US5045159A
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Derivatives of compounds containing a carbonyl group conjugated to an aromatic moiety and electrophilic methods of fabrication thereof
Assignee: International Business Machines Corp
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Filing: 1989-07-18
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Granted: 1991-09-03
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Expires: 2009-07-18
Abstract
Abstract Derivatives of compounds containing a carbonyl group conjugated to an aromatic moiety and methods of fabrication thereof consisting of a thioether, an ester, an ether, a phosphate and a silylether. Electrons are supplied to the carbonyl group conjugated to an aromatic moiety to form a reduced material. The reduced material is contacted with an electrophile which attacks and chemically combines with the carbonyl group conjugated to an aromatic moiety. The parent material can be regenerated by hydrolysis of the derivative. A silyl derivative can be selectively formed on a polyimide material surface which can act as a barrier to an RIE etch of the polyimide material. After etch the polyimide material is regenerated from the silyl derivative.
Inventors
- 👤 Martin J. Goldberg
- 👤 Daniel P. Morris
- 👤 Alfred Viehbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:10
CPC Classifications
C; C08; C08G; C08G85/00; C08G73/00; C08G73/06; C08G73/10; C08G73/1067; C08G73/1075; C08G73/1082; C25; C25B; C25B3/00; C25B3/01; C25B3/05; C25B3/07; C25B3/09; C25B3/20; C25B3/25; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; H05K3/00; H05K3/0011; H05K3/0017; H05K3/46; H05K3/4644
Claims Analysis
Total Claims: 56
Claim 1
Independent Claim
131 words
A method for forming a derivative of a compound having a carbonyl group conjugated at an aromatic moiety to form derivative compound selected from the group consisting of a substituted thioether, an ether, a phosphate and silylether comprising: supplying at least on electron to said carbonyl group conjugated to an aromatic moiety; contacting said conbonyl group conjugated to an aromatic moiety with said at least one electron thereon with an electrophile containing at least one atom selected from the group of S, C, P and Si; there being at least one anionic leaving group bonded to said at least one atom; said anionic leaving group leaves said atom providing a location at said atom to bond to said carbonyl group conjugated to an aromatic moiety with at least one electron thereon.
Claim 2
Independent Claim
131 words
A method for forming a derivative of a compound having a carbonyl group conjugated at an aromatic moiety to form derivative compound selected from the group consisting of a substituted thioether, an ether, a phosphate and silylether comprising: supplying at least on electron to said carbonyl group conjugated to an aromatic moiety; contacting said conbonyl group conjugated to an aromatic moiety with said at least one electron thereon with an electrophile containing at least one atom selected from the group of S, C, P and Si; there being at least one anionic leaving group bonded to said at least one atom; said anionic leaving group leaves said atom providing a location at said atom to bond to said carbonyl group conjugated to an aromatic moiety with at least one electron thereon.
Claim 3
Dependent Claim
129 words
The method of claim 1, wherein electrophile has general structural formula: R'(R.sub.s Y.sub.t X.sub.m).sub.n wherein R' is an organic or inorganic radical; wherein R is at least one from the group of hydrogen, an aliphatic radical, a substituted aliphatic radical, an aromatic radical, a substituted aromatic radical, a heterocyclic radical, a substituted heterocyclic radical and combinations thereof; wherein Y is selected from the group consisting of S, C, P and Si; wherein X is a anionic leaving group; wherein s≧0, t≧0, m≧1 and n≧1; wherein each member of the group of R', R, Y and X forms at least one chemical bond with at elast one other member of the group of R, R', Y and X; and wherein there is at least one X bound to one Y.
Claim 4
Dependent Claim
21 words
The method of claim 1, wherein said compound is selected from the group of an imide compound and a benzoyl compound.
Claim 5
Dependent Claim
13 words
The method of claim 3, wherein said imide compound is a polyimide compound.
Claim 6
Dependent Claim
28 words
The method of claim 4 wherein said polyimide compound is cured by any method by which imide ring cyclization can be obtained, including thermal and chemical dehydration curing.
Claim 7
Dependent Claim
41 words
The method of claim 5, wherein said polyimide compound is a free-standing or supported film derived from a dianhydride selected from the group of pyromellitic dianhydride, 3,3', 4,4-benzophenonetetracarboxylic dianhydride, 3,3'-biphenylenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, perylenetetracarboxylic dianhydride, 4,4'-(hexafluoroisopropylidene)-bis-phthalic anhydride, and bis(3,4-dicarboxyphenyl) sulfide dianhydride.
Claim 8
Dependent Claim
35 words
The method of claim 4, wherein said derivative is a silyleter, said Y constituent of said electrophile is Si and said compound forms a polyimide body, further including selectively derivatizing a surface of said body.
Claim 9
Dependent Claim
11 words
The method of claim 7, wherein said electrophile is the trimethylsilylchloride.
Claim 10
Dependent Claim
21 words
The method of claim 8, further including etching the regions of said polyimide body surface which are free of silyl species.
Claim 11
Dependent Claim
18 words
The method of claim 9 wherein said regions free of silyl species are etched by an RIE etch.
Claim 12
Dependent Claim
15 words
The method of claim 10 wherein said RIE etch is an O 2 RIE etch.
Claim 13
Dependent Claim
19 words
The method of claim 7 further including exposing said silyl species to dilute acid to regenerate said polyimide material.
Claim 14
Dependent Claim
26 words
The method of claim 1, wherein said anionic leaving group is selected from the group consisting of halide ions tosylates, brosylates, mesylates, triflates, nitrogene and arylesters.
Claim 15
Dependent Claim
58 words
The method of claim 1, wherein said electrons are supplied to said carbonyl group conjugated to said aromatic moiety by contacting said compound with a solution containing a chemical reducing agent that is energetically disposed to transferring electron(s) to said carbonyl group conjugated to said aromatic moiety without causing said chemical reducing agent to remain with said compound.
Claim 16
Dependent Claim
39 words
The method of claim 14 wherein said chemical reducing agent is a neutral organic compound whereby all or a portion of the said neutral organic compound has been electrochemically reduced in an aprotic solvent containing a supporting electrolyte salt.
Claim 17
Dependent Claim
49 words
The method of claim 15 wherein said neutral organic compound is at least one species selected from the group of unsaturated aromatic hydrocarbons, aromatic carbonyl compound, imides, diimides, carbodiimides, anhydrides, quinones, quaternary aromatic nitrogen compounds, azomethanes, immonium salts, azo compounds, amine oxides, nitro and nitroso compounds and organometallic compounds.
Claim 18
Dependent Claim
62 words
The method of claim 15 wherein said supporting electrolyte salt contains a cation which is at least on member of the group of tetraalkylammonium, tetralkylphosphonium, alkali metal, mixed alkyl-aryl ammonium, mixed alkyl-aryl phosphonium, or chelated metal and said supporting electrolyte salt anion is at least one member selected from the group of tetrafluoroborate, hexafluorophosphate, perchlorate, halide, aryl sulfonate and aromatic organic compounds.
Claim 19
Dependent Claim
37 words
The method of claim 15 wherein said supporting electrolyte salt contains at least one member selected from the group of tetrabutylammonium tetrafluoroborate, tetraethylammonium tetrafluoroborate, tetrabutylammonium hexafluorophosphate, tetraethylammonium bromide, lithium tetrafluoroborate, lithium perchlorate, benzyltributylammonium tetrafluoroborate and sodium naphthalenide.
Claim 20
Dependent Claim
35 words
The method of claim 15 wherein said aprotic solvent is at least on member selected from the group of nitriles, nitro compounds, amides, cyclic amides, amines, esters, cyclic esters, ethers, carbonates, oxides and sulfo compounds.
Claim 21
Dependent Claim
38 words
The method of claim 15 wherein the said aprotic solvent is selected from at least one member of the group of acetonitrile, N,N-dimethylformamide, N-methylformamide, N,N-diethylformamide, N-ethylformamide, N,N-dimethylacetamide, N-methyl-2-pyrrolidone, hexamethylphosphoramide, propylene carbonate, ethylene carbonate γ-butyrolactone, dimethylsulfoxide, acetone and sulfolane.
Claim 22
Dependent Claim
33 words
The method of claim 15 wherein said aprotic solvent is at least one member selected from the group of nitriles, nitro compounds, amides, cyclic amides, amines, esters, ethers, carbonates, oxides and sulfo compounds.
Claim 23
Dependent Claim
36 words
The method of claim 15 wherein the said aprotic solvent is selected from at least one member of the group of acetonitrile, N,N-dimethylformamide, N-methylformamide, N,N-diethylformamide, N-ethylformamide, N,N-dimethylacetamide, N-methyl-2-pyrrolidone, hexamethylphosphoramide propylene carbonate, δ-butyrolactone, dimethylsulfoxide, acetone and sulfolane.
Claim 24
Dependent Claim
40 words
The method of claim 14 wherein said reducing agent is selected from the group of benzoin dianion, benzil anion, anthracene anion, dibenzoylmethane radical anion, benzophenone anion, anthraquinone anion, 9-fluorenone anion, N-n-butylphahalimide anion, N,N'-di-n-butyl-3-3',4,4' -biphenylteteracarboxy-lic diimide anion, N,N'-di-n-butylpyromellitimide anion, 1-azafluoranthene anion.
Claim 25
Dependent Claim
11 words
The method of claim 1 wherein said electrons are supplied electrochemically.
Claim 26
Dependent Claim
32 words
The method of claim 1 wherein said electrons are supplied electrochemically by a cathode in contact with said compound in an electrochemical circuit using an aprotic solvent containing a supporting electrolyte salt.
Claim 27
Dependent Claim
27 words
The method of claim 25 wherein the electrochemical reduction of said compound is done by either control of the current supply or control of the applied potential.
Claim 28
Dependent Claim
36 words
The method of claim 25 wherein said polyimide material is derived from a dianhydride selected from the group of pyromellitic dianhydride, 3,3,4,4'benzophenonetetracarboxylic dianhydride, 3,3-biphenylenetetracarboxylic dianhydride, naphthalenetetracarboxylic dianhydride, perylenetetracarboxylic dianhydride, 4,4'-(hexafluoroisopropylidene)-bis-phthalic anhydride, and bis (3,4-dicarboxyphenyl) sulfide dianhydride.
Claim 29
Dependent Claim
60 words
The method of claim 25 wherein said supporting electrolyte salt contains a cation of at least on member of the group tetraalkylammonium. tetraalkylphosphonium, alkali metal, mixed alkyl-aryl ammonium, mixed alkyl-aryl phosphonium, or chelated metal, and said supporting electrolyte salt anion is selected from at least one member of the group tetrafluoroborate, hexafluorophosphate, perchlorate, halide, aryl sulfonate, or aromatic organic compounds.
Claim 30
Dependent Claim
35 words
The method of claim 25 wherein said supporting electrolyte salt is at least one member selected from the group tetrabutylammonium tetrafluoroborate, tetraethylammonium tetrafluoroborate, tetrabutylammonium hexafluorophosphate, tetraethylammonium bromide, lithium tetrafluoroborate, lithium tetrafluoroborate, lithium perchlorate, benzyltributylammonium tetrafluoroborate.
Claim 31
Dependent Claim
52 words
The method of claim 1 wherein the surface of a body formed from said compound is patterned with a resist like material or metal or inorganic material to act as a mask prior to supplying electrons to said carbonyl conjugated to an aromatic group thereby selectively exposing said surface to said electrons.
Claim 32
Dependent Claim
26 words
The methods of claim 1, wherein the electrophile having S as said Y constituent is selected from the group consisting of aliphatic, aromatic and aromatic-aliphatic disulfides.
Claim 33
Dependent Claim
23 words
The method of claim 1, wherein said electrophile chemically combines with the oxygen atom of said carbonyl group conjugated to an aromatic moiety.
Claim 34
Dependent Claim
31 words
The method of claim 1, wherein the electrophile having C as the Y constituent is selected from the group consisting of substituted and unsubstituted aliphatic, aromatic and heterocyclic halides and anhydrides.
Claim 35
Dependent Claim
26 words
The method of claim 1, wherein the electrophile having P as the Y constituent is selected from the group consisting of halodialkylphosphines, halodiarylphosphines and phosphorous oxychlorides.
Claim 36
Dependent Claim
24 words
The method of claim 1 wherein the electrophile having Si as the Y constituent is selected from the group consisting of silylhalides and silazanes.
Claim 37
Dependent Claim
16 words
The method of claim 1, wherein a support solvent for said electrophile is an aprotic solvent.
Claim 38
Dependent Claim
52 words
The method of claim 1, wherein said electrons supplied to said carbonyl group conjugated to said aromatic moiety provides a reduced form of said compound, one of said electrons substantially residing at the oxygen atom of said carbonyl group wherein said electrophile chemically combines with said oxygen atom having said electron thereon.
Claim 39
Dependent Claim
24 words
The method of claim 1, further including converting said derivative back to said compound by treating said derivative with an acid or acidic solution.
Claim 40
Independent Claim
172 words
A method for forming a derivative of a compound containing the following group comprising: ##STR18## suppling electrons to said group of said compound to form a reduced form of said compound; contacting said reduced form with an electrophile selected from the group consisting of compounds having structural formula: R'(R.sub.s Y.sub.t X.sub.m).sub.n wherein R is selected from the group consisting of a aliphatic radical, a substituted aliphatic radical, an aromatic radical, a substituted aromatic radical, a heterocyclic radical a substituted heterocyclic radical and combinations thereof, wherein Y is selected from the group consisting of S, C, P and Si, wherein X is a cationic leaving group, wherein s≧O, t≧O, m≧1 and n≧1; wherein each member of the group of R', R, Y and X forms at least one chemical bond with at least one other member of the group R, R',Y and X; and wherein there is at least one X bound to one Y, said Y of said electrophile chemically combining with the oxygen atom of said at least one carbonyl group.
Claim 41
Independent Claim
172 words
A method for forming a derivative of a compound containing the following group comprising: ##STR18## suppling electrons to said group of said compound to form a reduced form of said compound; contacting said reduced form with an electrophile selected from the group consisting of compounds having structural formula: R'(R.sub.s Y.sub.t X.sub.m).sub.n wherein R is selected from the group consisting of a aliphatic radical, a substituted aliphatic radical, an aromatic radical, a substituted aromatic radical, a heterocyclic radical a substituted heterocyclic radical and combinations thereof, wherein Y is selected from the group consisting of S, C, P and Si, wherein X is a cationic leaving group, wherein s≧O, t≧O, m≧1 and n≧1; wherein each member of the group of R', R, Y and X forms at least one chemical bond with at least one other member of the group R, R',Y and X; and wherein there is at least one X bound to one Y, said Y of said electrophile chemically combining with the oxygen atom of said at least one carbonyl group.
Claim 42
Independent Claim
103 words
A method for forming a derivative of a compound containing a carbonyl group conjugated to an aromatic moiety, comprising: supplying electrons to said carbonyl group conjugated to an aromatic moiety of said compound to form a reduced compound in a solution of said reduced compound and a solvent; adding to said solution an electrophile containing at least one atom selected from the group consisting of S, C, P and Si, there being at least one anionic leaving group bonded to said at least one atom; and said electrophile chemically combining with the oxygen atom of said carbonyl group conjugated to an aromatic moiety.
Claim 43
Independent Claim
103 words
A method for forming a derivative of a compound containing a carbonyl group conjugated to an aromatic moiety, comprising: supplying electrons to said carbonyl group conjugated to an aromatic moiety of said compound to form a reduced compound in a solution of said reduced compound and a solvent; adding to said solution an electrophile containing at least one atom selected from the group consisting of S, C, P and Si, there being at least one anionic leaving group bonded to said at least one atom; and said electrophile chemically combining with the oxygen atom of said carbonyl group conjugated to an aromatic moiety.
Claim 44
Dependent Claim
56 words
A compound having structural formula: ##STR19## wherein t≧1; wherein R" is an organic radical; wherein R 1 is an organic radical; wherein a is 0 or 1; wherein Z is selected from the group of free electron radicals and a hydrogen radical; and wherein Q is selected from the group consisting of organic and inorganic radials.
Claim 45
Dependent Claim
56 words
A compound having structural formula: ##STR19## wherein t≧1; wherein R" is an organic radical; wherein R 1 is an organic radical; wherein a is 0 or 1; wherein Z is selected from the group of free electron radicals and a hydrogen radical; and wherein Q is selected from the group consisting of organic and inorganic radials.
Claim 46
Dependent Claim
20 words
The compound of claim 41 wherein Q includes atoms selected from the group consisteing of S, C, P and Si.
Claim 47
Dependent Claim
11 words
The compound of claim 42 wherein Q is an organic radical.
Claim 48
Dependent Claim
18 words
The compound of claim 41, wherein R" has structural formula wherein R is a tetravalent organic radical ##STR20##
Claim 49
Dependent Claim
112 words
The compound of claim 41 wherein Q has general chemical formula: R'(R.sub.s.sup.4 Y.sub.t R.sub.m.sup.5) .sub.(n-1) R.sub.s.sup.4 Y.sub.(t-1) R.sup.5.sub.(m-1) wherein Y is selected from the group consisting of S, C, P and Si; wherein R 4 is at least one from the group of an aliphatic radical, a substituted aliphatic radical, an aromatic radical, a substituted aromatic radical, a heterocyclic radical a substituted heterocyclic radical and combinations thereof; and wherein R 5 is selected from one or more of a repeat unit of the same molecule of said compound, a repeat unit of another molecule of said compound, a compound containing a metal atom chelated to said Y constituent and an epoxy molecule.
Claim 50
Dependent Claim
101 words
The compound of claim 41, wherein said tetravalent organic radical is at least one selected from the group consisting of: ##STR21## wherein R 2 is selected from the group consisting of divalent aliphatic hydrocarbon radicals having from 1 to 4 carbon atoms and carbonyl, oxy, sulfo, sulfide, ether, siloxane, phosphine oxide, hexafluoroisopropylidene and sulfonyl radicals; wherein R 1 is at least one divalent radical selected from the group consisting of an aliphatic organic radical and from the group of ##STR22## wherein R 3 is a divalent organic radical selected from the group consisting of R 2 , silico and amino radical.
Claim 51
Dependent Claim
41 words
A compound having structural formula: ##STR23## wherein t≧1, wherein R 1 is an organic radical; wherein a is 0 or 1; wherein R is a tetravalent organic radical; and wherein Q is selected from the group of organic and inorganic radicals.
Claim 52
Dependent Claim
41 words
A compound having structural formula: ##STR23## wherein t≧1, wherein R 1 is an organic radical; wherein a is 0 or 1; wherein R is a tetravalent organic radical; and wherein Q is selected from the group of organic and inorganic radicals.
Claim 53
Dependent Claim
20 words
The compound of claim 47, wherein Q includes atoms selected from the group consisting of S, C, P and Si.
Claim 54
Dependent Claim
11 words
The compound of claim 48, wherein Q is an organic radical.
Claim 55
Dependent Claim
98 words
The compound of claim 47, wherein Q has general formula: R'(R.sub.s.sup.4 Y.sub.t R.sub.m.sup.5) .sub.(n-1) R.sub.s.sup.4 Y.sub.(t-1) R.sup.5.sub.(m-1) Y-- wherein Y is selected from the group consisting of S, C, P and Si; wherein R 4 is at least one from the group of substituted and nonsubstituted aliphatic radicals, aromatic radicals, heterocyclic radicals and combinations thereof; and wherein R 5 is selected from one or more of a repeat unit of the same said compound, a repeat unit of another molecule of said compound, a compound containing a metal atom chelated to said Y constitutent and an epoxy molecule.
Claim 56
Dependent Claim
101 words
The compound of claim 47, wherein said tetravalent organic radical is at least one selected from the group consisting of: ##STR24## wherein R 2 is selected from the group consisting of divalent aliphatic hydrocarbon radicals having from 1 to 4 carbon atoms and carbonyl, oxy, sulfo, sulfide, ether, siloxane, phosphine oxide, hexafluoroisopropylidene and sulfonyl radicals; wherein R 1 is at least one divalent radical selected from the group consisting of an aliphatic organic radical and from the group of ##STR25## wherein R 3 is a divalent organic radical selected from the group consisting of R 2 , silico, and amino radicals.
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