US5037876A
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Planarizing dielectric
Assignee: Qimonda AG
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Filing: 1990-04-05
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Granted: 1991-08-06
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Expires: 2010-04-05
Abstract
Abstract A planarizing dielectric, which is particularly suitable for electronic components, fulfills the required properties to a high degree when it comprises a matrix of a high-temperature resistant, organic polymer, into which matrix is intercalated in fine distribution a solid filler material, which is etchable in oxygen plasma, has high thermal conductivity and good dielectric properties.
Inventors
- 👤 Siegfried Birkle
- 👤 Albert Hammerschmidt
- 👤 Johann Kammermaier
- 👤 Rainer Leuschner
- 👤 Rolf-W. Schulte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:56
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; H10P14/69; H10P14/6902; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P50/28; H10P50/282; H10P50/283; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/251; H10W74/00; H10W74/40; H10W74/47; H10W74/473; H10P14/63; H10P14/6326; H10P14/6342
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
60 words
A planarizing dielectric, in particular for electronic components, comprising a matrix of a high-temperature resistant organic polymer having intercalated therein a fine distribution of a solid filler material which is etchable in an oxygen plasma and has high thermal conductivity and good dielectric properties, the solid filler material being selected from the group consisting of diamond and amorphous, hydrogenated carbon.
Claim 2
Dependent Claim
60 words
A planarizing dielectric, in particular for electronic components, comprising a matrix of a high-temperature resistant organic polymer having intercalated therein a fine distribution of a solid filler material which is etchable in an oxygen plasma and has high thermal conductivity and good dielectric properties, the solid filler material being selected from the group consisting of diamond and amorphous, hydrogenated carbon.
Claim 3
Dependent Claim
19 words
A planarizing dielectric according to claim 1 wherein said filler material amounts up to 30 Vol.-% of said dielectric.
Claim 4
Dependent Claim
16 words
A planarizing dielectric according to claim 1 wherein said filler material is an amorphous, hydrogenated carbon.
Claim 5
Dependent Claim
18 words
A planarizing dielectric according to claim 1 wherein said filler material has a particle size of <50 nm.
Claim 6
Dependent Claim
22 words
A planarizing dielectric according to claim 1 wherein the polymer is selected from the group consisting of ladder polymers and semi-ladder polymers.
Claim 7
Dependent Claim
13 words
A planarizing dielectric according to claim 5 wherein the polymer is a polybenzoxazole.
Claim 8
Dependent Claim
16 words
A planarizing dielectric according to claim 2 wherein said filler material is an amorphous hydrogenated carbon.
Claim 9
Dependent Claim
18 words
A planarizing dielectric according to claim 2 wherein said filler material has a particle size of <50 nm.
Claim 10
Dependent Claim
18 words
A planarizing dielectric according to claim 3 wherein said filler material has a particle size of <50 nm.
Claim 11
Dependent Claim
18 words
A planarizing dielectric according to claim 7 wherein said filler material has a particle size of <50 nm.
Claim 12
Dependent Claim
22 words
A planarizing dielectric according to claim 2 wherein the polymer is selected from the group consisting of ladder polymers and semi-ladder polymers.
Claim 13
Dependent Claim
22 words
A planarizing dielectric according to claim 3 wherein the polymer is selected from the group consisting of ladder polymers and semi-ladder polymers.
Claim 14
Dependent Claim
22 words
A planarizing dielectric according to claim 4 wherein the polymer is selected from the group consisting of ladder polymers and semi-ladder polymers.
Claim 15
Dependent Claim
22 words
A planarizing dielectric according to claim 7 wherein the polymer is selected from the group consisting of ladder polymers and semi-ladder polymers.
Claim 16
Dependent Claim
22 words
A planarizing dielectric according to claim 10 wherein the polymer is selected from the group consisting of ladder polymers and semi-ladder polymers.
Claim 17
Dependent Claim
13 words
A planarizing dielectric according to claim 2 wherein the polymer is a polybenzoxazole.
Claim 18
Dependent Claim
13 words
A planarizing dielectric according to claim 3 wherein the polymer is a polybenzoxazole.
Claim 19
Dependent Claim
13 words
A planarizing dielectric according to claim 4 wherein the polymer is a polybenzoxazole.
Claim 20
Dependent Claim
13 words
A planarizing dielectric according to claim 7 wherein the polymer is a polybenzoxazole.
Claim 21
Dependent Claim
13 words
A planarizing dielectric according to claim 10 wherein the polymer is a polybenzoxazole.
References Cited (Backward Citations)
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