US5030008A
Expired / Lapsed
US
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Method and apparatus for the automated analysis of three-dimensional objects
Assignee: KLA Corp
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Filing: 1988-10-11
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Granted: 1991-07-09
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Expires: 2008-10-11
Abstract
Abstract An optomechanical system for illuminating and imaging selected portions of a three dimensional object having specularly reflective surfaces, including a two dimensional image sensor for receiving light reflected from the selected portions and producing an analog output signal representing a two dimensional image of the selected portions over a predetermined time period, a video digitizer for receiving and converting the analog output signal to a digital signal, and an image computer for receiving the digital signal output by the video digitizer, comparing the information obtained from the output digital signal to the stored specifications of a master of the imaged portion of the object, indicating whether the imaged object meets the specifications of the master, controlling the movement of the imaged object, and controlling the operation of the system.
Inventors
- 👤 Richard S. F. Scott
- 👤 Yoram Uziel
- 👤 Franco A. Filice
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:58
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0444; G01N21/17; G01N2021/178; G01N2021/1785; G01N2201/00; G01N2201/10; G01N2201/103; G01N2201/1035; H10W; H10W72/00; H10W72/071; H10W72/075; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/50; H10W72/531; H10W72/536; H10W72/5363; H10W72/541; H10W72/547; H10W72/5473; H10W90/00; H10W90/701; H10W90/751; H10W90/754
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
136 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces, comprising: means for selectively illuminating said portion at one or more angles of incidence of illumination so as to create an optical contrast between said portion and the remainder of said object; optical means having an optical axis and operative to collect light reflected from the object and to convert said light into an electrical signal representing an image of said portion; and means responsive to said electrical signal and operative to detect maximum contrast between said portion and the remainder of said object and to determine therefrom a set of measurements corresponding to the physical dimensions of said portion from said signal, said set including the position of said portion along said optical axis.
Claim 2
Independent Claim
136 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces, comprising: means for selectively illuminating said portion at one or more angles of incidence of illumination so as to create an optical contrast between said portion and the remainder of said object; optical means having an optical axis and operative to collect light reflected from the object and to convert said light into an electrical signal representing an image of said portion; and means responsive to said electrical signal and operative to detect maximum contrast between said portion and the remainder of said object and to determine therefrom a set of measurements corresponding to the physical dimensions of said portion from said signal, said set including the position of said portion along said optical axis.
Claim 3
Dependent Claim
69 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces, as recited in claim 1, and wherein said means operative to determine includes means for comparing said set of measurements to a predetermined master set of specifications corresponding to acceptable dimensions of a master of said portion to determine if said portion meets said specifications for said portion.
Claim 4
Dependent Claim
67 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 2, wherein said illuminating means includes a narrow angle illumination means for projecting a first column of light incident to said object, said first column being projected at an angle of incidence substantially parallel to the optical axis of said illumination means.
Claim 5
Dependent Claim
64 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 3, wherein said illuminating means further includes a wide angle illumination means for projecting a second column of light incident to said object, said second column's circumference being projected at a large angle of incidence to said optical axis.
Claim 6
Dependent Claim
64 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 4, wherein said illuminating means further includes a slight angle illumination means for projecting a third column of light incident to said object, said third column's circumference being projected at a slight angle of incidence to said optical axis.
Claim 7
Dependent Claim
56 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 5, wherein said means includes: a photo-responsive device for collecting said light and creating said electrical signal; and optical system for directing and focusing said light incident to said photo-responsive device.
Claim 8
Dependent Claim
42 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 5, wherein said optical system includes means for selectively varying the numeric aperture of said lens system.
Claim 9
Dependent Claim
59 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 7, wherein said varying means includes a first numeric aperture control means for selectively increasing or reducing the numeric aperture of said optical system without affecting said first, second, or third column s circumference.
Claim 10
Dependent Claim
58 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 4, wherein said collecting means includes: a photo-responsive device for collecting said light and creating said electrical signal; and an optical system for directing and focusing said light incident to said photo-responsive device.
Claim 11
Dependent Claim
42 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 9, wherein said optical system includes means for selectively varying the numeric aperture of said optical system.
Claim 12
Dependent Claim
59 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 10, wherein said varying means includes a first numeric aperture control means for selectively increasing or reducing the numeric aperture of said optical system without affecting the circumference of said first or second column.
Claim 13
Dependent Claim
103 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 3, wherein said collecting means is operative to output said signal, and wherein said comparing means includes a computer for receiving said signal, determining said set of measurements from said signal, comparing said set of measurements to said master set of specifications stored in the memory of said computer, determining if said portion meets said master set of specifications, and developing and outputting a control signal for controlling the operation of said illuminating means and said collecting means.
Claim 14
Dependent Claim
48 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 12, wherein said illuminating means includes variable aperture means through which said first column is projected and means for selectively varying said aperture.
Claim 15
Dependent Claim
84 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 13, wherein said variable aperture includes a movable first aperture stop for selectively increasing or reducing the aperture through which said first column is projected; and wherein said varying means includes a first stop control means responsive to said control signal and operative to position said first aperture stop in and out of coaxial alignment with said optical axis.
Claim 16
Dependent Claim
117 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 2, wherein said collecting means is operative to output said signal, and wherein said comparing means includes a computer for receiving said signal, determining said set of measurements from said signal, comparing said set of measurements to a predetermined master set of specifications stored in the memory of said computer and corresponding to the physical dimensions of a master image of said portion, determining if said portion meets said master set of specifications, and developing and outputting a control signal for controlling the operation of said illuminating means and said collecting means.
Claim 17
Dependent Claim
88 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 15, wherein said illuminating means includes: a lens having a first aperture coaxial with said optical axis; an aperture slide having a second aperture smaller than said first aperture and operative to be positioned in and out of coaxial alignment with said optical axis; and a slide control means responsive to said control signal and operative to change the position of said slide.
Claim 18
Dependent Claim
133 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 16, wherein said illumination means includes: a narrow angle illumination means for projecting a first column of light incident to said object, said first column's circumference being projected at an angle of incidence substantially parallel to the optical axis of said illumination means; a wide angle illumination means for projecting a second column of light incident to said object, said second column's circumference being projected at a large angle of incidence to said optical axis; and a slight angle illumination means for projecting a third column of light incident to said object, said third column's circumference being projected at a slight angle of incidence to said optical axis.
Claim 19
Dependent Claim
48 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 17, wherein said slight angle illumination means includes a ring of selectively actuable light sources disposed around the perimeter of said first aperture.
Claim 20
Dependent Claim
76 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 18, wherein said wide angle illumination means includes: a wide angle illumination support disposed on the object said of said lens, said support having a third aperture formed therein and operative to encircle said portion; and a ring of selectively actuable light sources disposed around the perimeter of said third aperture.
Claim 21
Dependent Claim
71 words
An apparatus for automatically analyzing the physical characteristics of a selected portion of a three dimensional object having specularly reflective surfaces as recited in claim 16, and further including: a first drive means responsive to said control signal and operative to control the position of said apparatus; and a second drive means responsive to said control signal and operative to control the position of said object with respect to said apparatus.
Claim 22
Independent Claim
160 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical analysis system imaging said portion as a means of measuring a physical relationship of said portion to said object, comprising the steps of: positioning said system with respect to said objects in a manner so as to cause the optical depth of field for said system to be above or below said portion; moving said system relative to said object in a manner so as to cause said portion to go through being in focus by said system; collecting light reflected from said object and determining the height of said system and the intensity of light reflected from said portion for each of a number of positions of said system; and selecting a position at which said system detected a maximum contrast of reflected light between said portion and said portion's background as the distance from said portion to said portion.
Claim 23
Independent Claim
160 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical analysis system imaging said portion as a means of measuring a physical relationship of said portion to said object, comprising the steps of: positioning said system with respect to said objects in a manner so as to cause the optical depth of field for said system to be above or below said portion; moving said system relative to said object in a manner so as to cause said portion to go through being in focus by said system; collecting light reflected from said object and determining the height of said system and the intensity of light reflected from said portion for each of a number of positions of said system; and selecting a position at which said system detected a maximum contrast of reflected light between said portion and said portion's background as the distance from said portion to said portion.
Claim 24
Dependent Claim
57 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical inspection system as recited in claim 21, wherein said maximum contrast of reflected light is created by selectively illuminating said object in such a manner so as to maximize the contrast between said portion and said portion's background.
Claim 25
Dependent Claim
61 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical inspection system as recited in claim 22, and further including the step of illuminating said object with a first column of light in a manner so as to create said maximum contrast of reflected light between said portion and said portion's background.
Claim 26
Dependent Claim
69 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical inspection system as recited in claim 23, wherein said step of illuminating said object includes the step of determining an angle of incidence for said first column's circumference which will cause said portion to reflect light toward said system and said portion's background to reflect light way from said system.
Claim 27
Dependent Claim
41 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical inspection system as recited in claim 24, wherein said angle of incidence is substantially parallel to the optical axis of said system.
Claim 28
Dependent Claim
43 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical inspection system as recited in claim 24, wherein said angle of incidence is at a slight angle to the optical axis of said system.
Claim 29
Dependent Claim
43 words
A method for automatically determining the distance from a selected portion of a three dimensional object to an optical inspection system as recited in claim 24, wherein said angle of incidence is at a large angle to the optical axis of said system.
Claim 30
Independent Claim
172 words
A method for automatically analyzing the physical characteristics of selected portions of a three dimensional object having specularly reflective surfaces, comprising the steps of: p1 (a) illuminating a portion of said object to be analyzed at one or more angles of incidence of illumination so as to create an optical contrast between said portion and the remainder of said object; (b) collecting light reflected from said portion and the remainder of said object and converting said light into an electrical signal representing an image of said object; (c) determining a set of measurements corresponding to the physical dimensions of said portion from said signal, said set including the elevation of said portion relative to the remainder of said object; (d) comparing said set of measurements to a predetermined master set of specifications derived from acceptable dimensions of a master for said portions and said object to determine if said portion meets said specifications for said portion; and (e) repeating steps (a) through (d) for each portion of said object to be inspected.
Claim 31
Independent Claim
172 words
A method for automatically analyzing the physical characteristics of selected portions of a three dimensional object having specularly reflective surfaces, comprising the steps of: p1 (a) illuminating a portion of said object to be analyzed at one or more angles of incidence of illumination so as to create an optical contrast between said portion and the remainder of said object; (b) collecting light reflected from said portion and the remainder of said object and converting said light into an electrical signal representing an image of said object; (c) determining a set of measurements corresponding to the physical dimensions of said portion from said signal, said set including the elevation of said portion relative to the remainder of said object; (d) comparing said set of measurements to a predetermined master set of specifications derived from acceptable dimensions of a master for said portions and said object to determine if said portion meets said specifications for said portion; and (e) repeating steps (a) through (d) for each portion of said object to be inspected.
Claim 32
Dependent Claim
84 words
A method for automatically analyzing the physical characteristics of selected portions of a three dimensional object having specularly reflective surfaces as recited in claim 28, and further including the steps of: (f) preceding step (a), establishing a first off-set between the position of said object and the corresponding position of said master for said object; and (g) following step (c), adjusting said set of measurements by said first off-set to compensate for changes in position between said object and said master for said object.
Claim 33
Dependent Claim
63 words
A method for automatically analyzing the physical characteristics of selected portions of a three dimensional object having specularly reflective surfaces as recited in claim 29, wherein said step of collecting light includes the step of transmitting light reflected from said object through an optical system and onto a photo-responsive device operative to collect said light and convert said light into said electrical signal.
Claim 34
Dependent Claim
61 words
A method for automatically analyzing the physical characteristics of selected portions of a three dimensional object having specularly reflective surfaces as recited in claim 30, wherein said step of transmitting light includes the step of varying the numeric aperture of said optical system in a manner so as to restrict the surface area of said photo-responsive device exposed to said light.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-08 | 1995-01-07 | 1995-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-08 | 1999-01-07 | 1999-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-08 | 2003-01-07 | 2003-07-09 | $7700.00 | Window Closed / Lapsed |