Gas laser device

Claim 2

A gas laser device, comprising: a discharge space in which a laser gas is excited by electric discharge, said discharge space being in the form of a slab whose section perpendicular to a laser optical axis has a longer side and a shorter side; and laser resonator mirrors disposed at both ends of said discharge space, respectively, said laser resonant mirrors constituting a negative branch unstable resonator in a first dimension of said longer side of said section of said discharge space, wherein an output laser beam is obtained at one end of said longer side of said section of said discharge space.

Claim 3

A gas laser device as claimed in claim 1, wherein said resonant mirrors constitute an optical waveguide resonator in a second dimension of said shorter side of said section of said discharge space.

Claim 4

A gas laser device as claimed in claim 1, wherein said resonant mirrors constitute an open resonator in a second dimension of said shorter side of said section of said discharge space.

Claim 5

A gas laser device, comprising: a microwave circuit for producing plasma with a microwave to perform laser excitation; a conductor wall forming a part of said microwave circuit; a dielectric member confronting said conductor wall; a discharge space formed with a groove, said groove being formed in said conductor wall and being located between said conductor wall and said dielectric member, a section of said discharge space perpendicular to a laser beam axis having a longer side and a shorter side and said discharge space being filled with a laser gas from which said plasma is produced by said microwave circuit forming a microwave mode having an electric field component perpendicular to a boundary between said dielectric member and said plasm; and a total reflection mirror and an exit total reflection mirror constituting a laser resonator; wherein an unstable resonator is constituted with said total reflection mirror and said exit total reflection mirror in a first dimention of said longer side of said section of said discharge space; an output laser beam is obtained at one end of said longer side at said exit total reflection mirror side; and a distance between an outermost part of a laser mode region formed with said total reflection mirror and said exit total reflection mirror and an end of said exit total reflection mirror is made substantially equal to a dimension of said shorter side of said section of said discharge space.

Claim 6

A gas laser device, comprising: a microwave circuit for producing plasma with a microwave to perform laser excitation; a conductor wall forming a part of said microwave circuit; a dielectric member confronting said conductor wall; a discharge space formed with a groove, said groove being formed in said conductor wall and being located between said conductor wall and said dielectric member, a section of said discharge space perpendicular to a laser beam axis having a longer side and a shorter side and said discharge space being filled with a laser gas from which said plasma is produced by said microwave circuit forming a microwave mode having an electric field component perpendicular to a boundary between said dielectric member and said plasm; and a total reflection mirror and an exit total reflection mirror constituting a laser resonator; wherein an unstable resonator is constituted with said total reflection mirror and said exit total reflection mirror in a first dimention of said longer side of said section of said discharge space; an output laser beam is obtained at one end of said longer side at said exit total reflection mirror side; and a distance between an outermost part of a laser mode region formed with said total reflection mirror and said exit total reflection mirror and an end of said exit total reflection mirror is made substantially equal to a dimension of said shorter side of said section of said discharge space.

Claim 7

A gas laser device as claimed in claim 4, wherein said laser mode region of said unstable resonator is spaced at least 1 mm from a wall of said groove which forms a shorter side thereof.

Claim 8

A gas laser device as claimed in claim 4, wherein a ridge is formed on a portion of said conductor wall confronted through said dielectric member with said groove, and a width of at least an end portion of said ridge is made smaller than a width of said groove so that a region for producing said plasma is substantially coincided with said laser mode region formed with said total reflection mirror and said exit total reflection mirror.