Josephson devices and process for manufacturing the same
Abstract
Abstract A Josephson device, comprising a junction formed by forming the first layer-shaped oxide superconductor thin film including a plurality of Cu-O layers on a substrate, a barrier layer thereon and the second layer-shaped oxide superconductor thin film on the barrier layer. The Josephson device according to the present invention is manufactured by forming the first layer-shaped oxide superconductor thin film on a substrate, forming a barrier layer in the same vacuum chamber, defining patterns to said barrier layer and said first layer-shaped oxide superconductor thin film, forming an interlayer insulating film on said barrier layer, removing said interlayer insulating film in a region serving as a junction, effecting exposure to oxygen plasma, forming the second layer-shaped oxide superconductor thin film in contact with a part of the surface of said barrier layer and defining patterns to said second layer-shaped oxide superconductor thin film.
Inventors
- 👤 Hidetaka Higashino
- 👤 Koichi Mizuno
- 👤 Hideaki Adachi
- 👤 Kentaro Setsune
- 👤 Akira Enokihara
- 👤 Shinichiro Hatta
- 👤 Kiyotaka Wasa
- 👤 Shigemi Kohiki
- 👤 Tomoaki Matsushima
Bibliographic Details
Claims Analysis
Total Claims: 6References Cited (Backward Citations)
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