of said lens body, wherein said substrate is a silicon wafer; and further including a sheet of silicon, thicker than said silicon wafer, laminated to the surface of said silicon wafer opposite from said concave lens surface.
Claim 18
Dependent Claim
75 words
A lens, comprising: a lens body of substrate material having a concave lens surface formed on one side of said lens body, said concave lens surface of said lens body being an etch profile on said substrate material of said lens body, wherein said substrate is a silicon wafer; and further including a sheet of silicon, thicker than said silicon wafer, laminated to the surface of said silicon wafer opposite from said concave lens surface.
References Cited (Backward Citations)
US3913061A
Cited
EP0032739A1
Cited
JPS56103327A
Cited
US4321696A
Cited
US4349796A
Cited
JPS584197A
Cited
US4641530A
Cited
US4937808A
Cited
US4870632A
Cited
US4782350A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-16 | 1995-03-18 | 1995-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-16 | 1999-03-18 | 1999-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-16 | 2003-03-18 | 2003-09-17 | $7700.00 | Window Closed / Lapsed |