US5048960A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microspectroscope
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1989-06-05
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Granted: 1991-09-17
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Expires: 2009-06-05
Abstract
Abstract A method of and an apparatus for obtaining spectral data and calculating corrected spectral data. The method includes the steps of: obtaining spectral data S'(λ) which is representative of the spectral characteristics of light which is generated by a light source and reflected by an object; substantially concurrently with the step of obtaining the spectral data S'(λ), obtaining spectral data R(λ) which is representative of the spectral characteristics of light which is generated by the light source; and calculating corrected spectral data S(λ) as a function of the spectral data S'(λ) and the spectral data R(λ).
Inventors
- 👤 Takahisa Hayashi
- 👤 Nariaki Fujiwara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:33
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/25; G01N21/27; G01N21/274; G01B; G01B11/00; G01B11/02; G01B11/06; G01J; G01J3/00; G01J3/28; G01J3/42; G01J2003/425; G01J3/2823; G01N2201/00; G01N2201/12; G01N2201/127; G01N2201/12746; G01N2201/12753
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
191 words
A method of obtaining spectral data and calculating corrected spectra data, the method comprising the steps of: obtaining spectral data B'(λ) which is representative of the spectral characteristics of light which is generated by a light source and reflected by a standard sample; substantially concurrently with the step of obtaining the spectral data B'(λ), obtaining spectral data R 0 (λ) which is representative of the spectral characteristics of light which is generated by the light source; after the step of obtaining the spectral data B'(λ), obtaining spectral data S'(λ) which is representative of the spectral characteristics of light which is generated by the light source and reflected by an object; substantially concurrently with the step of obtaining the spectral data S'(λ), obtaining spectral data R(λ), which is representative of the spectral characteristics of light which is generated by the light source; and λcalculating corrected spectral data S(λ) as a function of the spectra data S'(λ), the spectral data R(λ), the spectral data B'(λ), the spectral data R 0 (λ) and known spectral data B(λ) corresponding to the standard sample, the corrected spectral data S(λ) being calculated as a function of: ##EQU4##
Claim 2
Independent Claim
191 words
A method of obtaining spectral data and calculating corrected spectra data, the method comprising the steps of: obtaining spectral data B'(λ) which is representative of the spectral characteristics of light which is generated by a light source and reflected by a standard sample; substantially concurrently with the step of obtaining the spectral data B'(λ), obtaining spectral data R 0 (λ) which is representative of the spectral characteristics of light which is generated by the light source; after the step of obtaining the spectral data B'(λ), obtaining spectral data S'(λ) which is representative of the spectral characteristics of light which is generated by the light source and reflected by an object; substantially concurrently with the step of obtaining the spectral data S'(λ), obtaining spectral data R(λ), which is representative of the spectral characteristics of light which is generated by the light source; and λcalculating corrected spectral data S(λ) as a function of the spectra data S'(λ), the spectral data R(λ), the spectral data B'(λ), the spectral data R 0 (λ) and known spectral data B(λ) corresponding to the standard sample, the corrected spectral data S(λ) being calculated as a function of: ##EQU4##
Claim 3
Dependent Claim
20 words
The method of claim 1, further comprising computing the thickness of the object based on the corrected spectral data S(λ).
Claim 4
Dependent Claim
251 words
An optical system, comprising: (A) a light source; (B) a sample holder; (C) reflecting means; (D) a spectroscopic unit; (E) a beam splitter for: (1) transmitting light from said light source toward said sample holder and transmitting light reflected from said sample holder toward said spectroscopic unit so as to obtain spectral data which is representative of light reflected from said sample holder; and (2) transmitting light from said light source toward said reflecting means and transmitting light reflected by said reflecting means toward said spectroscopic unit so as to obtain spectral data which is representative of light from said light source; (F) a first shutter for selectively permitting and preventing the transmission of light between said beam splitter and said sample holder; (G) a second shutter for selectively (1) permitting the transmission of light between said beam splitter and said reflecting means when said first shutter is preventing the transmission of light between said beam splitter and said sample holder and (2) preventing the transmission of light between said beam splitter and said reflecting means when said first shutter is permitting the transmission of light between said beam splitter and said sample holder; and (H) storage means for storing spectral data, and means for calculating corrected spectral data as a function of (1) spectral data stored in said storage means and (2) spectral data which is representative of the spectral characteristics of light which is generated by said light source and reflected by an object located at said sample holder.
Claim 5
Dependent Claim
251 words
An optical system, comprising: (A) a light source; (B) a sample holder; (C) reflecting means; (D) a spectroscopic unit; (E) a beam splitter for: (1) transmitting light from said light source toward said sample holder and transmitting light reflected from said sample holder toward said spectroscopic unit so as to obtain spectral data which is representative of light reflected from said sample holder; and (2) transmitting light from said light source toward said reflecting means and transmitting light reflected by said reflecting means toward said spectroscopic unit so as to obtain spectral data which is representative of light from said light source; (F) a first shutter for selectively permitting and preventing the transmission of light between said beam splitter and said sample holder; (G) a second shutter for selectively (1) permitting the transmission of light between said beam splitter and said reflecting means when said first shutter is preventing the transmission of light between said beam splitter and said sample holder and (2) preventing the transmission of light between said beam splitter and said reflecting means when said first shutter is permitting the transmission of light between said beam splitter and said sample holder; and (H) storage means for storing spectral data, and means for calculating corrected spectral data as a function of (1) spectral data stored in said storage means and (2) spectral data which is representative of the spectral characteristics of light which is generated by said light source and reflected by an object located at said sample holder.
Claim 6
Dependent Claim
197 words
An optical system, comprising: (A) a light source; (B) a sample holder; (C) reflecting means; (D) a spectroscopic unit; (E) a beam splitter for: (1) transmitting light from said light source toward said sample holder and transmitting light reflected from said sample holder toward said spectroscopic unit so as to obtain spectral data which is representative of light reflected from said sample holder; and (2) transmitting light from said light source toward said reflecting means and transmitting light reflected by said reflecting means toward said spectroscopic unit so as to obtain spectral data which is representative of light from said light source; and (F) storage means for storing spectral data, and means for calculating corrected spectral data as a function of (1) spectral data stored in said storage means and (2) spectral data which is representative of the spectral characteristics of light which is generated by said light source and reflected by an object located at said sample holder; wherein said reflecting means is a mirror, said mirror being selectively (1) positionable between said beam splitter and said sample holder and (2) removable to permit the transmission of light between said beam splitter and said sample holder.
Claim 7
Dependent Claim
197 words
An optical system, comprising: (A) a light source; (B) a sample holder; (C) reflecting means; (D) a spectroscopic unit; (E) a beam splitter for: (1) transmitting light from said light source toward said sample holder and transmitting light reflected from said sample holder toward said spectroscopic unit so as to obtain spectral data which is representative of light reflected from said sample holder; and (2) transmitting light from said light source toward said reflecting means and transmitting light reflected by said reflecting means toward said spectroscopic unit so as to obtain spectral data which is representative of light from said light source; and (F) storage means for storing spectral data, and means for calculating corrected spectral data as a function of (1) spectral data stored in said storage means and (2) spectral data which is representative of the spectral characteristics of light which is generated by said light source and reflected by an object located at said sample holder; wherein said reflecting means is a mirror, said mirror being selectively (1) positionable between said beam splitter and said sample holder and (2) removable to permit the transmission of light between said beam splitter and said sample holder.
Claim 8
Dependent Claim
241 words
An optical system, comprising: (A) a light source; (B) a sample holder; (C) reflecting means; (D) a spectroscopic unit; (E) a beam splitter for: (1) transmitting light from said light source toward said sample holder and transmitting light reflected from said sample holder toward said spectroscopic unit so as to obtain spectral data which is representative of light reflected from said sample holder; and (2) transmitting light from said light source toward said reflecting means and transmitting light reflected by said reflecting means toward said spectroscopic unit so as to obtain spectral data which is representative of light from said light source; (F) a first filter for restricting the transmission of light between said beam splitter and said sample holder; (G) a second filter for restricting the transmission of light between said beam splitter and said reflecting means, said second filter being arranged with respect to said first filter such that said spectroscopic means is able to simultaneously obtain said spectral data which is representative of light from said sample holder and said spectral data which is representative of light from said reflecting means; and (H) storage means for storing spectral data, and means for calculating corrected spectral data as a function of (1) spectral data stored in said storage means and (2) spectral data which is representative of the spectral characteristics of light which is generated by said light source and reflected by an object located at said sample holder.
Claim 9
Dependent Claim
241 words
An optical system, comprising: (A) a light source; (B) a sample holder; (C) reflecting means; (D) a spectroscopic unit; (E) a beam splitter for: (1) transmitting light from said light source toward said sample holder and transmitting light reflected from said sample holder toward said spectroscopic unit so as to obtain spectral data which is representative of light reflected from said sample holder; and (2) transmitting light from said light source toward said reflecting means and transmitting light reflected by said reflecting means toward said spectroscopic unit so as to obtain spectral data which is representative of light from said light source; (F) a first filter for restricting the transmission of light between said beam splitter and said sample holder; (G) a second filter for restricting the transmission of light between said beam splitter and said reflecting means, said second filter being arranged with respect to said first filter such that said spectroscopic means is able to simultaneously obtain said spectral data which is representative of light from said sample holder and said spectral data which is representative of light from said reflecting means; and (H) storage means for storing spectral data, and means for calculating corrected spectral data as a function of (1) spectral data stored in said storage means and (2) spectral data which is representative of the spectral characteristics of light which is generated by said light source and reflected by an object located at said sample holder.
Claim 10
Dependent Claim
42 words
The system of claim 5, further comprising a first objective lens located between said beam splitter and said sample holder and a second objective lens located between said beam splitter and said standard sample, said objective lenses having substantially identical optical characteristics.
References Cited (Backward Citations)
US4802763A
Cited
US4844617A
Cited
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