US5047645A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film infrared laser detector and monitor
Assignee: Royal Institution for the Advancement of Learning
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Filing: 1989-07-07
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Granted: 1991-09-10
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Expires: 2009-07-07
Abstract
Abstract A detecting or monitoring device for laser radiation is able to oeprate at room temperature and employs a thin film of semi-conductor material of non-centrosymmetric lattice structure having a substantial crystallographic texture; thin film may suitably be tellurium in a film thickness of 1 to 100 mu m, supported on a substrate of single crystal silicon.
Inventors
- 👤 Arshavir A. Gundjian
- 👤 Massoud Badaye
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:51
CPC Classifications
H; H10; H10F; H10F30/00; H10F30/10; G; G01; G01J; G01J1/00; G01J1/42; G01J1/4257; G01J5/00; G01J5/10; G01J5/28; H10F77/00; H10F77/10; H10F77/12; H10F77/121
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
102 words
A method of detecting pulsed laser radiation comprising directing laser radiation in pulse form into a thin film of semi-conductor material of non-centrosymmetric lattice structure having a substantial crystallographic texture, said thin film having a thickness of 1 to 50 μm, inducing by optical rectification an electric current within said thin film responsive to the pulse form radiation, conducting said electric current from said film through a pair of electrical contact elements in direct ohmic contact with said thin films, developing an electrical signal responsive to said electric current, and determining said electrical signal as a measure of characteristics of the radiation.
Claim 2
Independent Claim
102 words
A method of detecting pulsed laser radiation comprising directing laser radiation in pulse form into a thin film of semi-conductor material of non-centrosymmetric lattice structure having a substantial crystallographic texture, said thin film having a thickness of 1 to 50 μm, inducing by optical rectification an electric current within said thin film responsive to the pulse form radiation, conducting said electric current from said film through a pair of electrical contact elements in direct ohmic contact with said thin films, developing an electrical signal responsive to said electric current, and determining said electrical signal as a measure of characteristics of the radiation.
Claim 3
Dependent Claim
23 words
A method according to claim 1, wherein said thin film is a film of tellurium having a thickness of 2 to 7 μm.
Claim 4
Dependent Claim
28 words
A method according to claim 1, said laser radiation being CO 2 laser radiation and said film being formed on a (100) plane of a single crystal silicon.
Claim 5
Dependent Claim
34 words
A method according to claim 1, said laser radiation being from Nd:YAG or any other higher power pulsed laser, and said film being formed on a crystallographic face of a single crystal silicon wafer.
Claim 6
Dependent Claim
36 words
A method according to claim 1, said laser radiation being from Nd:YAG or any other high power pulsed laser, and said film being formed on a crystallographic face of a single crystal or highly crystalline substrate.
Claim 7
Dependent Claim
77 words
A detection device for pulsed laser radiation comprising a thin film of semi-conductor material having a substantial crystallographic texture, on a surface of a substrate, said film being electrically isolated from said substrate, said thin film having a thickness of 1 to 50 μm, and a pair of electrical contact elements in direct ohmic contact with said thin film effective to conduct from said thin film an electric current induced within said thin film by optical rectification.
Claim 8
Dependent Claim
77 words
A detection device for pulsed laser radiation comprising a thin film of semi-conductor material having a substantial crystallographic texture, on a surface of a substrate, said film being electrically isolated from said substrate, said thin film having a thickness of 1 to 50 μm, and a pair of electrical contact elements in direct ohmic contact with said thin film effective to conduct from said thin film an electric current induced within said thin film by optical rectification.
Claim 9
Dependent Claim
17 words
A device according to claim 6, wherein said film is of tellurium and said substrate is silicon.
Claim 10
Independent Claim
83 words
An apparatus for detecting pulsed laser radiation comprising: a thin film of semi-conductor material having a substantial crystallographic texture, said material being of non-centrosymmetric lattice structure, said thin film having a thickness of 1 to 50 μm, a pair of electrical contact elements in direct ohmic electrical contact with said film, and means for determining an electrical signal induced by optical rectification in said thin film by pulsed laser radiation, said means being in direct ohmic electrical contact with said electrical contact elements.
Claim 11
Independent Claim
83 words
An apparatus for detecting pulsed laser radiation comprising: a thin film of semi-conductor material having a substantial crystallographic texture, said material being of non-centrosymmetric lattice structure, said thin film having a thickness of 1 to 50 μm, a pair of electrical contact elements in direct ohmic electrical contact with said film, and means for determining an electrical signal induced by optical rectification in said thin film by pulsed laser radiation, said means being in direct ohmic electrical contact with said electrical contact elements.
Claim 12
Dependent Claim
12 words
An apparatus according to claim 8, wherein said means comprises an oscilloscope.
Claim 13
Dependent Claim
21 words
An apparatus according to claim 9, further including an impedance transforming means electrically connected between said contact elements and said oscilloscope.
Claim 14
Dependent Claim
30 words
An apparatus according to claim 10, wherein said thin film is a film having a thickness of 2 to 7 μm, said film being supported on a single crystal silicon.
Claim 15
Independent Claim
118 words
A method of detecting pulsed laser radiation comprising directing laser radiation in pulse form into a thin film of tellurium semi-conductor material of non-centrosymmetric lattice structure having a substantial crystallographic texture, said thin film having a thickness of 1 to 100 μm and being formed on a (111) plane crystallographic face of a single crystal silicon wafer, inducing by optical rectification an electric current within said thin film responsive to the pulse form radiation, conducting said electric current from said film through a pair of electrical contact elements in direct ohmic contact with said thin film, developing an electrical signal responsive to said electric current, and determining said electrical signal as a measure of characteristics of the radiation.
Claim 16
Independent Claim
118 words
A method of detecting pulsed laser radiation comprising directing laser radiation in pulse form into a thin film of tellurium semi-conductor material of non-centrosymmetric lattice structure having a substantial crystallographic texture, said thin film having a thickness of 1 to 100 μm and being formed on a (111) plane crystallographic face of a single crystal silicon wafer, inducing by optical rectification an electric current within said thin film responsive to the pulse form radiation, conducting said electric current from said film through a pair of electrical contact elements in direct ohmic contact with said thin film, developing an electrical signal responsive to said electric current, and determining said electrical signal as a measure of characteristics of the radiation.
Claim 17
Dependent Claim
15 words
A method according to claim 9, wherein said laser radiation is CO 2 laser radiation.
Claim 18
Dependent Claim
20 words
A method according to claim 9, wherein said laser radiation is from Nd:YAG or any other higher power pulsed laser.
Claim 19
Dependent Claim
18 words
A method according to claim 9, wherein said thin film has a thickness of 2 to 7 μm.
Claim 20
Dependent Claim
45 words
A detection device for laser radiation comprising a thin film of tellurium semi-conductor material having a thickness of 2 to 7μm and a substantial crystallographic texture, formed on a (100) plane of a single crystal silicon substrate, said film being electrically isolated from said substrate.
Claim 21
Dependent Claim
45 words
A detection device for laser radiation comprising a thin film of tellurium semi-conductor material having a thickness of 2 to 7μm and a substantial crystallographic texture, formed on a (100) plane of a single crystal silicon substrate, said film being electrically isolated from said substrate.
Claim 22
Dependent Claim
20 words
A device according to claim 16, further including a pair of electrical contact elements in electrical contact with said film.
Claim 23
Dependent Claim
57 words
A detection device for laser radiation comprising a thin film of tellurium semi-conductor material having a thickness of about 5 μm and in the range of 2 to 7 μm and a substantial crystallographic texture, formed on a crystallographic face of a single crystal or highly crystalline silicon substrate, said film being electrically isolated from said substrate.
Claim 24
Dependent Claim
57 words
A detection device for laser radiation comprising a thin film of tellurium semi-conductor material having a thickness of about 5 μm and in the range of 2 to 7 μm and a substantial crystallographic texture, formed on a crystallographic face of a single crystal or highly crystalline silicon substrate, said film being electrically isolated from said substrate.
Claim 25
Dependent Claim
20 words
A device according to claim 15, further including a pair of electrical contact elements in electrical contact with said film.
Claim 26
Independent Claim
83 words
An apparatus for detecting laser radiation comprising: a thin film of tellurium semi-conductor material having a substantial crystallographic texture, said material being of non-centrosymmetric lattice structure, said thin film having a thickness of 2 to 7 μm and being supported on a single crystal silicon, a pair of electrical contact elements in electrical contact with said film, and means for determining an electrical signal induced in said thin film by laser radiation, said means being in electrical contact with said electrical contact elements.
Claim 27
Independent Claim
83 words
An apparatus for detecting laser radiation comprising: a thin film of tellurium semi-conductor material having a substantial crystallographic texture, said material being of non-centrosymmetric lattice structure, said thin film having a thickness of 2 to 7 μm and being supported on a single crystal silicon, a pair of electrical contact elements in electrical contact with said film, and means for determining an electrical signal induced in said thin film by laser radiation, said means being in electrical contact with said electrical contact elements.
Claim 28
Dependent Claim
12 words
An apparatus according to claim 20, wherein said means comprises an oscilloscope.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1994-09-09 | 1995-03-11 | 1995-09-10 | $2000.00 | Window Closed / Lapsed |
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